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61. 发明专利

JPH09318504A DILUTION RATIO MEASURING EQUIPMENT 失效
公开(公告)号：JPH09318504A
公开(公告)日：1997-12-12
申请号：JP16090596
申请日：1996-06-01
申请人： HORIBA LTD
发明人： AKIYAMA SHIGEYUKI , IKUTA TAKUJI
IPC分类号： G01N1/00 , G01N1/22
摘要： PROBLEM TO BE SOLVED: To provide an equipment capable of simply measuring dilution ratio with high reliability. SOLUTION: A diluent gas line 2 for introducing diluent gas is combined and connected with a sampling line 1 for introducing sampling gas from a flue 3 to a gas analyzer 10. A calibration gas line 16 for introducing calibration gas is combined and connected with a part between the confluence point 15 of the diluent gas line in the sampling line 1 and the gas analyzer 10, in such a manner that switching operation is enabled. A bypass line 22 is connected with a part between the calibration gas line 16 and the diluent gas line 2, in such a manner that switching operation is enabled.

62. 发明专利

JPH09113446A INFRARED GAS ANALYZER 失效
公开(公告)号：JPH09113446A
公开(公告)日：1997-05-02
申请号：JP29174395
申请日：1995-10-13
申请人： HORIBA LTD
发明人： AKIYAMA SHIGEYUKI , FUJIWARA MASAHIKO , SHIMIZU NAOHITO , INOUE TETSUSHI , IKUTA TAKUJI
IPC分类号： G01N21/35 , G01N21/3504 , G01N21/61
摘要： PROBLEM TO BE SOLVED: To obtain an infrared gas analyzer in which the temperature of an infrared detector as a whole is adjusted in a well-balanced manner and in which a temperature abnormality and a failure are reduced by a method wherein a facelike heater which is provided with a self-temperature control function is arranged at the detector. SOLUTION: An infrared gas analyzer is provided with an infrared light source 1, with a filter part 2 in which a semitransparent mirror used to pass infrared rays in a usage wavelength region, a BPF and the like are housed at the inside, with a sample cell 3 which circulates a sample gas, with an infrared detector 4 which analyzes a component in the sample gas and with a facelike heater 5 Which is pasted on the rear surface of the infrared detector 4. As the heater 5, a thin sheetlike heating element, e.g. a heating element whose thin sheet itself is composed of a polymer conductive material, can be used, and its shape and its calorific value can be designated freely. In addition, the heater 5 is provided with a self-temperature control function due to the characteristic of the conductive material itself or due to a combination with a thermostat, and the circumference of the infrared detector 4 can be maintained easily at a constant temperature. Consequently, its temperature can be adjusted in a well-balanced manner as a whole.

63. 发明专利

JPH08323244A VARIABLE CLASSIFICATION TYPE CYCLONE 失效
公开(公告)号：JPH08323244A
公开(公告)日：1996-12-10
申请号：JP15692495
申请日：1995-05-31
申请人： CHUGOKU ELECTRIC POWER , HORIBA LTD
发明人： SHIROMARU ISAO , KADA MICHIO , AKIYAMA SHIGEYUKI , KOGA FUJIO
IPC分类号： B04C5/12 , B04C11/00
摘要： PURPOSE: To adjust classification characteristics variably by installing more than one blade which can adjust an angle in the lower part of an inner cylinder installed to discharge purified gas outside with an opening in the lower part faced the upper part of a separation chamber. CONSTITUTION: In a variable classification type cyclone equipped with a gas intake 1 for introducing exhaust gas and an inner cylinder 6 for discharging purified gas, more than one blade 7 which can adjust an angle is installed in the lower part of the inner cylinder 6. The blades 7 are connected interlockingly with each other by a link member and can change an angle by an actuator 9 such as a solenoid to be able to adjust classification characteristics changeably. In this way, when a revolving current collides against the blades 7, coarse particles loses inertia force and falls downward to be stored in a dust banker 4, while only fine particles are discharged from the inner cylinder 6 to be collected by a filter 11. In this process, a controller 8 computes a pressure loss on the basis of the signal of a pressure detection means 12 and controls the actuator 9 to minimize the pressure loss.

64. 发明专利

JPH08247942A INFRARED RAY GAS ANALYZER 失效
公开(公告)号：JPH08247942A
公开(公告)日：1996-09-27
申请号：JP7988295
申请日：1995-03-10
申请人： HORIBA LTD
发明人： AKIYAMA SHIGEYUKI , YONEDA ARITOSHI , FUJIWARA MASAHIKO
IPC分类号： G01N21/35 , G01N21/3518 , G01N21/61
摘要： PURPOSE: To provide an infrared ray gas analyzer which is less affected by temperature difference, can reduce interference influence due to a coexisting gas, and further can be miniaturized. CONSTITUTION: An infrared ray gas analyzer consists of an infrared ray light source 1, a sample cell 2, a split-type gas filter 3 with a comparison side space 3a where a constituent gas having the same sample gas to be measured or a gas with the same infrared ray absorption as a measurement constituent is sealed and a sample side space 3b where an inactive gas is enclosed, an interference filter 4 for passing a wavelength band within the same range passing the comparison side space 3a and the sample side space 3b of the split-type gas filter 3 and cutting off other wavelength bands, and a twin-type detector 5. Also, a gas filter where a gas with the same coexisting gas constituent for interfering with and affecting the measurement gas constituent is sealed may be provided between the sample cell 2 and the split-type gas filter 3.

65. 发明专利

JPH08153685A SPECIAL MATERIAL GAS SUPPLY DEVICE FOR SEMICONDUCTOR 失效
公开(公告)号：JPH08153685A
公开(公告)日：1996-06-11
申请号：JP31554994
申请日：1994-11-25
申请人： MITSUBISHI CORP , HORIBA LTD , STEC KK
发明人： HARADA MICHIYUKI , UNO TOSHIHIKO , AKIYAMA SHIGEYUKI , SHIMIZU TETSUO
IPC分类号： B01J4/02 , H01L21/205
摘要： PURPOSE: To provide a special material gas supply device for a semiconductor which can prevent troubles such as false connection, false piping or false exchange by incorporating a monitor for monitoring gas elements, concentration, flow rate, etc., in a gas piping system from a gas bomb container to a semiconductor manufacturing device. CONSTITUTION: Mass-flow controllers 11, 12, 13 are arranged in each of tube paths 5, 6, 7 connected to a plurality of gas bombs 1, 2, 3 containing special material gas for semiconductor. Thereby, an in-line gas monitor 9 is arranged in a middle of a tube path 10 between a junction 8 and a semiconductor manufacturing device 14, each output signal is checked by connecting the mass-flow controllers 11, 12, 13 and the in-line gas monitor 9 to a control device 15 for a semiconductor gas supply device and gas supply is controlled by coincidence or discrepancy of the signals.

66. 发明专利

JPH08122254A INFRARED GAS ANALYZER 失效
公开(公告)号：JPH08122254A
公开(公告)日：1996-05-17
申请号：JP28293594
申请日：1994-10-22
申请人： HORIBA LTD
发明人： FUJIWARA MASAHIKO , AKIYAMA SHIGEYUKI , UNO TOSHIHIKO , YONEDA ARITOSHI
IPC分类号： G01N21/3518 , G01N21/35 , G01N21/61
摘要： PURPOSE: To simultaneously detect two or more components, and judge whether or not measuring object gas is introduced to a single sample cell by arranging a light source on one side by sandwiching the cell, and arranging a light dividing means on the other side. CONSTITUTION: A light source 2 is arranged on one side by sandwiching a cell 1, and a chamber 4 enclosing a half mirror 3 is arranged on the other side, and a measuring solid detector 5 is arranged on one optical path A side of the half mirror 3, and a gas filter 6 and a comparing solid detector 7 are arranged on the other optical path B side, respectively. The change in the quantity of light to a measuring component absorbed by the cell 1 is equally divided to the detectors 5 and 7 by the half mirror 3, and respective detecting signals are outputted. The ratio or the difference of a signal quantity changes when the same kind of gas with sealing gas of the gas filter 6 is introduced to the cell 1 and when a different kind of gas is introduced to the cell 1. Therefore, whether the gas introduced to the cell 1 is measuring object gas or not can be judged by the ratio or the difference of this signal quantity.

67. 发明专利

JPH0755798A ORGANIC CONTAMINANT SUBSTANCE MEASURING METHOD USING ULTRAVIOLET OXIDATION 失效
公开(公告)号：JPH0755798A
公开(公告)日：1995-03-03
申请号：JP22222793
申请日：1993-08-14
申请人： HORIBA LTD
发明人： AKIYAMA SHIGEYUKI , FUKUSHIMA RYOSUKE , TSUTSUI TATSUHIDE
IPC分类号： G01N21/33 , G01N21/77 , G01N33/18
摘要： PURPOSE:To measure contaminant substance from a variation in ultraviolet ray absorbances before and after reaction by emitting an ultraviolet ray to a sample water and oxidizing the substance in water. CONSTITUTION:This apparatus comprises a sampling unit having a three-way solenoid valve 3, a constant-pressure trap 4 and a measuring controller 5, an ultraviolet absorbance meter 6, and an ultraviolet lamp 1 provided at an upstream of the meter 6. Lighting of the lamp 1 is synchronized with switching of a measuring line at the valve 3, and an ultraviolet absorbance before oxidation is measured in a state that the lamp 1 is not lit. Then, sample water 2 is emitted by the lamp 1 for a predetermined time to be oxidized, then the absorbance is measured Organic contaminant substance is measured from variations in the absorbances before and after the oxidization. Thus, the measurement can be simply conducted without using reagent.

68. 发明专利

JPH06118075A AMMONIA ANALYZER 失效
公开(公告)号：JPH06118075A
公开(公告)日：1994-04-28
申请号：JP28968092
申请日：1992-10-03
申请人： HORIBA LTD
发明人： KOGA FUJIO , AKIYAMA SHIGEYUKI
IPC分类号： G01N21/76 , G01N31/00
摘要： PURPOSE:To provide an ammonia analyzer capable of precisely continuously measuring NH3 concentration even in a sample gas having a large NO2 concentration ratio to NH3 concentration. CONSTITUTION:An ammonia analyzer 1 has a first converter 6 and a second converter 7 arranged in a first passage 3 and a third converter 8 in a second passage 4 to measure NH3 concentration by the differential quantity. It is also provided with a correcting means for correcting the difference in catalyst efficiency between the second converter 7 and the third converter 8.

69. 发明专利

JPS63302344A PARTICULATE MEASURING INSTRUMENT 失效
公开(公告)号：JPS63302344A
公开(公告)日：1988-12-09
申请号：JP13871287
申请日：1987-06-02
申请人： KURITA WATER IND LTD , HORIBA LTD
发明人： KUMAGAI TOSHIO , SHIGEMI KOKI , AKIYAMA SHIGEYUKI , SUZUKI RIICHIRO
IPC分类号： G01N15/00 , G01N15/14
摘要： PURPOSE:To simply judge whether a particle counter is normal when required by a simple mechanism by measuring the number of particulates contained in a liquid to be inspected that is supplied from a supply line for the liquid to be inspected. CONSTITUTION:Number of particulates measuring means 1 is provided with a supply line 2 for supplying a liquid to be inspected and a discharge line 3. Reference liquid supply means 6 is composed of an adding unit 6a and a plunger unit 6b. The number of particulates is read from a display unit 4. Then, a changeover switch 5 is changed over from a measuring mode to a cumulative mode and, at the same time, the measurement of a cumulative mode time is initiated. Thus, the number of the particulates instantaneously is displayed as zero. Then, since a prescribed quantity of a reference liquid is added to a liquid 10 to be inspected in a passage 9 from a disposal type injector cylinder 15 by turning a cock 11, the number of the particulates gradually increases and, after a peak value is reached finally, returns to the original value of the number of the particulates. A measurement is stopped at this time and changed over to the measuring mode again. The total sum of the numbers of the particulates in the cumulative mode obtained when the reference liquid is added thereto is obtained. When an obtained value matches a value obtained by a prescribed formula, the means 1 is judged to be normal.

70. 发明专利

JPS63144235A PARTICLE COUNTER 失效
公开(公告)号：JPS63144235A
公开(公告)日：1988-06-16
申请号：JP29131486
申请日：1986-12-05
申请人： HORIBA LTD , KURITA WATER IND LTD
发明人： AKIYAMA SHIGEYUKI , SUZUKI RIICHIRO
IPC分类号： G01N15/14
摘要： PURPOSE:To switch particle size measurement ranges of fine particles and to perform high-accuracy measurement by varying the flow velocity of sample fluid which passes through a detection cell. CONSTITUTION:A flow velocity switching means Z consists of a 1st capillary C1 with large flow resistance which is interposed on the downstream side of the detection C and a flowmeter Q in a main flow passage 1, a 2nd capillary C2 which is interposed in a branch flow passage 1B reaching a confluence part 3 from its upstream side and has flow resistance much smaller than that of the capillary C1, a 3rd capillary C3 which is interposed in a branch flow passage 2B reaching the confluence part 3 from the upstream side of a needle valve VN in a by-pass flow passage 2 and substantially equal in flow resistance to the capillary C2, and a three-way changeover valve V which opens and closes the flow passages 1B and 2B selectively. Then the valve V is switched between a state wherein sample fluid flows passing through the capillaries C1 and C2 at a constant flow rate obtained by subtracting the constant flow rate of the valve VN from the constant total flow rate determined by a constant flow rate valve VQ and a state wherein the fluid passes through the capillaries C1 and C3.

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