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    • 32. 发明专利
    • Piezoelectric actuator, control method for driving of piezoelectric actuator, and electronic apparatus
    • 压电致动器,压电致动器驱动控制方法和电子设备
    • JP2007221924A
    • 2007-08-30
    • JP2006040210
    • 2006-02-17
    • Seiko Epson Corpセイコーエプソン株式会社
    • HASHIMOTO TAIJI
    • H02N2/00G04C3/12H01L41/09H01L41/18H01L41/187
    • H02N2/142G04C3/12G04C17/0058H02N2/002H02N2/103H02N2/123
    • PROBLEM TO BE SOLVED: To provide a piezoelectric actuator whose driving can be easily controlled. SOLUTION: The piezoelectric actuator 20 is capable of driving a rotor both in a positive direction and in a negative direction by changing the plus and the minus of the phase difference (driving phase difference) between driving signals D1, D2 input to first and second vibrational regions R1, R2. The state of vibration is detected by a detection electrode (261 or 262) provided in at least either of the first vibrational region R1 and the second vibrational region R2 where a phase delay driving signal is supplied. Driving is controlled based on the phase difference (detection phase difference) of this vibration signal (S1 or S2) from the driving signal D1. Therefore, a phase difference characteristic that causes monotonic increase or monotonic decrease can be obtained. Since driving can be controlled using this detection phase difference as a set value for drive control, any complicated algorithm is not necessary. As a result, the scale of circuitry is not increased and the frequency of driving signals can be easily controlled. COPYRIGHT: (C)2007,JPO&INPIT
    • 要解决的问题:提供一种压电致动器,其驱动可以容易地控制。 解决方案:压电致动器20能够通过改变输入到第一的驱动信号D1,D2之间的相位差(驱动相位差)的正负方向来驱动正方向和负方向的转子。 和第二振动区域R1,R2。 通过设置在提供相位延迟驱动信号的第一振动区域R1和第二振动区域R2中的至少一个中的检测电极(261或262)来检测振动状态。 基于来自驱动信号D1的振动信号(S1或S2)的相位差(检测相位差)来控制驱动。 因此,可以获得引起单调增加或单调下降的相位差特性。 由于可以使用该检测相位差来控制驱动作为用于驱动控制的设定值,因此不需要任何复杂的算法。 结果,不增加电路规模,并且可以容易地控制驱动信号的频率。 版权所有(C)2007,JPO&INPIT