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    • 41. 发明专利
    • Wavefront aberration measurement system, aligner and device manufacturing method
    • WAVEFRONT ABERRATION测量系统,对准器和器件制造方法
    • JP2009109444A
    • 2009-05-21
    • JP2007284600
    • 2007-10-31
    • Canon Incキヤノン株式会社
    • SUZUKI TAKESHI
    • G01M11/02G01B9/02G01J9/02G03F7/20H01L21/027
    • PROBLEM TO BE SOLVED: To provide a wavefront aberration measurement system for highly precisely measuring wavefront aberration of the projection optical system of a liquid immersed aligner. SOLUTION: The wavefront aberration measurement system for measuring the wavefront aberration of the optical system of the aligner for exposing the substrate through the immersion liquid between the projection optical system and the substrate includes: an incident optical system for making detection light incident on the projection optical system by splitting the light from a light source into detection light and reference light; a reflection optical system for making the detection light emitted from the projection optical system reflect again on the same light path toward the projection optical system; and a detector for detecting an interference fringe generated by the interference between the detection light reflected by the reflection optical system and emitted by the projection optical system and the reference light which does not pass the projection optical path. Therein, the system is characterized by providing with a rotation mechanism for making the reflection optical system rotate and a slanting mechanism for making it aslant. COPYRIGHT: (C)2009,JPO&INPIT
    • 要解决的问题:提供一种用于高精度测量液浸式对准器的投影光学系统的波前像差的波前像差测量系统。 解决方案:用于测量对准器的光学系统的波面像差的波前像差测量系统,用于通过投影光学系统和衬底之间的浸没液体露出衬底,包括:入射光学系统,用于使检测光入射到 投影光学系统通过将来自光源的光分成检测光和参考光; 用于使从投影光学系统发射的检测光的光反射系统在与投影光学系统相同的光路上再次反射; 以及检测器,用于检测由反射光学系统反射并由投影光学系统发射的检测光与未通过投影光路的参考光之间的干涉产生的干涉条纹。 其特征在于,具有使反射光学系统旋转的旋转机构和使其倾斜的倾斜机构。 版权所有(C)2009,JPO&INPIT
    • 42. 发明专利
    • Cutter device
    • 切割装置
    • JP2008229819A
    • 2008-10-02
    • JP2007076774
    • 2007-03-23
    • Canon Incキヤノン株式会社
    • SUZUKI TAKESHI
    • B26D7/08
    • PROBLEM TO BE SOLVED: To solve the problem wherein cut defects or uncuttable situations are generated in thin recording paper and low rigid recording paper, since a blade of an inclined cutter pushes down the recording paper in a lower direction when cutting the recording paper and the recording paper enters into a groove, while being warped, just before the cutting.
      SOLUTION: A guide member holding the front of a cutter sliding direction and a lower surface of the recording paper is disposed in a cutter unit, and is made movable by synchronizing with the cutter unit.
      COPYRIGHT: (C)2009,JPO&INPIT
    • 要解决的问题:为了解决在薄记录纸和低刚性记录纸中产生切割缺陷或不可切割的情况的问题,因为当切割记录时,倾斜切割器的刀片沿下方向下压记录纸 纸张和记录纸在切割之前进入凹槽,同时翘曲。 解决方案:保持切割器滑动方向的前方和记录纸的下表面的引导构件设置在切割器单元中,并且通过与切割器单元同步而可移动。 版权所有(C)2009,JPO&INPIT
    • 43. 发明专利
    • Interferometer, exposure device, and device manufacturing method
    • 干扰仪,曝光装置和装置制造方法
    • JP2008128681A
    • 2008-06-05
    • JP2006310827
    • 2006-11-16
    • Canon Incキヤノン株式会社
    • SUZUKI TAKESHIKURAMOTO FUKUYUKI
    • G01B9/02G01M11/02G03F7/20H01L21/027
    • PROBLEM TO BE SOLVED: To provide an interferometer using a low time coherence light source, causing no accuracy deterioration, capable of performing easily aberration measurement at a polarized light illumination time. SOLUTION: A reference light flux 5 from a TS lens 4 and a test light flux 7 from a concave spherical surface-shaped mirror 9 deviated slightly from the optical axis of a specimen 8 are divided into each diffracted light having a plurality of orders by a diffraction grating of an interference fringe formation part 6. One wavefront information in the reference light flux 5 after division is erased by a mask of the interference fringe formation part 6, and only one wavefront is selected by the mask. The diffraction grating is scanned, and at least two phased in four or more wavefronts are changed, and each reference light after division and each test light after division are synthesized together, to thereby acquire an interference fringe. COPYRIGHT: (C)2008,JPO&INPIT
    • 要解决的问题:为了提供使用低时间相干光源的干涉仪,不会导致精度劣化,能够在偏振光照射时间进行容易的像差测量。 解决方案:将来自TS透镜4的参考光束5和从与样本8的光轴偏离的凹球面表面镜9的测试光束7被分成具有多个 通过干涉条纹形成部分6的衍射光栅的顺序排列。分割后的参考光束5中的一个波前信息被干涉条纹形成部分6的掩模擦除,并且掩模仅选择一个波前。 扫描衍射光栅,并且在四个或更多个波前改变至少两个相位,并且分割后的每个参考光和除法后的每个测试光合成在一起,从而获得干涉条纹。 版权所有(C)2008,JPO&INPIT
    • 44. 发明专利
    • Memory controller
    • 内存控制器
    • JP2008027247A
    • 2008-02-07
    • JP2006199943
    • 2006-07-21
    • Canon Incキヤノン株式会社
    • SUZUKI TAKESHI
    • G06F12/00G06F12/06
    • G06F13/1694G06F13/1684
    • PROBLEM TO BE SOLVED: To provide a memory controller capable of flexibly coping with a change in a use mode and an operating state of a system. SOLUTION: The memory controller 1100 is divided into system bus interfaces 1200, 1210 and 1220, a memory controller core part 1300 and a memory interface 1400. The memory controller core part 1300 is provided with a controller internal system bus 1310 for a system bus interface that should correspond to the optional number of memory interfaces as well as a command control part 1320. COPYRIGHT: (C)2008,JPO&INPIT
    • 要解决的问题:提供能够灵活地应对系统的使用模式和操作状态的变化的存储器控​​制器。 解决方案:存储器控制器1100被分为系统总线接口1200,1210和1220,存储器控制器核心部分1300和存储器接口1400.存储器控制器核心部分1300设置有控制器内部系统总线1310,用于 系统总线接口,其应对应于可选数量的存储器接口以及命令控制部分1320.版权所有(C)2008,JPO&INPIT
    • 45. 发明专利
    • Inkjet recorder
    • 喷墨记录仪
    • JP2006068994A
    • 2006-03-16
    • JP2004254077
    • 2004-09-01
    • Canon Incキヤノン株式会社
    • SUZUKI TAKESHI
    • B41J2/175
    • PROBLEM TO BE SOLVED: To prevent contamination in a tube-supply type inkjet printer due to bleeding of ink at a joint section between a head and a tube when the head is replaced in the inkjet printer.
      SOLUTION: This inkjet recorder comprises a recovery means capable of performing a recovery operation for maintaining a recording head in a good ejection condition of ink, and a movement restriction means for blocking the movement of the recording head to a recovery operation position from the outside thereof in a predetermined condition. A valve for opening or closing an ink supply channel is provided on a carriage for bearing the recording head. The recorder has a means for opening the valve in a condition that the recording head is coupled to the carriage and closing it in a condition that the recording head is separated therefrom.
      COPYRIGHT: (C)2006,JPO&NCIPI
    • 要解决的问题:为了防止在喷墨打印机中更换头部时由于头部和管之间的接合部处的墨水的渗色而引起的管式喷墨打印机中的污染。 解决方案:该喷墨记录器包括能够执行用于将记录头保持在良好的墨水喷射状态的恢复操作的恢复装置,以及用于阻止记录头移动到恢复操作位置的移动限制装置 其外部处于预定状态。 用于打开或关闭供墨通道的阀设置在用于承载记录头的托架上。 记录器具有用于打开阀的装置,该记录头在与记录头分离的条件下联接到滑架并将其关闭。 版权所有(C)2006,JPO&NCIPI
    • 46. 发明专利
    • Image processor and image processing method and its program
    • 图像处理器和图像处理方法及其程序
    • JP2005100064A
    • 2005-04-14
    • JP2003332508
    • 2003-09-24
    • Canon Incキヤノン株式会社
    • HASEGAWA REIJISUZUKI TAKESHI
    • B41J29/38G06F3/12G06F13/38H04N1/00H04N1/32
    • H04N1/32443H04N1/00236H04N1/32358H04N1/32598H04N2201/0025H04N2201/0041H04N2201/0049H04N2201/0094
    • PROBLEM TO BE SOLVED: To provide an image processor having a plurality of functions such as a printer, scanner and facsimile communication wherein a first bus connecting means is made applicable to HighSpeed USB, and a second bus connecting means is made to correspond to FullSpeed USB, and to provide an image processor which can be connected through HighSpeed USB communication with an information processing terminal such as a personal computer.
      SOLUTION: This image processor is provided with two bus connecting means whose communicating speeds are different, and one bus connecting means is configured as a first bus connecting means to be connected to a main control part, and the other bus connecting means is configured as a second bus connecting means for bi-directionally connecting the main control part with a plurality of data processing parts.
      COPYRIGHT: (C)2005,JPO&NCIPI
    • 要解决的问题:提供具有多个功能的图像处理器,诸如打印机,扫描仪和传真通信,其中第一总线连接装置适用于高速USB,并且第二总线连接装置被对应于 到FullSpeed USB,并且提供可以通过与诸如个人计算机的信息处理终端的HighSpeed USB通信连接的图像处理器。 解决方案:该图像处理器具有通信速度不同的两个总线连接装置,并且一个总线连接装置被配置为要连接到主控制部分的第一总线连接装置,另一个总线连接装置是 被配置为用于将主控制部件与多个数据处理部件双向连接的第二总线连接装置。 版权所有(C)2005,JPO&NCIPI