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31. 发明专利

JPS58208603A POSITION DETECTING METHOD 失效
公开(公告)号：JPS58208603A
公开(公告)日：1983-12-05
申请号：JP9122782
申请日：1982-05-31
申请人： HITACHI LTD
发明人： HARA YASUHIKO , KOIZUMI MITSUYOSHI
IPC分类号： G01B11/00 , G01B11/24 , G01B11/245 , G03F9/00
摘要： PURPOSE:To detect the position of a pattern in a straight line shape or in a dot line shape highly accurately and highly reliably, by picking up the two dimensional pattern by image pickup elements wherein long light receiving elements are arranged in a linear dimension in the direction perpendicular to the arranging direction. CONSTITUTION:A lamp 1 illuminates a pattern 4, whose position is to be detected, through a condenser lens 2 and a semitransparent mirror 3. The object pattern 4 is expanded by an objective lens 5. The luminous flux is separated by a semitransparent mirror 3' into two parts, and images are formed on pattern detectors 6 and 6'. The detectors 6 and 6' are solid state image pickup elements, wherein light receiving elements are arranged in one line. The length of the image pickup element is very long in comparison with the pitch and the width thereof.

32. 发明专利

JPS5858404A FLOATING BINARY SYSTEM FOR SIGNAL 失效
公开(公告)号：JPS5858404A
公开(公告)日：1983-04-07
申请号：JP15754781
申请日：1981-10-05
申请人： HITACHI LTD
发明人： HARA YASUHIKO , NAKAHATA MITSUZOU
IPC分类号： H05K3/00 , G01B11/00 , G03F1/00 , G06K7/00 , G06K7/10 , G06T1/00
摘要： PURPOSE:To eliminate the influence of the change in detection levels owing to the pattern positions of detection signals in the state of detecting patterns optically and binary coding the patterns by setting binary coding levels in accordance with the predetected patterns which are white over the entire surface and are black over the entire surface. CONSTITUTION:First a pattern which is white over the entire surface is prepared as a pattern 1, and is projected via a lens 3 on a detector 2. The output of this time is a signal VW(X) and is stored in a memory 9 via a sample holding circuit 6 and an AD converter 7. The pattern 1 which is black over the entire surface is prepd. and a signal VB(X) is stored in a memory 8. From the memories 8, 9, a floating binary coding level signal Vth(X) shown by the formula is operated in an arithmetic circuit part 17, and is stored in a memory 15. After the signals are processed offline, the pattern 1 to be actually inspected or measured is projected on the detector 2 via the lens 3 as online operation. The detected signal V(X) is compared with the signal of the memory 15 by a comparator 16, and the binary coding signal corresponding to the width of the patterns is outputted.

33. 发明专利

JPS5810833A METHOD AND APPARATUS FOR DETECTING PATTERN 失效
公开(公告)号：JPS5810833A
公开(公告)日：1983-01-21
申请号：JP10888581
申请日：1981-07-14
申请人： HITACHI LTD
发明人： HARA YASUHIKO , AKIYAMA NOBUYUKI , FUSHIMI SATOSHI , OOSHIMA YOSHIMASA , AOKI NOBUHIKO
IPC分类号： H01L21/66 , G03F7/20 , H01L21/027
摘要： PURPOSE:To accelerate the speed of detection of the pattern at N times by simultaneously conducting scan in parallel form by using a plurality (N) of photo-detecting elements. CONSTITUTION:Each free end of N optical fibers is used as the light receiving sections of a photodetector, and rectilinearly arranged on a straight line L, and an optical fiber row 3 is formed. A pattern surface 1 is irradiated, the reflected light is condensed by means of an objective 6, and reflected by means of a rotary polyhedral mirror 7, and a pattern picture is formed to the light receiving sections of the optical fiber row 3. The pattern picture to be detected is scanned in the Y direction vertical to the straight line L, and the N fibers are scanned (A1-AN) simultaneously by the N light receiving sections. The pattern 1 as a body to be detected is forwarded in the X direction at the same time, and the speed of feeding is set to V=W/T (where W is the scanning width of the light receiving sections and T cycle time required for scaning only by a scanning distance l). N Time series-like output signals are compared and arithmetically operated, and the pattern can be detected.

34. 发明专利

JPS57118643A Positioning equipment 失效
标题翻译：定位设备
公开(公告)号：JPS57118643A
公开(公告)日：1982-07-23
申请号：JP18228481
申请日：1981-11-16
申请人： Hitachi Ltd
发明人： KOIZUMI MITSUYOSHI , HARA YASUHIKO
IPC分类号： G01B11/00 , G01B11/24 , G01B11/245 , G03F9/00 , H01L21/027 , H01L21/30
CPC分类号： H01L21/30
摘要： PURPOSE:To align a position with high reliability without being affected by disturbance such as lighting uneveness by a method wherein an image which is obtained by applyig the light to a semiconductor wafer and a mask which overlap each other is converted into image signal to each axial direction by a solid state image pickup tube and is processed. CONSTITUTION:The light irradiated from a source 17 is converted into the parallel beam by a condensor lens 16 and is reflected by a semitransparent mirror 15 and is applied to the target pattern 3 and 5 through an object lens 14. The light reflected by the target pattern 3 and 5 passes through the object lens 14 and the semitransparent mirror 15. The image of the light which is reflected by a semitransparent mirror 18 and that of the light which passes through the mirror 18 are compressed to X- and Y-axis direction by cylindrical lenses 20 and 21 respectively and are focused on photodiode alleys 22 and 23. The position of the target pattern can be positioned by processing these outputs to produce signals.
摘要翻译：目的：通过将通过将光施加到半导体晶片而获得的图像和彼此重叠的掩模获得的图像转换成每个轴向的图像信号，来对准具有高可靠性的位置而不受诸如照明不均匀性之类的干扰的影响方向由固态图像拾取管进行处理。构成：从源17照射的光被聚光透镜16转换为平行光束，并被半透明反射镜15反射，并通过物镜14施加到目标图案3和5.由目标反射的光图案3和5通过物镜14和半透明反射镜15.由半透明反射镜18反射的光的图像和通过反射镜18的光的图像被压缩到X轴和Y轴方向分别通过柱面透镜20和21，并且聚焦在光电二极管凹坑22和23上。可以通过处理这些输出来定位目标图案的位置以产生信号。

35. 发明专利

JPS57118105A Detector 失效
标题翻译：探测器
公开(公告)号：JPS57118105A
公开(公告)日：1982-07-22
申请号：JP18228381
申请日：1981-11-16
申请人： Hitachi Ltd
发明人： KOIZUMI MITSUYOSHI , HARA YASUHIKO
IPC分类号： G01B11/00 , G01B11/24 , G01B11/245 , G03F9/00 , H01L21/027 , H01L21/30
CPC分类号： G03F9/70
摘要： PURPOSE:To make the simple measurement of linear patterns with high accuracy and high reliability possible by condensing the light form the direction intersecting orthogonally with the arranging direction of photoelectric transducers on one-dimensional solid-state image pickup elements arranged with said transducers. CONSTITUTION:An optical system which condenses light from the direction at a right angle to the arranging direction of photoelectric transducers onto one- dimensional solid-state image pickup elements arranged with said transducers is added to said elements whereby a linear pattern detector is provided. For example, the light from a light source 17 is cast via a semitransparent mirror 15 and a lens 14 to position matching patterns 3a, 3b, 5a, 5b, and part of the magnified image light thereof is scaled down in the width direction by cylindrical lenses 20, 21 after reflection with a semitransparent mirror 18, and is received in solid state image pickup elements 22a, 22b. The remaining light is passed through the mirror 18, after which it is received in the elements 23a, 23b via the cylindrical lenses in the same way, whereby the signals 26a, (b) and 27a, (b) corresponding to the mutually orthogonally intersecting linear patterns are obtained with high accuracy and high reliability.
摘要翻译：目的：通过将光形成在与所述换能器配置的一维固态摄像元件上的光电转换器的排列方向正交相交的方向上，可以将光形成为高精度和高可靠性的简单测量。构成：将来自直角方向的光与光电变换器的配置方向的光聚合到与所述换能器配置的一维固态摄像元件上的光学系统被添加到所述元件，从而提供线性图案检测器。例如，来自光源17的光通过半透明反射镜15和透镜14铸造，以使匹配图案3a，3b，5a，5b位置，并且其一部分放大图像光在宽度方向上通过圆柱形透镜20,21在用半透明反射镜18反射之后，被接收在固态图像拾取元件22a，22b中。剩余的光通过反射镜18，然后通过柱面透镜以相同方式容纳在元件23a，23b中，由此相应于相互垂直相交的信号26a，（b）和27a（b）获得了高精度和高可靠性的线性图案。

36. 发明专利

JPS5750128A Signal binary coding device 失效
标题翻译：信号二进制编码装置
公开(公告)号：JPS5750128A
公开(公告)日：1982-03-24
申请号：JP12453180
申请日：1980-09-10
申请人： Hitachi Ltd
发明人： OKAMOTO KEIICHI , HARA YASUHIKO
IPC分类号： H03K5/08
CPC分类号： H03K5/082
摘要： PURPOSE:To achieve accurate binary coding without distorting waveform by producing a delay signal the same shape as an input signal, setting the threshold value through floating this signal, and outputting a signal of 1 or 0 level depending on whether the input signal is lower or higher than the threshold value. CONSTITUTION:A video signal obtained from a photomask with an image sensor 21 of a signal binary coding device is respectively inputted to comparators 23, 24, it is compared with a high threshold value 13 set at a power supply 25 through the comparator 23 and compared with a low threshold value 14 set by a power supply 26 at the comparator 24. The video signal is binary-coded at the comparators 23, 24, and binary-conded outputs 15 and 16 are outputted to the high and low threshold values 13 and 14, and logical calculation is made at a logical circuit such as an AND gate. A signal 17 rejecting signals 15, 16 corresponding to white and black point signals 19, 20 is stored in an FF34 and an output F at 1 is outputted. The logic between signals 17, and 15, 16 is taken at the logic circuit to output binary signal 18 corresponding to white and black patterns.
摘要翻译：目的：通过产生与输入信号相同的形状的延迟信号来实现精确的二进制编码，而不会使波形失真，通过对该信号进行浮置来设置阈值，并根据输入信号是低还是输出1或0电平的信号高于阈值。构成：将从具有信号二进制编码装置的图像传感器21的光掩模获得的视频信号分别输入到比较器23,24，将其与通过比较器23设置在电源25处的高阈值13进行比较，并进行比较具有由比较器24上的电源26设置的低阈值14.视频信号在比较器23,24处进行二进制编码，并且二进制输出15和16被输出到高和低阈值13和在逻辑电路例如与门进行逻辑运算。将对应于白点和黑点信号19,20的信号15,16的信号17存储在FF34中，输出F为1。在逻辑电路处获取信号17和15,16之间的逻辑，以输出对应于白色和黑色图案的二进制信号18。

37. 发明专利

JPS5465057A AUTOMATIC SIZE MEASURING APPARATUS OF LONG LENGTH OBJECTS AND MEASURING METHOD FOR THE SAME 失效
公开(公告)号：JPS5465057A
公开(公告)日：1979-05-25
申请号：JP13071877
申请日：1977-11-02
申请人： HITACHI LTD
发明人： HARA YASUHIKO
IPC分类号： G01B11/04 , G01B11/02
摘要： PURPOSE:To obtain the width of the measuring objects by providing three photo detectors spaced at a fixed distance in the feed direction of a belt conveyor moving at a constant speed and the direction perpendicular thereto, and measuring the timings of the end part detection of the measuring objects on the conveyor. CONSTITUTION:The circuit substrate 1 which had initially been in the position 9 shown by a dot-dash line is moved toward right by the movement of a belt conveyor 2. At the time t1 a photo detector S1 senses the end P2 of the circuit substrate 1. Next, at the time t3, a photo detector S3 senses the end P3, at the time t2 a photo detector S2 senses the end P2 and at the time t4 the photo detector S1 senses the final end P1. In this case, the distance between the photo detectors S1 and S2 parallel in the feed direction of the conveyor is let to be l1, the distance between the photo detectors S2 and S3 in the direction perpendicular to the feed direction to be l2 and the relation of l2

38. 发明专利

JPS52119844A COMPARATIVE EXAMINATION METHOD FOR TWOODIMENSIONAL PICTURE 失效
公开(公告)号：JPS52119844A
公开(公告)日：1977-10-07
申请号：JP3599876
申请日：1976-04-02
申请人： HITACHI LTD
发明人： HARA YASUHIKO
IPC分类号： G01B11/24 , B41F33/14 , G06K9/00 , G06T1/00 , G06T7/00
摘要： PURPOSE:To provide a two-dimensional picture comparative examination method by which two-dimensional patterns can be checked accurately at a high speed.

39. 发明专利

JPH1019807A X-RAY IMAGE PICK UP METHOD 失效
公开(公告)号：JPH1019807A
公开(公告)日：1998-01-23
申请号：JP17329496
申请日：1996-07-03
申请人： HITACHI LTD
发明人： IRIE YOKO , DOI HIDEAKI , HARA YASUHIKO , IIDA TADASHI , FUJISHITA YASUHIRO
IPC分类号： G01N23/04 , G01N29/06 , H01L21/3205 , H05K3/00
摘要： PROBLEM TO BE SOLVED: To provide a method for testing wiring patterns and its device, capable of testing solid shape defects including internal defects of wiring patterns in a wiring circuit board and of obtaining data on which face the detected defects exist in the board. SOLUTION: Between an X-ray source 2 and a printed board 3 being a test object, a visual light image obtained from reflected lights of a mirror 35 inclined at 45 deg. is imaged by a CCD camera 36. On the other hand, the X rays 2 transmit the mirror 35 and are emitted on the printed board 3 being a test object, and the transmitted image is converted into a visual light image by an image intensifier to be imaged by another CCD camera.

40. 发明专利

JPH09236415A METHOD AND DEVICE FOR DETECTING PATTERN 失效
公开(公告)号：JPH09236415A
公开(公告)日：1997-09-09
申请号：JP4466596
申请日：1996-03-01
申请人： HITACHI LTD
发明人： KOBAYASHI IRARIO HARUOMI , HARA YASUHIKO , KADOYA AKIYOSHI , SASADA MASATO
IPC分类号： G01B11/24 , H01L21/66 , H05K3/00
摘要： PROBLEM TO BE SOLVED: To detect various kinds of patterns on a base board by enabling them to be directly or indirectly divided corresponding to the kinds thereof. SOLUTION: For example, a fluorescent generation characteristic pattern image can be detected by a fluorescent illumination/detection optical system 20, a polarization elimination characteristic pattern image can be by a near infrared polarization illumination/detection optical system 60 and a red wave length light reflection characteristic pattern image can be by a diagonal red illumination/detection optical system (including a red light source 90). Under the above condition, one of the three kinds of pattern images is indirectly detected from the other two pattern images.

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