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    • 33. 发明专利
    • Manufacturing method of phosphor thin film
    • 磷光薄膜的制造方法
    • JP2008075073A
    • 2008-04-03
    • JP2007212153
    • 2007-08-16
    • National Institute Of Advanced Industrial & Technology独立行政法人産業技術総合研究所
    • TSUCHIYA TETSUONAKAJIMA TOMOHIKOKUMAGAI TOSHIYA
    • C09K11/67C01G23/00C09K11/08H01S3/00
    • PROBLEM TO BE SOLVED: To provide a manufacturing method of a high-performance phosphor thin film material that enables the formation of a crystallized pervoskite-related Ti, Zr oxide thin film on a glass or silicon substrate.
      SOLUTION: In the manufacturing method of a phosphor thin film, an organic metal thin film or a metal oxide film, which is formed on a substrate by adding at least one selected from Ce, Pr, Nd, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, Yb and Lu and optionally further adding at least one selected from Al, Ga and In to an oxide represented by the composition formula: ABO
      3 , A
      2 BO
      4 or A
      3 B
      2 O
      7 (provided that there may be deficiencies at A, B and O sites; A is at least one element selected from Ca, Sr and Ba; and B is at least one element selected from Ti and Zr), is irradiated with an ultraviolet lamp at room temperature and subsequently irradiated with an ultraviolet laser at a temperature of 400°C or lower. The film is subjected to an oxidation treatment after being crystallized.
      COPYRIGHT: (C)2008,JPO&INPIT
    • 解决的问题:提供能够在玻璃或硅衬底上形成结晶的与硅酸盐相关的Ti,Zr氧化物薄膜的高性能荧光体薄膜材料的制造方法。 解决方案:在通过添加选自Ce,Pr,Nd,Sm,Eu,Gd中的至少一种形成在基板上的荧光体薄膜,有机金属薄膜或金属氧化物膜的制造方法中 ,Tb,Dy,Ho,Er,Tm,Yb和Lu,并任选地将选自Al,Ga和In中的至少一种添加到由组成式ABO 3 表示的氧化物中,A SB > 2 SB 4 或A 3 2 7 (条件是可能存在缺陷 在A,B和O位置; A是选自Ca,Sr和Ba中的至少一种元素; B是选自Ti和Zr中的至少一种元素),在室温下用紫外线灯照射,随后用 在400℃以下的紫外线激光。 在结晶后对该膜进行氧化处理。 版权所有(C)2008,JPO&INPIT