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31. 实用新型

JPS6330445U 失效
公开(公告)号：JPS6330445U
公开(公告)日：1988-02-27
申请号：JP12091986
申请日：1986-08-08
IPC分类号： B23Q1/40 , B23Q1/00 , B23Q1/58 , B23Q5/34 , B23Q5/38 , B23Q5/56 , H01L21/68 , B23Q1/18

32. 发明专利

JPS6332948A WAFER STAGE 失效
公开(公告)号：JPS6332948A
公开(公告)日：1988-02-12
申请号：JP17606686
申请日：1986-07-25
申请人： NEC YAMAGATA LTD
发明人： NAGANAMI JUNICHI
IPC分类号： G12B5/00 , B23Q5/34 , B23Q5/56 , G03F7/20 , H01L21/027 , H01L21/30 , H01L21/68
摘要： PURPOSE:To accelerate a stage speed by containing a magnetic force generator in a stage, and varying or inverting in polarity a magnetic force between the stages in response to a variation in the stage speed. CONSTITUTION:When a stage moving unit 3 and physical bodies 8, 9 for generating magnetic forces at bases 1 are contained in a wafer stage and the forces are varied in response to the stage feeding speed, a stage weight is apparently varied. Accordingly, a floating force is applied at the time of high speed moving to reduce a sliding resistance, and an attracting force is applied at the time of extremely low or low speed to accelerate or enhance the accuracy of the stage.

33. 发明专利

JPS62213938A FEEDER WITH VISCOUS RESISTANCE APPLYING DEVICE 失效
公开(公告)号：JPS62213938A
公开(公告)日：1987-09-19
申请号：JP5238786
申请日：1986-03-12
申请人： MITSUBISHI HEAVY IND LTD
发明人： NAKAGAWA HIROSHI
IPC分类号： B23Q5/34 , B23Q1/00 , B23Q1/56 , B23Q1/72 , B23Q5/26 , B23Q5/44 , B23Q5/56 , B23Q11/00
摘要： PURPOSE:To enable viscous resistance working on the movements of a sliding bed to be adjusted, by connecting a viscous fluid pump to the sliding bed moving on a fixed bed by a driving means via an interlocking device, and providing a pressure adjusting valve for the viscous fluid pump. CONSTITUTION:The quantity of oil which matches with the quantity or oil leak of a gear pump 7 is sucked up from a tank 14, using a pump 12 which is driven by a motor 13 in a pipe 9 via a branch pipe 20 which is provided between the gear pump 7 and a pressure adjusting valve 10. This is supplied via a pipe 21, so that a pressure in the discharge pipe 9 which is set by the adjustment of the pressure adjusting valve 10 is maintained. Thus, the gear pump 7 generates necessary torque even on a low speed time, so that viscous resistance can be applied to the sliding bed 1 of a feeder even on the lower speed time. Therefore, smoothness of movements and responsibility can be improved for wide speed range of the movements of the sliding bed 1.

34. 发明专利

JPS62147161A PRECISION SCREW FEED MECHANISM 失效
公开(公告)号：JPS62147161A
公开(公告)日：1987-07-01
申请号：JP28648085
申请日：1985-12-19
申请人： DAI ICHI SOKUHAN WORKS
发明人： ISHIKAWA ISAO
IPC分类号： F16H25/24 , B23Q5/40 , B23Q5/56 , F16H25/20
摘要： PURPOSE:To get rid of backlash, by forming each slot in a main nut to be screwed with a lead screw and on the circumference of preload regulating nut to be doubly screwed in this main nut, giving preload to the lead screw with its elastic action. CONSTITUTION:When a preload regulating nut 3 is screwed in a main nut 2 being locked in both axial and circumferential directions, one end comes into contact with a flange 4 of this main nut 2. When further being screwed in from this state, tensile force acts on the main nut 2 due to action of slots 6A, 6B and 12A, 12B being formed in the main nut 2 and the preload regulating nut 3, whereby compressive force acts on the preload regulating nut 3. In consequence, both these nuts 2 and 3 are elastically deformed in the axial direction and thereby the tensile force also acts on a thread ridge of the lease screw 1 from the inside to an outward direction at an interval between both end screws of the main nut 2, and this tensile force comes to preload, acting on the thread ridge. Thus, backlash can be automatically compensated.

35. 实用新型

JPS62100839U 失效
公开(公告)号：JPS62100839U
公开(公告)日：1987-06-26
申请号：JP19286785
申请日：1985-12-17
IPC分类号： B23F5/00 , B23Q5/34 , B23Q5/48 , B23Q5/56

36. 发明专利

JPS6263035A MINUTE ANGLE ROTARY TABLE DEVICE 失效
公开(公告)号：JPS6263035A
公开(公告)日：1987-03-19
申请号：JP20157685
申请日：1985-09-13
申请人： TOSHIBA CORP
发明人： SEKIYA TOMOJI
IPC分类号： B23Q1/00 , B23Q1/34 , B23Q1/36 , B23Q1/44 , B23Q5/34 , B23Q5/56
摘要： PURPOSE:To make a minute angle rotatable, by installing a pair of parallel spring bodies and a support spring body, supporting a table, in parallel and symmetry with each other holding a linear actuator in between, in case of the minute angle rotary table for positioning an optical system, etc. CONSTITUTION:The selfsame spring bodies 18 and 19 are locked as holding a first locking member 15 in between, and the other end is locked to an L- shaped first movable member 21, setting it down to a first parallel spring body 12. And, the selfsame second parallel spring body 13 is installed in a parallel, symmetrical position as holding a linear actuator 3 in between via spacers 3a and 3b, locked to movable members 21 and 31. A table 4 is supported on first and second support spring bodies 44 and 45 and locked to these movable members 21 and 31 in a rectangular direction with the parallel spring body. When the linear actuator 3 is contracted as far as DELTAx, these movable parts 21 and 31 are displaced, rotating the table 4 as far as a minute angle centering on the center 32 as in an arrow 51. When the actuator 3 extends as far as DELTAx, the table rotates by the minute angle in the opposite direction of an arrow 52 and positioned thereat. Since there is no sliding surface, no friction happensand, what is more, a stick slip is not utterly entailed there too.

37. 发明专利

JPS625744B2 失效
公开(公告)号：JPS625744B2
公开(公告)日：1987-02-06
申请号：JP4199079
申请日：1979-04-09
申请人： KOMATSU MFG CO LTD
发明人： MAEDA HARUO , MURAKAMI YOSHIAKI
IPC分类号： B23Q5/56 , F16H57/12

38. 发明专利

JPS61175001A LATERAL OR VERTICAL PROCESSING DEVICE FOR WOOD WORKPIECE 失效
公开(公告)号：JPS61175001A
公开(公告)日：1986-08-06
申请号：JP9766785
申请日：1985-05-08
申请人： ZUCKERMANN KG MASCHF
发明人： ERITSUHI SHIYUMITSUTO
IPC分类号： B27C5/02 , B23Q5/56 , B27C9/00

39. 发明专利

JPS61159349A MINUTE DISTANCE MOVING DEVICE 失效
公开(公告)号：JPS61159349A
公开(公告)日：1986-07-19
申请号：JP27323085
申请日：1985-12-06
申请人： HITACHI LTD
发明人： MORIYAMA SHIGEO
IPC分类号： B23Q5/28 , B23Q1/34 , B23Q5/22 , B23Q5/56 , G05D3/00 , H01L21/027 , H01L21/30 , H01L21/67 , H01L21/68
摘要： PURPOSE:To make it possible to perform high speed movement and positioning by minutely moving the position and posture of a moving table by two drive rod system or more having elastic deformational fulcrums at both ends. CONSTITUTION:A shaft shaped drive rod 8 having are circular notches at both the sides connects an X axis drive device 2 and a table 1 to move the table 1 in the direction of X axis. The table 1 is moved also in the direction of Y axis by a drive device 4 and a drive rod 9 in the same way as in the direction of X axis. When the X axis drive device 2 is driven to move the table 1, the notches of both the ends of the Y axis drive rod 9 are elastically deformed resulting that the rod 9 allows the table 1 to move in the direction of X axis regulating the position of the table 1 in the direction of Y axis without giving great force to the table 1 because the notches of both the side of the rod 9 are elastically deformed. In case of moving the table 1 in the direction of Y axis drive rod 8 is deformed and displaced in the same way as in the direction of X axis.

40. 发明专利

JPS61142040A Precision position determining method 失效
标题翻译：精确位置确定方法
公开(公告)号：JPS61142040A
公开(公告)日：1986-06-28
申请号：JP27619085
申请日：1985-12-10
申请人： Adamusu Chiyaarusu
发明人： CHIYAARUSU ADAMUSU
IPC分类号： B23Q5/22 , B23Q1/36 , B23Q5/34 , B23Q5/56
CPC分类号： B23Q1/36 , Y10T82/10 , Y10T82/135 , Y10T82/2541 , Y10T403/54

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