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    • 55. 发明专利
    • HEAT RESISTANT SILICEOUS FOAMED BODY AND ITS PRODUCTION
    • JPH07144934A
    • 1995-06-06
    • JP29060293
    • 1993-11-19
    • SHINETSU QUARTZ PROD
    • NAKAMURA TATSUMASAFUJINOKI AKIRAYOKOTA TORU
    • C03B19/08C03C11/00C03C14/00
    • PURPOSE:To improve mechanical strength or the like necessary as a heat insulat ing material for a furnace for heat treating large-sized semiconductor wafers by chemically bonding nitrogen atom to a mixture of silica with a ceramic to obtain a high heat resistant siliceous foamed body. CONSTITUTION:A ceramic fine powder of one or more kinds selected from Al2O3, ZrO2, TiO2, B2O3 and SiC is added by 5-100 pts.wt. in a slurry obtained by suspending 100 pts.wt. silica fine particle made by the flame hydrolysis of silicon tetrachloride and having 2-20mum particle diameter in pure water and is aggitation to obtain a bard block silica coke. The caske is dried and pulverized and the obtained power is dipped in a concentrated hydrochloric acid at room temp., washed and dried. The siliceous foaming body containing 0.02-0.5wt.% nitrogen atom is obtained by feeding the powdery mixture to a furnace, heating at 700-1200 deg.C, in an ammoniacal atmosphere containing 1-100vol.% of an inert gas such as gaseous N2, allowing to react for 0.5-8 hours and chemically bonding ammonia to the siliceous component. Next, the siliceous foamed body is fed to a prescribed mold and heated at 1400-1800 deg.C to fuse and foam the powder.