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    • 51. 发明专利
    • Color solid-state imaging device and its manufacturing method
    • 彩色固态成像装置及其制造方法
    • JP2005123225A
    • 2005-05-12
    • JP2003353298
    • 2003-10-14
    • Toppan Printing Co Ltd凸版印刷株式会社
    • KITAMURA TOMOHITOFUKUYOSHI KENZOOGATA KEISUKE
    • H01L27/14H04N5/335H04N5/359H04N5/361H04N5/367H04N5/369H04N5/372H04N5/374H04N9/07H04N101/00
    • PROBLEM TO BE SOLVED: To provide a color solid-state imaging device which is equipped with color filters that have a few agglomerate growing black marks and are excellent in shape even when pixels are each 5 μm or below in size, affords to allow a sufficient exposure margin, is equipped with color pixels which are hardly separated off, and high in productivity; and to provide a method of manufacturing the same.
      SOLUTION: The color solid-state imaging device has a flattening layer 3 flattening the rugged surfaces of a plurality of light receiving elements 2 on the surface of a semiconductor substrate 1 equipped with the light receiving elements 2, a color filter layer composed of color pixels 5 to 7 which are of two or more different colors and each paired up with the light receiving element, and micro-lenses 9 which condense light on the light receiving elements and are each paired up with the light receiving element formed on the flattening layer 3. The flattening layer 3 has recesses which are each paired up with the light receiving element so as to correspond with each other, and the color filter layer is provided so as to fill up the recesses.
      COPYRIGHT: (C)2005,JPO&NCIPI
    • 要解决的问题:为了提供一种彩色固态成像装置,其配备有具有少量附聚物生长黑色标记的彩色滤光片,并且即使像素大小为5μm或更小,也具有优异的形状, 允许足够的曝光余量,配有几乎不分离的彩色像素,生产率高; 并提供其制造方法。 颜色固态成像装置具有将装有光接收元件2的半导体衬底1的表面上的多个光接收元件2的凹凸表面平坦的平坦化层3,构成 具有两个或多个不同颜色并且与光接收元件配对的彩色像素5至7以及将光接收在光接收元件上并且与形成在光接收元件上的光接收元件成对的微透镜9 平坦化层3.平坦化层3具有与光接收元件相互对应的凹槽,并且滤色器层设置成填充凹部。 版权所有(C)2005,JPO&NCIPI
    • 52. 发明专利
    • Solid-state imaging element
    • 固态成像元件
    • JP2005005419A
    • 2005-01-06
    • JP2003166137
    • 2003-06-11
    • Toppan Printing Co Ltd凸版印刷株式会社
    • KITAMURA TOMOHITOFUKUYOSHI KENZOOGATA KEISUKE
    • G02B5/20H01L27/14H04N5/335H04N5/357H04N5/369
    • PROBLEM TO BE SOLVED: To provide a solid-state imaging element wherein noise, sensitivity unevenness and sensitivity deterioration which are to be caused by buzzing of shape of coloring pixels and film thickness are hardly generated even in pixel size whose one edge is 4 μm or less. SOLUTION: Film thickness of coloring pixels which are arranged to first color array is in a range of 0.6-1.2 μm. To the film thickness of the coloring pixels which are arranged to the first color array, film thickness of central parts of coloring pixels after second color array which are arranged horizontally and vertically adjacent to each other is thicker than the film thickness of the coloring pixels which are arranged to the first color array within a range of 0.1-0.3 μm. The coloring pixels are composed of three primary colors of red, blue and green, and the first color array is green. COPYRIGHT: (C)2005,JPO&NCIPI
    • 要解决的问题:为了提供一种固态成像元件,其中即使在像素尺寸的一个边缘是像素尺寸的情况下也难以产生由着色像素的形状和膜厚度的嗡嗡声引起的噪声,灵敏度不均匀性和灵敏度劣化 4μm以下。 解决方案:布置成第一颜色阵列的着色像素的膜厚度在0.6-1.2μm的范围内。 对于布置在第一颜色阵列上的着色像素的膜厚度,彼此水平和垂直相邻布置的第二颜色阵列之后的着色像素的中心部分的膜厚度比着色像素的膜厚度厚 被布置在0.1-0.3μm的范围内的第一颜色阵列。 着色像素由红色,蓝色和绿色的三原色组成,第一种颜色阵列为绿色。 版权所有(C)2005,JPO&NCIPI
    • 53. 发明专利
    • Solid-state imaging element
    • 固态成像元件
    • JP2004342793A
    • 2004-12-02
    • JP2003136939
    • 2003-05-15
    • Toppan Printing Co Ltd凸版印刷株式会社
    • OGATA KEISUKEFUKUYOSHI KENZOKITAMURA TOMOHITO
    • H01L27/14H04N5/335H04N5/357H04N5/369
    • PROBLEM TO BE SOLVED: To provide a solid-state imaging element wherein color mixture by migration does not occur in a first flattened layer even if collar resist which contains dye inside is used for formation of a color filter, and spectral characteristic is superior.
      SOLUTION: In the solid-state imaging element, the first planarize layer 2 served as migration prevention of dye. In the first planarize layer 2, organic resin is main component, and saturation content addition of migration inhibitor which does not have absorption in visible region is performed. The migration inhibitor is dye or ultraviolet absorber or infrared absorption agent or photopolymerizable monomer or photopolymerization initiator. The dye is decolorized by thermal treatment.
      COPYRIGHT: (C)2005,JPO&NCIPI
    • 要解决的问题:为了提供一种固态成像元件,其中即使使用含有染料的轴环抗蚀剂用于形成滤色器,也不会在第一平坦层中发生通过迁移的混色,并且光谱特性为 优越。 解决方案:在固态成像元件中,第一平面化层2用作染料的迁移防止。 在第一平坦化层2中,有机树脂是主要成分,并且进行在可见光区域不具有吸收的迁移抑制剂的饱和含量添加。 迁移抑制剂是染料或紫外线吸收剂或红外吸收剂或光聚合单体或光聚合引发剂。 染料通过热处理脱色。 版权所有(C)2005,JPO&NCIPI