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    • 53. 发明专利
    • PHOTOELECTRIC CONVERSION ELEMENT AND ITS MANUFACTURE
    • JPH07211931A
    • 1995-08-11
    • JP29140794
    • 1994-11-25
    • CANON KK
    • NISHIDA AKIYUKI
    • H01L31/04H01L21/20H01L31/0392H01L31/072H01L31/0745H01L31/0747H01L31/18
    • PURPOSE:To form a polycrystalline silicon layer composed of silicon crystals having a large grain size by depositing polycrystalline silicon on a metal oxide formed on a metal-grade silicon substrate. CONSTITUTION:A ZnO film having a thickness of 2m is formed as a metal oxide layer 102 on the surface of a metallic Si substrate 101 having a thickness of 0.5mm by the sputtering method and an n-type Si layer 103 is deposited on the layer 102 by 20mum in thickness by using a vacuum evaporation device. The maximum temperature and duration which are important to the crystallinity of a polycrystalline Si layer when an Si layer is recrystallized are respectively 1,410-1,450 deg.C and 5-120 seconds, and the temperature-lowering rate which is important to the crystallinity when molten Si is solidified is 0.1-5 deg.C/sec. Based on the above, the Si layer 103 is melted and recrystallized by irradiating the layer 103 with light from a halogen lamp after depositing an NSG film as a cap layer 104 having a thickness of 2mum on the surface of the layer 103 formed on the metallic Si substrate 101. When the Si layer 103 deposited on the metal-grade Si substrate and metal oxide is melted and recrystallized by heating the layer with the halogen lamp, an Si layer having a large grain size can be formed.
    • 54. 发明专利
    • SOLAR CELL AND MANUFACTURE OF SOLAR CELL
    • JPH04184979A
    • 1992-07-01
    • JP31508490
    • 1990-11-20
    • CANON KK
    • NISHIDA AKIYUKI
    • H01L21/205C30B25/18H01L31/0368H01L31/04H01L31/062H01L31/072H01L31/0745H01L31/075H01L31/077H01L31/18
    • PURPOSE:To increase the efficiency of a solar cell, to increase the mass production of the solar cell and to manufacture the solar cell into a low-cost and good-quality solar cell by a method wherein the crystal orientations of crystal grains, which are the constituent element of a polycrystalline silicon thin film, are made even to the direction of the film thickness of the thin film and at the same time, single crystal substance are implanted on a metal substrate and are selectively crystal-grown. CONSTITUTION:An insulating layer 202 is formed on the surface of a silicon wafer 201, such square opening parts 204 as one side of the opening parts is (a) are provided at intervals of b=50mum by etching and single crystal substances 203 are arranged regularly on lattice points by performing a selective crystal growth. In this case, the orientations of the substances 203 are all made even and have a correct share of a crystal orientation from the wafer 201 Then, the layer 202 is removed and the substances 203 are implanted on a metal substrate to form as a seed crystal. Contrary to this, a selective epitaxial growth is performed to form a polycrystalline silicon thin film. Thereby, the efficiency of a solar cell can be increased and at the same time, the mass productivity of the solar cell is improved and the solar cell can be manufactured into a low-cost and good-quality solar cell.