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41. 发明专利

JP2009138237A Electrolytic cell 审中-公开
标题翻译：电解槽
公开(公告)号：JP2009138237A
公开(公告)日：2009-06-25
申请号：JP2007316796
申请日：2007-12-07
申请人： Kurita Water Ind Ltd , 栗田工業株式会社
发明人： UCHIDA MINORU , KANAMORI SHUNICHI , NAGAI TATSUO
IPC分类号： C25B1/22 , C25B9/08
摘要： PROBLEM TO BE SOLVED: To improve the current efficiency of an electrolytic cell for electrolyzing a solution to be electrolyzed while generating an electrolytic gas. SOLUTION: The electrolytic cell 1 has an electrode unit 5 in which a plurality of electrodes are arranged so as to oppose to each other and a flow-in port 5a and a flow-out port 5b are provided on the lower part side and the upper part side, respectively, and electrolyzes a solution to be electrolyzed while passing the solution to be electrolyzed toward the flow-out port 5b from the flow-in port 5a through between the electrodes as an upward current. The electrolytic cell 1 is equipped with: a solution-to-be-electrolyzed supply line 11 for supplying the solution to be electrolyzed to the flow-in port 5a; an electrolytic solution returning line 6 for returning a portion of the electrolytic solution after electrolysis to the flow-in port 5a; an electrolytic gas discharge means (an electrolytic gas discharge nozzle 12 and an electrolytic gas discharge line 13) which is provided downstream from the flow-out port 5b and above the gas-liquid interface between the electrolytic gas and the electrolytic solution after electrolysis; an electrolytic solution discharge part (electrolytic solution discharge port 14) which is provided downstream from the flow-out port 5b and below the gas-liquid interface; and an electrolytic solution discharge line 15 for discharging the electrolytic solution to the outside of the electrolytic cell 1 from the electrolytic solution discharge part. COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：解决的问题：为了提高电解电解质的电解效率，以电解生成电解气体的电解液。解决方案：电解槽1具有电极单元5，其中多个电极被布置成彼此相对，并且在下部侧设置有流入口5a和流出口5b 并且分别在上游侧电解电解溶液，同时使电解液从流入口5a朝向流出口5b通过电极之间作为向上电流。电解槽1配备有：将要电解的溶液供给流入口5a的待电解供应管线11; 用于将电解后的电解液的一部分返回到流入口5a的电解液返回管线6; 设置在流出口5b的下游且电解后的电解气体与电解液之间的气液界面上方的电解气体排出装置（电解气体排出喷嘴12和电解气体排出管路13）电解液排出部（电解液排出口14），其设置在流出口5b的下游并位于气液界面的下方; 以及电解液排出管线15，用于将电解液从电解液排出部分排出到电解槽1的外部。版权所有（C）2009，JPO＆INPIT

42. 发明专利

JP2008053484A Persulfuric acid cleaning system 有权
标题翻译：全自动清洁系统
公开(公告)号：JP2008053484A
公开(公告)日：2008-03-06
申请号：JP2006228614
申请日：2006-08-25
申请人： Kurita Water Ind Ltd , 栗田工業株式会社
发明人： YAMAKAWA HARUYOSHI , MORITA HIROSHI , NAGAI TATSUO
IPC分类号： H01L21/304 , B01D61/44 , B08B3/08 , C02F1/42 , C02F1/469 , C02F1/72 , H01L21/027
摘要： PROBLEM TO BE SOLVED: To provide a cleaning system which can effectively remove an organic contaminant or the like deposited on such an electronic material substrate as a silicon wafer with a cleaning solution and can prolong the quality life of the cleaning solution.
SOLUTION: The cleaning system comprises a cleaning bath 1 for a cleaning target material with a cleaning solution 16 containing a sulfuric acid solvent, a means 20 for preparing a persulfuric acid solution, and a persulfuric acid adding means (switching valve 14, persulfuric acid adding line 15) for adding the cleaning solution to the persulfuric acid solution. It is desirable that the persulfuric acid solution preparing means 20 comprise an electrodialysis device suitably using a persulfate solution, the cleaning solution be adjusted at a temperature of 80 to 200°C, and the persulfuric acid be kept at a concentration of 8 to 17 M. Since the persulfuric acid solution is added to the sulfuric acid solvent as the cleaning solution, a high level of cleaning can be attained and the throughput of a cleaning process can be improved. Further, the life of the cleaning solution can be prolonged.
COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：提供一种清洁系统，其可以用清洁溶液有效地去除沉积在诸如硅晶片的电子材料基板上的有机污染物等，并且可以延长清洁溶液的质量寿命。解决方案：清洁系统包括用于清洁目标材料的清洁浴1，其具有含有硫酸溶剂的清洗溶液16，用于制备过硫酸溶液的装置20和过硫酸添加装置（切换阀14，过硫酸添加管线15），用于将清洗溶液加入到过硫酸溶液中。过硫酸溶液制备装置20最好包括适合使用过硫酸盐溶液的电渗析装置，将清洗液调节至80至200℃，并将过硫酸保持在8至17M的浓度由于将硫酸溶液作为清洗液添加到硫酸溶剂中，所以可以实现高水平的清洗，并且可以提高清洗处理的生产量。此外，可以延长清洁溶液的寿命。版权所有（C）2008，JPO＆INPIT

43. 发明专利

JP2007103516A Sulfuric acid recycling cleaning system 有权
标题翻译：硫酸循环清洗系统
公开(公告)号：JP2007103516A
公开(公告)日：2007-04-19
申请号：JP2005289225
申请日：2005-09-30
申请人： Kurita Water Ind Ltd , 栗田工業株式会社
发明人： YAMAKAWA HARUYOSHI , NAGAI TATSUO , IKEMIYA NORITO
IPC分类号： H01L21/304 , B08B3/08 , B08B3/10
摘要： PROBLEM TO BE SOLVED: To effectively and securely clean an electronic material substrate for which a highly cleaned surface is required, such as a silicon wafer, liquid crystal glass substrate, and photomask substrate.
SOLUTION: A system comprises a cleaner (cleaning tank 1) for cleaning a material to be cleaned (semiconductor substrate 30) using a sulfuric acid solution 3 as a cleaning solution, a storage (storage tank 10) for storing a cleaning solution for cleaning in the cleaner, an electrolytic reaction unit (electrolytic reaction tank 20, DC power supply 22) for manufacturing a persulfate solution by producing persulfate ion from sulfuric acid ion contained in the solution by electrolytic reaction, and a circulation line (feed pipe 14a, return pipe 14b) for circulating the solution between the storage section and the electrolytic reaction unit. Preferably, a concentrated sulfuric acid solution of sulfuric acid concentration of 8 M to 18 M and temperature of 130 to 200°C is produced in the cleaner which is changed to a solution of temperature 80 to 130°C or lower in the storage.
COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：为了有效且可靠地清洁需要高度清洁表面的电子材料基板，例如硅晶片，液晶玻璃基板和光掩模基板。解决方案：系统包括使用硫酸溶液3作为清洁溶液清洁待清洁的材料（半导体衬底30）的清洁器（清洁槽1），用于存储清洁溶液的存储（储存罐10）用于通过电解反应从溶液中含有的硫酸离子制造过硫酸根离子制造过硫酸盐溶液的电解反应单元（电解反应槽20，直流电源22）和循环管线（进料管14a ，回流管14b），用于使溶液在储存部分和电解反应单元之间循环。优选在清洗器中产生硫酸浓度为8M〜18M，温度为130〜200℃的浓硫酸溶液，将其变成储存温度为80〜130℃以下的溶液。版权所有（C）2007，JPO＆INPIT

44. 发明专利

JP2007103429A Cleaning equipment and method 审中-公开
标题翻译：清洁设备和方法
公开(公告)号：JP2007103429A
公开(公告)日：2007-04-19
申请号：JP2005287848
申请日：2005-09-30
申请人： Kurita Water Ind Ltd , 栗田工業株式会社
发明人： IKEMIYA NORITO , NAGAI TATSUO , YAMAKAWA HARUYOSHI
IPC分类号： H01L21/304 , B08B3/08 , B08B3/10 , H01L21/027
摘要： PROBLEM TO BE SOLVED: To clean an electronic material substrate requiring a highly clean surface such as a silicon wafer, a glass substrate for a liquid crystal, a photomask substrate and the like efficiently and surely, in a cleaning system employing a sulfuric acid. SOLUTION: This cleaning equipment (cleaning tub 10) contains a cleaned material (a semiconductor substrate 30) and cleans it with a heated sulfuric acid solution 4. Preferably, the sulfuric acid solution 4 containing contaminants removed from the cleaned material in a cleaning tub 1 is fed as it is, or fed to a decomposition tub 20 and then oxygenated water is added by an oxygenated water supply unit (oxygenated water supply pipe 3 or 22). Principally organic substances adhering to the cleaned material can be removed easily by cleaning the cleaned material with the heated sulfuric acid solution, and contaminants removed from the cleaned material and shifted to the sulfuric acid solution can be decomposed certainly by adding oxygenated water. COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：为了在使用硫酸的清洁系统中有效且可靠地清洁需要高度清洁表面的电子材料基板，例如硅晶片，液晶玻璃基板，光掩模基板等酸。解决方案：该清洁设备（清洁桶10）含有清洁的材料（半导体衬底30），并用加热的硫酸溶液4清洗。优选地，含有从清洁的材料中去除的污染物的硫酸溶液4 清洗槽1原样供给，或者进料到分解桶20，然后通过含氧供水单元（含氧供水管3或22）加入氧化水。主要是通过用加热的硫酸溶液清洗清洁的材料，可以容易地除去附着在清洁过的材料上的有机物质，并且可以通过加入含氧水分解从被清洗的物质中移出并转移到硫酸溶液中的污染物。版权所有（C）2007，JPO＆INPIT

45. 发明专利

JP2006278687A Sulfuric-acid recycling single-wafer cleaning system 有权
标题翻译：硫酸回收单波清洗系统
公开(公告)号：JP2006278687A
公开(公告)日：2006-10-12
申请号：JP2005095217
申请日：2005-03-29
申请人： Kurita Water Ind Ltd , 栗田工業株式会社
发明人： YAMAKAWA HARUYOSHI , NAGAI TATSUO , IKEMIYA NORITO
IPC分类号： H01L21/304 , H01L21/027
摘要： PROBLEM TO BE SOLVED: To obtain a cleaning system using a persulfuric acid which improves a cleaning effect by sufficiently increasing the concentration of a persulfuric acid, and can continue cleaning without adding a hydrogen peroxide.
SOLUTION: The cleaning system is provided with single-wafer type cleaning devices 1, 2 and 4 for cleaning a work to be cleaned using a persulfuric acid solution as a cleaning liquid; electrolytic reaction tanks 20, 25 for generating persulfuric ions from sulfate ions contained in the solution by electrolytic reaction to regenerate the persulfuric acid solution; and circulation lines 10a, 10b, 11a and 11b for circulating the persulfuric acid solution between the cleaning tank 1 and the electrolytic reaction tanks 20, 25. The sulfuric acid solution is recycled to regenerate the persulfuric acid solution in on-site by an electrolytic reaction apparatus, thereby using the persulfuric acid solution for cleaning. Thus, cleaning processing can be efficiently performed without adding a chemical liquid such as a hydrogen peroxide or ozone from the outside.
COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：为了获得使用过硫酸的清洁系统，其通过充分增加过硫酸的浓度来改善清洗效果，并且可以在不加入过氧化氢的情况下继续清洗。解决方案：清洁系统设置有单晶片型清洁装置1,2和4，用于使用过硫酸溶液作为清洁液清洁待清洁的工件; 电解反应槽20,25，用于通过电解反应从溶液中含有的硫酸根离子产生过硫离子，以再生过硫酸溶液; 以及用于在清洗槽1和电解反应槽20,25之间循环过硫酸溶液的循环管线10a，10b，11a和11b。再循环硫酸溶液，通过电解反应在现场再生过硫酸溶液装置，由此使用过硫酸溶液进行清洗。因此，可以在不从外部添加诸如过氧化氢或臭氧的化学液体的情况下有效地进行清洗处理。版权所有（C）2007，JPO＆INPIT

46. 发明专利

JP2006272052A Method and device for treating organic substance-containing water 审中-公开
标题翻译：用于处理含有有机物质的水的方法和装置
公开(公告)号：JP2006272052A
公开(公告)日：2006-10-12
申请号：JP2005091166
申请日：2005-03-28
申请人： Kurita Water Ind Ltd , 栗田工業株式会社
发明人： USHIYAMA TAEKO , NAGAI TATSUO
IPC分类号： C02F1/78 , B01F3/04 , B01F5/18 , C02F1/28 , C02F1/42 , C02F9/00
摘要： PROBLEM TO BE SOLVED: To provide a method and a device for treating organic substance-containing water, wherein organic substance-containing water is successively treated by oxidative decomposition with ozone, active carbon adsorption and ion exchange, and efficient treatment is performed by reducing the usage amount of the ozone, thereby pure water almost free from organic substance can be produced. SOLUTION: In the method for treating organic substance-containing water, organic substance-containing water is sprayed from the upper part in a reaction tower filled with ozone-containing gas, and is brought into contact with the ozone-containing gas, and the water to be treated extracted from the lower part of the reaction tower is brought into contact with active carbon, and is further brought into contact with ion exchange resin. The water treatment device is constituted so that the organic substance-containing water is successively treated by an ozone reaction means, an active carbon adsorption means and an ion exchange means, wherein the ozone reaction means is provided with: a reaction tower filled with ozone-containing gas; a spray means of spraying organic substance-containing water from the upper part in the reaction tower; a means of extracting the organic substance-containing water from the lower part of the reaction tower; and a means of feeding the ozone-containing gas to the reaction tower. COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：待解决的问题：提供一种处理含有机物的水的方法和装置，其中含有机物的水通过用臭氧氧化分解连续处理，进行活性炭吸附和离子交换，并进行有效处理通过减少臭氧的使用量，可以制造出几乎不含有机物质的纯水。解决方案：在含有机物的水的处理方法中，从填充有含臭氧气体的反应塔中的上部喷射含有机物的水，并与含臭氧的气体接触，并且从反应塔的下部提取的待处理水与活性炭接触，并进一步与离子交换树脂接触。水处理装置构成为含有机物的水通过臭氧反应装置，活性炭吸附装置和离子交换装置连续处理，其中臭氧反应装置设置有：填充有臭氧 - 含气; 从反应塔上部喷射含有机物的水的喷雾装置; 从反应塔下部提取含有机物的水的方法; 以及将含臭氧气体送入反应塔的方法。版权所有（C）2007，JPO＆INPIT

47. 发明专利

JP2006255653A Electrolytic treatment method of water system 审中-公开
标题翻译：水系统电解处理方法
公开(公告)号：JP2006255653A
公开(公告)日：2006-09-28
申请号：JP2005079703
申请日：2005-03-18
申请人： Kurita Water Ind Ltd , 栗田工業株式会社
发明人： KOMORI HIDEYUKI , NAGAI TATSUO , IYASU TAKASHI
IPC分类号： C02F1/46 , C02F5/00 , F28G13/00
摘要： PROBLEM TO BE SOLVED: To provide an electrolytic treatment method which performs electrolytic treatment of water of a circulating water system by passing water to an electrolyzer, and which removes an appropriate amount of the scale components in the system and can perform electrolytic treatment of the outflow water from the electrolyzer in such a manner that an appropriate amount of a chlorine-based oxidizing agent is incorporated in the outflow water. SOLUTION: In the electrolytic treatment process, the electrolytic treatment is performed by applying voltage between an anode 3 and a cathode 4 to circulate and pass the water from a water storage tank 51 to the electrolyzer 1. Hydrogen is generated and is made alkaline near the cathode 4. Bicarbonate ions dissociate to carbonic acid ions near the cathode 4 and calcium carbonate and magnesium carbonate are generated by the Ca ions and Mg ions and since these deposit on the electrode surfaces, a tendency to scale formation is reduced. The electrolyzer 1 is so controlled that the oxidation-reduction potential and pH in the circulating water attain a prescribed range. COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供一种电解处理方法，其通过将水通过电解槽进行循环水系统的水的电解处理，并且除去系统中适量的氧化皮组分并可进行电解处理的来自电解槽的流出水，使得在流出水中加入适量的氯系氧化剂。解决方案：在电解处理过程中，通过在阳极3和阴极4之间施加电压来进行电解处理，以使水从储水箱51循环到电解槽1中。产生氢并制成碱性附近阴极4.碳酸氢根离子离解到阴极4附近的碳酸离子，碳酸钙和碳酸镁由Ca离子和Mg离子产生，并且由于这些沉积在电极表面上，因此减小了刻度形成的倾向。对电解槽1进行控制，使循环水中的氧化还原电位和pH达到规定范围。版权所有（C）2006，JPO＆NCIPI

48. 发明专利

JP2006218353A Electrolytic treatment method 审中-公开
标题翻译：电解处理方法
公开(公告)号：JP2006218353A
公开(公告)日：2006-08-24
申请号：JP2005031951
申请日：2005-02-08
申请人： Kurita Water Ind Ltd , 栗田工業株式会社
发明人： IYASU TAKASHI , KOMORI HIDEYUKI , NAGAI TATSUO
IPC分类号： C02F1/461 , C02F5/00
摘要： PROBLEM TO BE SOLVED: To provide an electrolytic treatment method which enables the removal of a scale component in circulation water, reduction in scale formation tendency in a system, and easy dissolution and discharge of the deposited scale, and an electrolytic treatment apparatus. SOLUTION: In an electrolytic treatment process, voltage is applied between an anode 3 and a cathode 4, water from a water storage tank 51 is circulated and passed through the electrolytic treatment apparatus 1, and electrolytic treatment is carried out. In the vicinity of the cathode 4, hydrogen is generated to turn alkaline. In the vicinity of the cathode 4, a bicarbonate ion is dissociated into a carbonate ion, calcium carbonate and magnesium carbonate are generated from a Ca ion and a Mg ion, and these are deposited on the surface of an electrode, thereby reducing a scaling tendency. In a scale removal process, carbon dioxide-mixed water is supplied from an ejector 12 to a rear chamber 6 and carbon dioxide gas is supplied from a pipe 9 to a water passage space 5, thereby making the inside of the electrolytic treatment apparatus a pressurized condition and also a CO 2 concentration in water in the electrolytic treatment apparatus 0.03% or higher. COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供一种电解处理方法，其能够除去循环水中的水垢成分，减少体系中的水垢形成倾向，并且易于溶解和排出沉积的氧化皮，以及电解处理设备。解决方案：在电解处理过程中，在阳极3和阴极4之间施加电压，使来自储水箱51的水循环通过电解处理装置1，进行电解处理。在阴极4的附近，产生氢而变成碱性。在阴极4附近，碳酸根离子被分解为碳酸根离子，碳酸钙和碳酸镁由Ca离子和Mg离子产生，并且这些沉积在电极的表面上，从而降低了结垢倾向。在除垢过程中，二氧化碳混合水从喷射器12供给到后室6，二氧化碳从管道9供给到水通道空间5，从而使电解处理设备的内部加压条件下，并且电解处理装置中的水中的CO 2 浓度为0.03％以上。版权所有（C）2006，JPO＆NCIPI

49. 发明专利

JP2006198583A Electrolytic treatment method and apparatus for water system 审中-公开
标题翻译：电解处理方法和水系统设备
公开(公告)号：JP2006198583A
公开(公告)日：2006-08-03
申请号：JP2005015719
申请日：2005-01-24
申请人： Kurita Water Ind Ltd , 栗田工業株式会社
发明人： NAGAI TATSUO , KOMORI HIDEYUKI , IYASU TAKASHI
IPC分类号： C02F1/46 , C02F5/00
摘要： PROBLEM TO BE SOLVED: To provide an electrolytic treatment method and apparatus which can perform electrolytic treatment so that scale components in a water system are removed by the proper amount, and that a chlorine oxidizing agent is contained in outflow water from an electrolytic device in a method for supplying water of the water system to the electrolytic device and performing the electrolytic treatment. SOLUTION: In an electrolytic treatment process, a voltage is impressed between an anode 3 and a cathode 4, and water from a reservoir 51 is circulated to a first electrolytic device 1 or to a second electrolytic device 1B to perform the electrolytic treatment. Hydrogen is generated in the vicinity of the cathode 4 to make the pH alkaline. A bicarbonate ion is dissociated into a carbonate ion in the vicinity of the cathode 4 to generate calcium carbonate and magnesium carbonate from a Ca ion and a Mg ion. These carbonates are deposited on the surface of the electrode to reduce a scale forming tendency. The second electrolytic device 1B is specially used for scale deposition. The first electrolytic device 1 is controlled so that oxidation-reduction potential in the circulating water is within a prescribed range, and the second electrolytic device 1B is controlled so that the pH is within a prescribed range. COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供一种电解处理方法和装置，其可以进行电解处理，使得水系中的水垢成分被去除适量，并且氯氧化剂被包含在来自电解质的流出水中装置，用于将水系统的水供应到电解装置并进行电解处理的方法。解决方案：在电解处理过程中，在阳极3和阴极4之间施加电压，并且来自储存器51的水循环到第一电解装置1或第二电解装置1B以进行电解处理。在阴极4附近产生氢，使pH为碱性。碳酸根离子在阴极4附近分解为碳酸根离子，从Ca离子和Mg离子生成碳酸钙和碳酸镁。这些碳酸盐沉积在电极的表面上以减小结垢倾向。第二电解装置1B特别用于刻度沉积。控制第一电解装置1使得循环水中的氧化还原电位在规定范围内，并且控制第二电解装置1B使得pH在规定范围内。版权所有（C）2006，JPO＆NCIPI

50. 发明专利

JP2006198547A Electrolytic treatment method and apparatus for water system 审中-公开
标题翻译：电解处理方法和水系统设备
公开(公告)号：JP2006198547A
公开(公告)日：2006-08-03
申请号：JP2005014334
申请日：2005-01-21
申请人： Kurita Water Ind Ltd , 栗田工業株式会社
发明人： KOMORI HIDEYUKI , NAGAI TATSUO , IYASU TAKASHI
IPC分类号： C02F1/461 , C02F5/00
摘要： PROBLEM TO BE SOLVED: To enable easy maintenance of an electrolytic cell and stabilization of operation of the electrolytic cell in an electrolytic treatment method and apparatus for removing scale components in water of a water system and reducing a scale forming tendency in the system by supplying the water to an electrode (a cathode) and precipitating scale. SOLUTION: A voltage is impressed between an anode 14 and the cathode 15, and at the same time valves 42, 44 are opened. Water from a water storage tank 31 is supplied to the electrolytic cell 10 through a pump 41, and is returned to the water storage tank 31 after electrolytic treatment. A bicarbonate ion is dissociated into a carbonate ion in the vicinity of the cathode 15 to form calcium carbonate and magnesium carbonate from a Ca ion and a Mg ion. These carbonates are deposited on the surface of the electrode to reduce the scale forming tendency of a cooling water system. When the amount of sticking scale becomes large, clamps 18 are unfastened and the electrolytic cell 10 is replaced. COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：为了使电解槽容易维护，电解池的运行稳定化，并且在电解处理方法和装置中除去水体系中的水分中的水垢成分并降低系统中的水垢形成倾向通过将水供给到电极（阴极）和沉淀物。解决方案：在阳极14和阴极15之间施加电压，同时打开阀42,44。来自储水箱31的水通过泵41供给到电解槽10，经过电解处理后返回到储水箱31。碳酸根离子在阴极15附近被分解为碳酸根离子，从Ca离子和Mg离子形成碳酸钙和碳酸镁。这些碳酸盐沉积在电极的表面上，以降低冷却水系统的结垢倾向。当贴标量变大时，将夹具18松开并更换电解槽10。版权所有（C）2006，JPO＆NCIPI

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