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    • 54. 发明专利
    • Aligning part, aligning apparatus, and aligning method
    • 对齐部件,对准装置和对准方法
    • JP2005317694A
    • 2005-11-10
    • JP2004132557
    • 2004-04-28
    • Rikogaku Shinkokai財団法人理工学振興会
    • SATO KAIJI
    • H05K13/04
    • H01L2224/04026H01L2224/05552H01L2224/83143H01L2224/95145H01L2224/95146H01L2924/00012
    • PROBLEM TO BE SOLVED: To improve the success rate of the simultaneous self-aligning of a single part or of a plurality of parts in the presence of a large initial displacement. SOLUTION: The part 1 has an adsorbing region 11 located near the middle of its bottom and high in wettability to a droplet, a blocking region 12 located near the periphery of its bottom and low in wettability to a droplet, and a guiding region 13 extending from the adsorbing region 11 to the sides of the part 1 and high in wettability to a droplet 3. Upon contact of a droplet 3 arranged on the surface of a substrate 2 with the guiding region 13 on a side of the part 1, the droplet 3 is guided to the adsorbing region 11 for the part 1 to be aligned with the droplet 3. The aligning apparatus and the aligning method uses the aligning part 1. COPYRIGHT: (C)2006,JPO&NCIPI
    • 要解决的问题:为了提高在大的初始位移的存在下单个部件或多个部件的同时自对准的成功率。 解决方案:部件1具有位于其底部中部附近并且对液滴具有高润湿性的吸附区域11,位于其底部周围附近的阻挡区域12和对液滴的润湿性低,并且引导 区域13从吸附区域11延伸到部分1的侧面并且对液滴3具有高的润湿性。当将布置在基板2的表面上的液滴3与部分1的一侧上的引导区域13接触时 ,液滴3被引导到吸附区域11以使部件1与液滴3对准。对准装置和对准方法使用对准部分1.版权所有(C)2006,JPO&NCIPI