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    • 56. 发明专利
    • FORMATION OF THIN FILM
    • JPH01268864A
    • 1989-10-26
    • JP9558088
    • 1988-04-20
    • HITACHI LTDHITACHI MAXELL
    • ANDO KEIKICHITERAO MOTOYASUNISHIDA TETSUYAMIYAUCHI YASUSHITAMURA REIJI
    • B41M5/26C23C14/34G11B7/26
    • PURPOSE:To form a thin film by single target, by changing target temp. at the time of forming a thin film containing plural elements dissimilar in the dependence of sputtering efficiency on target temp. by a sputtering method. CONSTITUTION:For example., target 5 and a transparent substrate 1 are disposed respectively on a lower electrode 6 and an upper electrode 4 in a vacuum chamber 8 of a high frequency double-pole glow discharge-type sputtering device, and then, the pressure inside the chamber 8 is reduced to the prescribed value and an Ar gas 9 is introduced to keep the inside of the chamber 8 at the prescribed pressure. High frequency electric power 7 is impressed in the above state to produce plasma between the substrate 1 and the target 5. At this time, a target 5 containing Se and an element having a sputtering efficiency at high temp. lower than that of Se is used as the above target 5. Subsequently, a recording film 2 is formed by carrying out sputtering while regulating the high frequency electric power to about 50W, and then a protective film 3 is formed similarly while increasing the high frequency electric power to about 150W. Moreover, it is also possible to continuously change the composition of the part between the films 2, 3.
    • 57. 发明专利
    • RECORDING MEMBER
    • JPH01208744A
    • 1989-08-22
    • JP3274888
    • 1988-02-17
    • HITACHI LTDHITACHI MAXELL
    • ANDO KEIKICHITERAO MOTOYASUNISHIDA TETSUYAMIYAUCHI YASUSHITAMURA AYAHITO
    • G11B7/241G11B7/24
    • PURPOSE:To prevent deterioration in properties of a resin or deformation thereof by radiation of a recording beam by providing a thin film essentially consisting of specific metal elements having a small thermal conductivity on a thin film for recording. CONSTITUTION:A protective layer 4 is laminated on the thin film 3 for information recording which is formed via a lower protective layer 2 on a substrate 1 having guide grooves and generates a change of atomic configuration with substantially no deformation when subjected to irradiation of the beam for recording. The layer essentially consisting of at least one selected from a group consisting of Al, Ti, V, Cr, Fe, Ni, Bi, etc., is laminated as a thin film 5 and thereafter, the thin film 5 side of the substrate 1 and a protective plate 7 are stuck to each other by using a resin 6 which is cured by radiation of UV rays. The thin film 5 consists essentially of the metal elements having the small thermal conductivity and diffuses the heat generated by the radiation of the beam for recording. The deterioration in the properties of the resin 6 or the deformation thereof generated by the radiation of the beam for recording thereto is thereby prevented.