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    • 50. 发明专利
    • Copolymer, method for manufacturing the same, and radiation-sensitive resin composition
    • 共聚物,其制备方法和辐射敏感性树脂组合物
    • JP2003335826A
    • 2003-11-28
    • JP2002144897
    • 2002-05-20
    • Jsr CorpJsr株式会社
    • NISHIMURA YUKIONISHIMURA ISAO
    • G03F7/039C08F4/32C08F232/00C08F234/02
    • PROBLEM TO BE SOLVED: To provide a radiation-sensitive resin composition, particularly a copolymer useful as a resin component of the same, high in transparency to radiation; excellent in basic characteristics of a resist such as sensitivity, resolution, and pattern configuration; concurrently high in dry etching resistance and adhesion to the substrate; and excellent in developability and conservation stability. SOLUTION: The copolymer has a repeating unit derived from a monomer represented by 1-ethylcyclopentyl ester or by 2-ethyladamantan-2-yl ester, etc., of a carboxy group-containing norbornene compound; and another repeating unit derived from a lactone monomer represented by 2(5H)-furanone or by its derivative, etc. In the copolymer, the content of the former repeating unit accounts for more than 30 mol% of the repeating units in total. The radiation- sensitive resin composition contains the copolymer and a radiation-sensitive acid generator. COPYRIGHT: (C)2004,JPO
    • 要解决的问题:提供一种辐射敏感性树脂组合物,特别是可用作其树脂组分的共聚物,对辐射透明度高; 抗蚀剂的基本特性如灵敏度,分辨率和图案配置优异; 同时具有高耐干蚀刻性和对基材的粘合性; 并具有优异的可开发性和保存稳定性。 解决方案:共聚物具有衍生自含1-羧基的降冰片烯化合物的1-乙基环戊基酯或2-乙基金刚烷-2-基酯等的单体的重复单元; 和由2(5H) - 呋喃酮或其衍生物等表示的内酯单体衍生的另一重复单元。在共聚物中,前者重复单元的含量总共占重复单元的30摩尔%以上。 辐射敏感树脂组合物含有共聚物和辐射敏感性酸产生剂。 版权所有(C)2004,JPO