专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

61. 发明专利

JPH11132904A APPARATUS FOR EVALUATING MINUTE APERTURE 失效
公开(公告)号：JPH11132904A
公开(公告)日：1999-05-21
申请号：JP29870997
申请日：1997-10-30
申请人： FUJI PHOTO FILM CO LTD
发明人： NAYA MASAYUKI
IPC分类号： G01N37/00 , G01M11/00 , G01Q60/18 , G01Q60/22
摘要： PROBLEM TO BE SOLVED: To correctly simply evaluate a minute aperture which is an aperture of a smaller diameter than a light wavelength to pass light. SOLUTION: A light 11 for use in evaluation generated from a light source 12 is brought in from one end of a minute aperture probe 10 having a light- passing aperture of a smaller diameter than a wavelength of the light at the other end. At this time, the light (propagation light) 11 projected from the other end of the probe 10 is detected by a diffusion plate 16, and a light distribution pattern of the light 11 is visualized. The visualized light distribution pattern is picked up by an image pick-up means 17. An intensity distribution pattern of the picked up pattern is displayed at a display means 19.

62. 发明专利

JPH10281982A SURFACE PLASMON SENSOR 失效
公开(公告)号：JPH10281982A
公开(公告)日：1998-10-23
申请号：JP13653097
申请日：1997-05-27
申请人： FUJI PHOTO FILM CO LTD
发明人： NAYA MASAYUKI
IPC分类号： G01N21/27 , G01N21/41
摘要： PROBLEM TO BE SOLVED: To simplify the installation of a sensor when a metal film sensor and a coupler for coupling an optical beam are separately formed, and stabilize the positional relation between the sensor and the coupler. SOLUTION: In this sensor, a coupler means 10 has a sensor attachment 15 for supporting a sensor unit 1 having a metal film 3 formed thereon, and the sensor unit 1 is supported by the attachment 15 so that the positional relation of the sensor unit 1 to the coupler means 10 is regularly constant, and a refractive index matching oil 5 is filled between the sensor unit 1 and the coupler means 10.

63. 发明专利

JPH10239233A SURFACE PLASMON SENSOR 失效
公开(公告)号：JPH10239233A
公开(公告)日：1998-09-11
申请号：JP4195397
申请日：1997-02-26
申请人： FUJI PHOTO FILM CO LTD
发明人： NAYA MASAYUKI
IPC分类号： G01N21/27 , G01N21/41
摘要： PROBLEM TO BE SOLVED: To allow change in incident angle of the light beam on a sensor surface with ease. SOLUTION: Relating to the sensor, a hologram optical element comprising lens function and aberration correction function is used as an input part 13 and an output part 14 of a coupler means 10. A light source optical means 20 and a photo-detecting means 30 are placed on stages 26 and 35, respectively, allowing them to move in X direction on the stages 25 and 35, respectively. Here, an light beam L projected from the light source optical means 20 is incident on the input part 13 and converged on a specified point of an interface 4 between a sensor substrate 2 and a metal film 3, thus incident at a specified incidence angle. By interlocking the light source optical means 20 with the photo-detection means 30 to move them in approaching direction or receding direction, the incident angle of the light beam L at the specified point is changed.

64. 发明专利

JPH1078391A SURFACE PLASMON SENSOR 失效
公开(公告)号：JPH1078391A
公开(公告)日：1998-03-24
申请号：JP23386796
申请日：1996-09-04
申请人： FUJI PHOTO FILM CO LTD
发明人： NAYA MASAYUKI
IPC分类号： G01N21/27
摘要： PROBLEM TO BE SOLVED: To provide a surface plasmon sensor which can measure two-dimensional physical property information on a substance in a sample. SOLUTION: A metallic film 12 is formed on one surface of a transparent base board 10 having a uniform thickness, on the one hand, a light input means 15 and a light output means 16 such as two-dimensionally expanding grating are respectively formed on the other surface opposed to this one surface, and a light beam 13 incident on this light input means 15 is two-dimensionally scanned in the expanding direction of the light input means 15 by a light scanning means 17. The light beam 13 emitted outside the transparent base board 10 from the light output means 16 by being totally reflected by an interface 10a between the transparent base board 10 and a metallic film 12, is detected by a light detecting means 18.

65. 发明专利

JP2530749B2 失效
公开(公告)号：JP2530749B2
公开(公告)日：1996-09-04
申请号：JP23826190
申请日：1990-09-07
申请人： FUJI PHOTO FILM CO LTD
发明人： NAYA MASAYUKI
IPC分类号： G01J1/02 , G01J1/42 , G02B5/00 , G02B27/42

66. 发明专利

JPH05292260A 失效
公开(公告)号：JPH05292260A
公开(公告)日：1993-11-05
申请号：JP9255492
申请日：1992-04-13
申请人： FUJI PHOTO FILM CO LTD
发明人： NAYA MASAYUKI , MORITA HAJIME
IPC分类号： G02B26/12 , G02B26/10 , H02N2/00 , H04N1/04 , H04N1/113 , H04N1/12
摘要： PURPOSE:To provide a light beam scanning method and device capable of accurately scanning a body to be scanned in two-dimensional fashion by correcting speed fluctuation even when the fluctuation (unevenness) is generated in the subscanning speed of the body to be scanned and obtaining a satisfactory image free from stripe-shaped uneven color or uneven density. CONSTITUTION:The scanning position in the subscanning direction of a light beam on the body to be scanned can be adjusted by measuring the traveling speed of the body 32 to be scanned by a detector 35, detecting only the speed fluctuation component (phase difference component) of the traveling speed by a phase comparator, and displacing at least one among a light beam source, a shaping means, or a mirror by a displacing means 18 such as a piezo-electric element, etc., corresponding to a detected speed fluctuation component.

67. 发明专利

JPH04219051A LIGHT BEAM SCANNING DEVICE 失效
公开(公告)号：JPH04219051A
公开(公告)日：1992-08-10
申请号：JP8236491
申请日：1991-04-15
申请人： FUJI PHOTO FILM CO LTD
发明人： NAYA MASAYUKI , MORITA HAJIME
IPC分类号： G02B26/10 , G02B27/00 , G12B5/00 , H02N2/00 , H04N1/04 , H04N1/113 , H04N1/12
摘要： PURPOSE:To obtain a good image without having striped irregularity, etc., by detecting fluctuation of the moving speed of an object to be scanned and displacing the light source of a light beam in the back and forth direction of subscanning in accordance with this detected result. CONSTITUTION:In accordance with the fluctuation of the detected subscanning speed of the object (A), the light source of the light beam is displaced in the back and forth direction of subscanning by the displacing means 18 consisting of a piezoelectric element, etc., and the incident position of the light beam on a light beam shaping means 16 is shifted from an optical axis. Thus the image formation position of the light beam on the object (A) is moved in the back and forth direction of subscanning, and a position irradiated by the light beam on the object (A) is located to a prescribed position. Consequently, even when the moving speed of the object (A) is fluctuated, the position irradiated by the light beam on the object to be scanned (A) is always in a prescribed position.

68. 发明专利

JPH0299804A MEASUREMENT OF SHAPE OF RESIST PATTERN 失效
公开(公告)号：JPH0299804A
公开(公告)日：1990-04-11
申请号：JP25326188
申请日：1988-10-07
申请人： FUJI PHOTO FILM CO LTD
发明人： FURUKAWA KOJI , NAYA MASAYUKI
IPC分类号： G01B11/24 , G01N21/88 , G01N21/93 , G01N21/956 , G03F7/26 , H01L21/027 , H01L21/30 , H01L21/66
摘要： PURPOSE:To enable measurement of the shape of a resist pattern and the verticality thereof, in particular, in an efficient and quantitative manner by applying a coherent light onto the pattern formed at equal intervals and by measuring the intensity of a primary diffracted light obtained by diffraction by the pattern. CONSTITUTION:A part of a laser light 2 emitted by a light source 1 is transmitted through a half mirror 3 and falls on a sample (whereon stripe-shaped resist patterns are formed at equal intervals) 5 (of which an inclination angle is set to be theta1=1 to 20 degrees so as to collect only a primary diffracted light). The intensity of the light diffracted and reflected on the surface of the sample 5 is detected by a photodetector 12, and a voltmeter 14 measures the intensity of the primary diffracted light. Besides, a light 14 of the laser light 2, which is reflected by the mirror 3, is measured as an intensity reference light by a photodetector 17. The intensity of the diffracted light and that of the reference light thus obtained are subjected to A/D conversion 18 and sent to CPU 19 and are subjected therein to a standardizing processing (for correction of variation of the laser light itself). It is known therefrom that the lower intensity of the primary diffracted light shows the less flat parts of the slit-shaped resist patterns.

69. 发明专利

JPH0247062A MEASURING METHOD FOR EMULSIFICATION DEGREE 失效
公开(公告)号：JPH0247062A
公开(公告)日：1990-02-16
申请号：JP19814588
申请日：1988-08-09
申请人： FUJI PHOTO FILM CO LTD
发明人： MORITA HAJIME , NAYA MASAYUKI
IPC分类号： B41F31/00 , B41F31/02 , B41F33/04 , B41F33/14 , G01N21/47
摘要： PURPOSE:To measure the physical amount of printing ink in noncontact state by radiating ink on an ink roller with a laser light, and measuring the surface state of the ink from the intensity change of an optically diffracted image obtained by the scattered reflection of the light in the ink surface. CONSTITUTION:A condensing lens 3 condenses a laser light 2 from a laser light source 1 to focus it on an inked roller 5. Lights 4 reflected on the roller 5 interfere each other to form an interference pattern. The roller 5 is also rotated in a printing state, and the pattern is altered upon rotation. The change of the pattern is photometrically measured by a photodetector 8 as the variation in an optical intensity, its timing change is measured by a frequency counter 9, its data is input to a computer 10 to measure the state of the ink change on the roller 5 and to display it on a CRT 11.

70. 发明专利

JP2003207446A MEASURING METHOD AND APPARATUS 审中-公开
公开(公告)号：JP2003207446A
公开(公告)日：2003-07-25
申请号：JP2002328380
申请日：2002-11-12
申请人： FUJI PHOTO FILM CO LTD
发明人： KIMURA TOSHIHITO , SHIMIZU HITOSHI , SATO SHU , NAYA MASAYUKI , SAWANO MITSURU
IPC分类号： G01N21/03 , G01N21/13 , G01N21/27
摘要： PROBLEM TO BE SOLVED: To prevent a detection signal from being drifted in a measuring method and a measuring apparatus. SOLUTION: In a sensor that utilizes total reflection attenuation and comprises a measurement section made of an incidence optical system 15 or the like for applying light beams 13 that are generated from a laser light source 14 at various incident angles to an interface 10b between a dielectric block 10 and a metal film 12, a light detection means 17 for detecting the light beams 13 that are totally reflected from the interface 10b, and the like, a shutter 50 for intermittently opening or closing a light path is provided between the laser light source 14 and the dielectric block 10, thus preventing a temperature in the dielectric block 10 from increasing an preventing drift. COPYRIGHT: (C)2003,JPO

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式