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    • 31. 发明专利
    • SEMICONDUCTOR BONDING DEVICE
    • JPS63250831A
    • 1988-10-18
    • JP8481687
    • 1987-04-08
    • TOSHIBA CORP
    • SAITO KAZUYOSHI
    • H01L21/60
    • PURPOSE:To set arbitrarily a loading rate to facilitate the inhibition of impact force by a method wherein the title device is provided with a spring mechanism (can be an air pressure system) over a bonding tool and a bonding load is applied through this mechanism. CONSTITUTION:A spring mechanism 12 is provided over a bonding tool 13 and moreover, a load to be applied to the upper part of the mechanism 12 is detected. That is, the tool 13 heated by a heater 14 and a guide 18 are descended by a driving force 19 and when the tool 13 comes into contact with a tape carrier 15, the tool's own weight is applied and thereafter, a load is gradually increased with the compression of the spring 12 and if a load measuring instrument 11 reaches a constant value, the tool and the guide are stopped or are made to ascend and the setting of a load is performed. Thereby, an abrupt thermal impulse (temperature rise) is not associated with because contact force is gradually increased even in a thermal manner, not to mention impact due to a load, and damage to semiconductor elements and their destruction can be reduced.
    • 32. 发明专利
    • FORMATION OF SOLDER BUMP
    • JPS6358947A
    • 1988-03-14
    • JP20336386
    • 1986-08-29
    • TOSHIBA CORPKURODA DENKI KK
    • INABA NAOHIKOIWASE NOBUOSAITO KAZUYOSHIHIRATA SEIICHIGONDA MAKOTOHATANO HAJIME
    • H01L21/60
    • PURPOSE:To attach a solder layer selectively to an electrode by means of alloying each other and to form a solder bump directly by a method wherein a substrate is mounted on a rigid support via a soft material and molten solder is brought into contact with an exposed electrode part so that ultrasonic waves can be applied to the solder. CONSTITUTION:A silicon wafer 11 is mounted on a support 13 composed of a glass sheet via a soft material 12 composed of a silicone rubber sheet whose both surfaces are attached by adhesive tapesfor high-temperature use. This assembly is then dipped into spouting molten solder 23 by keeping it in a vertical position. An ultrasonic vibrator 25 is then inserted into the molten solder 23 at a location near the silicon wafer 11 so that ultrasonic waves can be applied to the molten solder 23. Through this constitution, before dipping the assembly into the solder an electrode 33 is formed on a silicon substrate 31 via an insulating film 32, and the electrode 33 is not covered with a passivating film 34 coating the whole surface. After dipping the assembly into the solder, a mountain-like solder bump 35 is bonded directly on this electrode 33.
    • 37. 发明专利
    • SEMICONDUCTOR DEVICE
    • JPH03283440A
    • 1991-12-13
    • JP8101590
    • 1990-03-30
    • TOSHIBA CORP
    • SAITO KAZUYOSHITAZAWA HIROSHI
    • H01L21/60
    • PURPOSE:To obtain a semiconductor device, which has improved high-frequency characteristics and improved heat dissipation characteristics and moreover, has improved shielding characteristics, by a method wherein a metal foil, which is connected to leads, is spread and arranged over a chip in such a way that it is positioned over the upper surface of the chip. CONSTITUTION:A circuit pattern is constituted of the base parts of leads 3 on a film carrier 2 and the tips of the leads 3 are made to project in a hole part as connecting parts with electrode pads on a chip 1. A metal film 5 consisting of copper or the like, for example, is arranged beyond the tips of these leads, that is, over the chip 1 mounted on the hole part. This metal foil 5 is spread over the whole chip and is continuously linked with all leads 31 for grounding use of the leads 3. The leads 3 are patterned using a copper foil adhered on the film carrier 2 as a mask pattern and lead patterns are formed, but the foil 5 is formed together as part of the patterns at the time of this patterning.
    • 38. 发明专利
    • ULTRASONIC DIAGNOSTIC DEVICE
    • JPH0380841A
    • 1991-04-05
    • JP21797189
    • 1989-08-24
    • TOSHIBA CORP
    • SAITO KAZUYOSHI
    • G01N29/44A61B8/00G01N29/22
    • PURPOSE:To always form an optimum sound field by providing a calibration function for executing automatically the sensitivity adjustment of plural vibrators for constituting an ultrasonic probe on the device itself. CONSTITUTION:Sensitivity of each vibrator 2 for constituting an ultrasonic probe 1 is measured. an echo signal reflected by a sensitivity tester 20 is inputted to a DSC 6 through a receiving system 4, by which echo data is stored in its frame memory 6a. This echo data is read out by a CPU 5 and stored in a memory 7. Subsequently, based on a result of measurement of sensitivity, sensitivity of each vibrator 2 is adjusted. Based on the vibrator of the worst sensitivity as a reference, based on the sensitivity of each vibrator 2, the CPU 5 executes such a correction as adjusts other vibrator 2 thereto and executes a control so as to vary an ATT value of each attenuator 10, 15 in order to form an optimum sound field.
    • 40. 发明专利
    • SEMICONDUCTOR DEVICE
    • JPH02139952A
    • 1990-05-29
    • JP29232888
    • 1988-11-21
    • TOSHIBA CORP
    • TAKUBO TOMOAKISAITO KAZUYOSHITAZAWA HIROSHI
    • H01L23/38
    • PURPOSE:To perform cooling efficiently by providing the following elements and heat insulating layers: a semiconductor element which is installed to the face inside of a package of a heat conductive member for plugging the openings of the package; a cooling element which is installed on the opposite side of the package; heat insulating layers which are provided at least on one side of surfaces of the package as well as the heat conductive member. CONSTITUTION:A heat conductive member 102 is prepared so that openings of the rear of a package 101 on which a glass cover 101b is provided on the upper face of a mainframe 101a are filled up and a semiconductor 103 is installed at the inside of the package 101. Cooling elements 104 are installed at the face of the opposite side of the package. Heat insulating layers 113 are provided not only by covering a part where the glass cover 101b is removed, that is, the surface of the heat conductive member 102 but also by covering the surface of the cooling elements 104 as well. Once an electric current flows from the side of a metallic plate 106 of the cooling element 104 to a P-type semiconductor 105 and a metallic plate 107, the metallic plate 106 acts as a heat absorption part and the metallic plate 107 acts as a heat radiation part due to the Peltier effect.