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    • 33. 发明专利
    • MICROVALVE
    • JPH06241346A
    • 1994-08-30
    • JP4484594
    • 1994-02-17
    • HEWLETT PACKARD CO
    • FUIRITSUPU DABURIYU BAASUGARII BII GOODON
    • F16K31/70F15C5/00F16K99/00
    • PURPOSE: To improve air characteristics and heat characteristics of a microminiature valve by arranging a monocrystal substrate having plural main surfaces, a flow via and a valve seat, an armature interfering with a flow of fluid and plural displacement means for displacing the armature between opening and closing positions. CONSTITUTION: In this microminiature valve 10, a monocrystal substrate 12 is provided with opposed plural main surfaces 38, 30, a flow via 14 extending in the other main surface 30 from one main surface 38 and a valve seat 28 including a seat surface having the inner periphery forming an orifice to the flow via 14 by extending from a plane of one main surface 38. An armature 18 is provided with a plane having a closing position and an opening position for disturbing a flow of fluid to the flow via 14 from the orifice by contacting with the seat surface of the valve seat 28. The armature 18 is selectively displaced between the opening and closing positions by plural displacement means 20, 22. By the way, an inclined inside surface for increassing the cross-sectional area as the flow via 14 separates from the seat surface is formed on the valve seat 28.