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    • 43. 发明专利
    • SURFACE OBSERVER
    • JPH01128338A
    • 1989-05-22
    • JP28325687
    • 1987-11-11
    • HITACHI LTD
    • SHIMURA TAKANORIKAWANAMI YOSHIMIISHITANI TORUUMEMURA KAORUMITSUI YASUHIRO
    • G01B15/00G01B15/08H01J37/22H01J37/244
    • PURPOSE:To make a clear-cut image displayable at high speed by setting up a bit mask circuit, nullifying a bit inclusive of noise, in secondary electron data collector part, and installing a color lookup table circuit, capable of selecting optional several colors, in an image display part. CONSTITUTION:Prior to starting a data collection, a main control part 1 specifies a gain of a gain control part 15. A beam 5 is subjected to test scanning and, after gain setting is over, whether what degree of a noise component is in secondary electron data is checked. Next, the main control part 1 indicates a bit mask circuit 18 that how many subordinate bits should be nullified. With this indication, the bit mask circuit 18 removes the specified noise component. In addition, a color lookup table 27 specifies a display color corresponding to intensity of a secondary electron. When it wants to emphasize an optional part, this case will be done by rewriting of the color lookup table. With this constitution, the optional part on a sample can be emphasized and displayed by only collecting the secondary electron intensity data discharged out of the sample one time.