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    • 62. 发明专利
    • Substrate with transparent conductive film and manufacturing method thereof
    • 具有透明导电膜的基板及其制造方法
    • JP2007163995A
    • 2007-06-28
    • JP2005362476
    • 2005-12-15
    • Geomatec Co Ltdジオマテック株式会社
    • IWAOKA KEIMEIHIRASHIMA YOSHINORIYOSHIOKA KAZUHISAKAMIYAMA RYUICHISUGAWARA HIROYUKI
    • G02F1/1343
    • PROBLEM TO BE SOLVED: To provide a substrate with a transparent conductive film which is stable to prevent characteristics from being deteriorated due to chemical and physical actions in a display element production process or the like, and a manufacturing method thereof, with respect to the substrate on which the transparent conductive film using a zinc oxide (GZO) containing gallium or a zinc oxide (AZO) containing aluminum is formed.
      SOLUTION: A substrate 1 with a transparent conductive film has a transparent conductive film 20 formed on a surface of a substrate 10, and the transparent conductive film 20 includes a first transparent conductive film 21 formed on the surface of the substrate 10 directly or indirectly with another functional layer 23 between and a second transparent conductive film 22 formed on a surface of the first transparent conductive film 21, and the first transparent conductive film 21 is made of the zinc oxide AZO containing aluminum, the zinc oxide GZO containing gallium and the second transparent conductive film 22 is made of an indium oxide ITO containing tin.
      COPYRIGHT: (C)2007,JPO&INPIT
    • 要解决的问题:为了提供基板,其具有稳定的透明导电膜,以防止由于显示元件制造工艺等中的化学和物理作用而导致的特性劣化及其制造方法,相对于 使用含有含有镓的氧化锌(GZO)或含有铝的氧化锌(AZO)的透明导电膜的基板。 解决方案:具有透明导电膜的基板1具有形成在基板10的表面上的透明导电膜20,透明导电膜20包括直接形成在基板10的表面上的第一透明导电膜21 或间接地与在第一透明导电膜21的表面上形成的第二透明导电膜22之间的另一功能层23和第一透明导电膜21由含有铝的氧化锌AZO构成,氧化锌GZO含有镓 第二透明导电膜22由含有锡的氧化铟ITO构成。 版权所有(C)2007,JPO&INPIT