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41. 发明专利

JP3913773B2 Abrasive jet stream cutting method of the workpiece 失效
公开(公告)号：JP3913773B2
公开(公告)日：2007-05-09
申请号：JP50779495
申请日：1994-08-29
申请人：イクストゥルードゥホーンコーポレーション
发明人：ローデス，ローレンス，ジェイ．
IPC分类号： B24C1/00 , B24C1/04 , B24C5/04 , B24C9/00 , B24C11/00 , B24D3/00 , B26D5/04
CPC分类号： B24C11/005 , B24C1/045 , B24C11/00

42. 发明专利

JP2005262406A Polishing apparatus, and method for manufacturing semiconductor device 审中-公开
标题翻译：抛光装置和制造半导体器件的方法
公开(公告)号：JP2005262406A
公开(公告)日：2005-09-29
申请号：JP2004080812
申请日：2004-03-19
申请人： Toshiba Corp , 株式会社東芝
发明人： MINAMI FUKUGAKU , YANO HIROYUKI
IPC分类号： B24B57/02 , B24B37/00 , B24C3/32 , B44C1/22 , H01L21/00 , H01L21/304
CPC分类号： B24C3/322 , B24C11/005 , H01L21/6708
摘要： PROBLEM TO BE SOLVED: To provide a polishing apparatus which can polish a film to be processed, which film exists on any surfaces of a semiconductor substrate. SOLUTION: The polishing apparatus comprises turning mechanisms (11a, 11b, 11c) for turning the semiconductor substrate (10) having films to be processed, which films are accumulated thereon, and a supply unit (12) for supplying a polishing fluid on the surface to be polished of the film to be processed. The supply unit has a polishing powder jetting nozzle (13), an additive supply port (14), and a water supply port (15). The polishing fluid is supplied toward at least one of the front surface, the side surface, and the back surface of the semiconductor substrate. COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：为了提供一种抛光装置，该抛光装置可以在半导体衬底的任何表面上存在薄膜，该膜可以被抛光。解决方案：抛光装置包括用于转动具有聚集在其上的膜的待处理膜的半导体衬底（10）的转动机构（11a，11b，11c）和用于供应抛光流体的供应单元（12）在要被加工的薄膜被抛光的表面上。供给单元具有抛光粉末喷射喷嘴（13），添加剂供给口（14）和供水口（15）。向半导体衬底的前表面，侧表面和后表面中的至少一个提供抛光流体。版权所有（C）2005，JPO＆NCIPI

43. 发明专利

JP2005084537A Photosensitive resin composition for sandblasting and its use 审中-公开
标题翻译：感光树脂组合物及其用途
公开(公告)号：JP2005084537A
公开(公告)日：2005-03-31
申请号：JP2003318775
申请日：2003-09-10
申请人： Asahi Kasei Electronics Co Ltd , 旭化成エレクトロニクス株式会社
发明人： ADACHI TERUHIKO , TOMITA HIROO
IPC分类号： G03F7/029 , B24C1/04 , C08F2/50 , C08F290/06 , G03F7/004 , G03F7/027
CPC分类号： B24C11/005
摘要： PROBLEM TO BE SOLVED: To provide a photosensitive resin composition for sandblasting having excellent alkaline developing property and resolution, excellent adhesion property with a substrate, excellent resistance against sandblasting, sharpness of an image and easy microprocessing property. SOLUTION: The photosensitive resin composition for sandblasting contains an alkali-soluble polymer compound by ≥20 mass% and ≤80 mass%, an ethylenically unsaturated addition polymerizable monomer by ≥5 mass% and ≤50 mass%, a bisacylphosphine oxide compound as a photopolymerization initiator by ≥0.1 mass% and ≤10 mass%, a urethane prepolymer of ≥10 mass% and ≤70 mass% obtained from a polymer having a hydroxyl group at the molecular end, polyisocyanate and a compound having both of a functional group having active hydrogen and an ethylenically unsaturated bond. COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：提供一种具有优异的碱性显影性和分辨率，与基材的优异粘附性，优异的耐喷砂性，图像清晰度和容易的微处理性能的喷砂用感光性树脂组合物。解决方案：喷砂用感光性树脂组合物含有≥20质量％且≤80质量％的碱溶性高分子化合物，≥5质量％且≤50质量％的烯属不饱和可加成单体，双酰基氧化膦化合物作为光聚合引发剂，≥0.1质量％和≤10质量％，由分子末端具有羟基的聚合物获得的≥10质量％和≤70质量％的氨基甲酸酯预聚物，多异氰酸酯和具有功能性基团具有活性氢和烯属不饱和键。版权所有（C）2005，JPO＆NCIPI

44. 发明专利

JP2005039279A Method of surface texturizing 有权
标题翻译：表面纹理方法
公开(公告)号：JP2005039279A
公开(公告)日：2005-02-10
申请号：JP2004210030
申请日：2004-07-16
申请人： Applied Materials Inc , アプライドマテリアルズインコーポレイテッド
发明人： POPIOLKOWSKI ALAN R , HART SHANNON M , SCHWEITZER MARC O , LIU ALAN B , WATIA JENNIFER L , WEST BRIAN , MENZIE MARK
IPC分类号： B24C11/00 , B23K15/00 , C23F1/00 , C23F4/00 , H01L21/00 , H01L21/02 , H01L21/205 , H01L21/3065
CPC分类号： B24C11/005
摘要： PROBLEM TO BE SOLVED: To provide a method and a system for providing a texture to a surface of a workpiece, such as a chamber component. SOLUTION: The method comprises a step of providing the workpiece to a texturizing chamber, and a step of scanning a beam of electromagnetic energy across the surface of the workpiece, to form a plurality of features thereon. The features formed are generally depressions, protuberances, and combinations thereof. Also provided is a method of reducing contamination inside a process chamber. The method comprises a step of scanning a beam of electromagnetic energy across the surface of one or more process chamber components to make a plurality of features formed thereon, a step of positioning the one or more chamber components into a process chamber, and a step of initiating a process sequence within the process chamber. COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：提供一种用于向诸如腔室部件的工件的表面提供纹理的方法和系统。解决方案：该方法包括将工件提供到纹理化室的步骤，以及跨过工件的表面扫描电磁能束以在其上形成多个特征的步骤。形成的特征通常是凹陷，突起和它们的组合。还提供了减少处理室内的污染的方法。该方法包括在一个或多个处理室部件的表面上扫描电磁能束以使其上形成多个特征的步骤，将一个或多个室部件定位到处理室中的步骤，以及步骤启动处理室内的处理顺序。版权所有（C）2005，JPO＆NCIPI

45. 发明专利

JP2003311626A Projecting material and blast treating method 审中-公开
标题翻译：投影材料和BLAST处理方法
公开(公告)号：JP2003311626A
公开(公告)日：2003-11-05
申请号：JP2002126560
申请日：2002-04-26
申请人： Bridgestone Corp , 株式会社ブリヂストン
发明人： MURATA HIROSHI
IPC分类号： B24C11/00
CPC分类号： B24C11/005
摘要： PROBLEM TO BE SOLVED: To provide an inexpensive projecting material capable of efficiently peeling and removing deposit such as paint without damaging base metal for blast treatment.
SOLUTION: The projecting material is made of composite material containing resin material and inorganic material of which content is 70 to 95 wt.%. When the inorganic material is magnetic powder, waste material of synthetic resin magnet products can be used effectively.
COPYRIGHT: (C)2004,JPO
摘要翻译：要解决的问题：提供一种能够有效地剥离和去除诸如涂料的沉积物的廉价的突出材料，而不会损坏用于喷砂处理的贱金属。解决方案：突出材料由含有70〜95重量％的树脂材料和无机材料的复合材料制成。当无机材料为磁粉时，可以有效利用合成树脂磁铁制品的废料。版权所有（C）2004，JPO

46. 发明专利

JP2003082380A Nonflammable aqueous cutting fluid composition and nonflammable aqueous cutting fluid 审中-公开
标题翻译：不可喷射的水性切削液组合物和非易燃水性切削液
公开(公告)号：JP2003082380A
公开(公告)日：2003-03-19
申请号：JP2001271539
申请日：2001-09-07
申请人： Dai Ichi Kogyo Seiyaku Co Ltd , 第一工業製薬株式会社
发明人： NABESHIMA TOSHIICHI , SUGIYAMA YOSHIORI , NIIKE HITOSHI
IPC分类号： C10M173/02 , C10M107/28 , C10M125/02 , C10M125/10 , C10M125/26 , C10M125/28 , C10M129/26 , C10M129/34 , C10M129/42 , C10M145/14 , C10M145/16 , C10M145/26 , C10N10/02 , C10N10/06 , C10N10/08 , C10N20/04 , C10N20/06 , C10N30/00 , C10N30/04 , C10N30/12 , C10N30/18 , C10N40/22
CPC分类号： B24C11/005
摘要： PROBLEM TO BE SOLVED: To provide a nonflammable aqueous cutting fluid composition which has good dispersibility of abrasive grains and no problem of flammability even when used in the cutting processing of hard brittle materials, exhibits rust preventive properties when used in the facilities of the oil system, and is easy to wash with water. SOLUTION: The nonflammable aqueous cutting fluid composition comprises a polycarboxylic acid based polymeric compound and/or its salt, and a carboxylic acid and/or its salt. The polycarboxylic acid based polymeric compound and/or its salt has a weight average molecular weight of 1,000-200,000 is incorporated in an amount of 5-45 wt.%. The carboxylic acid and/or its salt, and is incorporated in an amount of 0.05-5 wt.%. At least one kind of addition auxiliaries to be selected from the group consisting of a water-soluble solvent, a lubricant, a viscosity modifier, a rust preventive for non-ferrous metals, and an anti-foaming agent may further be incorporated into this composition.
摘要翻译：要解决的问题：为了提供即使在硬脆性材料的切削加工中使用也具有良好的磨粒分散性且不易燃的问题的不可燃性水性切削液组合物，在油系统的设备中使用时具有防锈性，并且易于用水洗涤。解决方案：不燃性水性切削液组合物包含基于多元羧酸的聚合物和/或其盐，以及羧酸和/或其盐。多元羧酸基聚合物和/或其盐的重均分子量为1,000-200,000，以5-45重量％的量掺入。羧酸和/或其盐，并且以0.05-5重量％的量掺入。还可以在该组合物中加入至少一种选自水溶性溶剂，润滑剂，粘度调节剂，有色金属防锈剂和消泡剂的添加助剂，。

47. 发明专利

JPS5937052A Process of removing burr 失效
标题翻译：删除流程的过程
公开(公告)号：JPS5937052A
公开(公告)日：1984-02-29
申请号：JP14331382
申请日：1982-08-20
申请人： Toshiba Corp
发明人： NAKADA JIYUNJI
IPC分类号： B24B49/16 , B24C1/00 , B24C1/08
CPC分类号： B24C1/083 , B24C11/005
摘要： PURPOSE: To improve performance of burr removing and facilitate cleaning by a method wherein suspension liquid containing synthetic resin, water and boundary surface active agent is injected against a product to be worked in the process of removing resin burr from a semiconductor device.
CONSTITUTION: A synthetic resin abrasive 5 composed of non-saturated polyester resin etc. has sharp edges, is mixed in water 6 with its 5 to 30wt%, non-ion boundary surface active agent of 0.001 to 1wt% is added, resulting in making suspension liquid 7 with decreased surface tension and then the liquid is injected toward a semi-conductor device 15 from a gun 11 along with the compressed air 12. Under this injection, the resin burr 17 formed on the lead frame 16 shows a crack 18 due to a striking action of the abrasive material 5, the water with less surface tension penetrates into the crack, peeling-off of the resin is promoted along with a vibration due to impact and the performance of burr removing is improved. The boundary surface active agent may prevent charging of static electricity and adhesion of the removed burr and then facilitate the cleaning at the later process.
COPYRIGHT: (C)1984,JPO&Japio
摘要翻译：目的：通过在从半导体器件除去树脂毛刺的工序中将含有合成树脂，水和边界表面活性剂的悬浮液注入待加工的产品的方法来提高毛刺去除的性能并促进清洗。构成：由非饱和聚酯树脂等构成的合成树脂研磨剂5具有锋利的边缘，在水6中混合其5〜30重量％，非离子界面活性剂为0.001〜1重量％，从而制成具有降低的表面张力的悬浮液7，然后将液体与压缩空气12一起从枪11向半导体装置15注入。在该注入下，形成在引线框16上的树脂毛刺17显示出裂纹18 对于研磨材料5的冲击作用，具有较小表面张力的水渗透到裂纹中，树脂的剥离以及由于冲击引起的振动而提高，并且提高了除毛的性能。边界表面活性剂可以防止静电的充电和去除的毛刺的粘附，并且在稍后的过程中促进清洁。

49. 发明专利

JP2014065128A Abrasive waterjet working apparatus and working method 审中-公开
标题翻译：磨砂水处理装置和工作方法
公开(公告)号：JP2014065128A
公开(公告)日：2014-04-17
申请号：JP2012213225
申请日：2012-09-26
申请人： Sugino Machine Ltd , 株式会社スギノマシン
发明人： OGAWA MASARU , TERA NOBUYUKI , TSUNEMOTO SHINJI
IPC分类号： B24C11/00 , B24C5/02 , B24C7/00 , B24C9/00
CPC分类号： B24C11/005 , B24C3/04 , B24C11/00
摘要： PROBLEM TO BE SOLVED: To provide an abrasive waterjet working apparatus which has improved working accuracy and working efficiency by attaining excellent fluidity of an abrasive inside a nozzle.SOLUTION: An abrasive waterjet working apparatus 100 works a workpiece W by spraying the workpiece W with an abrasive waterjet AWJ composed by mixing a high-pressure working liquid Q with an abrasive G. The working apparatus includes: an abrasive waterjet nozzle 1 for spraying the abrasive waterjet AWJ; a high-pressure water supply device 101 for supplying the nozzle with the working liquid Q; and an abrasive supply device 8 for supplying the abrasive G to the working liquid Q. The abrasive G is composed of a coated abrasive G3 obtained by coating a surface of an abrasive material G1 made of abrasive grain with a water repellent material or a fluidity enhancing material G2. The abrasive supply device 8 supplies the abrasive waterjet nozzle 1 with the coated abrasive G3.
摘要翻译：要解决的问题：提供一种通过在喷嘴内获得磨料的优异流动性而提高加工精度和工作效率的磨料水射流加工装置。解决方案：磨料水射流加工装置100通过用工件W喷涂工件W来工作W 通过将高压工作液体Q与研磨剂G混合而组成的磨料喷水AWJ。工作装置包括：用于喷射磨料水刀AWJ的磨料水射流喷嘴1; 用于向喷嘴供给工作液Q的高压供水装置101; 以及用于将研磨剂G供给到工作液体Q的研磨剂供给装置8.研磨剂G由涂布的研磨剂G3构成，所述研磨剂G3通过用防水材料涂布由磨料颗粒制成的研磨材料G1的表面或流动性增强而得到材料G2。磨料供给装置8向磨料喷水喷嘴1供给涂覆的磨料G3。

50. 发明专利

JP2012522654A How to create a rust suppression sheet metal by the scale removal of a slurry injection scale removal cell 有权
公开(公告)号：JP2012522654A
公开(公告)日：2012-09-27
申请号：JP2012503465
申请日：2010-03-09
申请人：ザマテリアルワークス,リミテッド
发明人：ヴォゲス，ケヴィン，シー． , ムエス，アラン，アール．
IPC分类号： B24C3/32 , B24C1/04 , B24C5/06 , B24C7/00 , B24C11/00
CPC分类号： B24C1/086 , B24C3/14 , B24C11/005
摘要：薄板金から酸化鉄スケールを取り除き、錆抑制特性によって薄板金表面を作成する方法が提供される。薄板金はスケールを取り除くセルを通過され、スラリー混合物は、材料がスケールを取り除くセルを通過すると、薄板金幅全体で薄板金の上面および底面のうちの少なくとも１つに対して動かされる。薄板金の上面および底面のうちの少なくとも１つに対するスラリーの衝撃の割合は、薄板金の表面から本質的にすべてのスケールを取り除く方法、および、薄板金のスケールが取り除かれた表面上で保護層を生成する方法で制御される。保護層は、シリコン、アルミニウム、マンガンおよびクロミウムの少なくとも１つを含み、被処理薄板金のスケールを取り除かれた表面の酸化を妨げる。
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