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31. 发明专利

JPH04196371A SUPERCONDUCTIVE DEVICE AND MANUFACTURE THEREOF 失效
公开(公告)号：JPH04196371A
公开(公告)日：1992-07-16
申请号：JP32297590
申请日：1990-11-28
申请人： HITACHI LTD
发明人： KOMINAMI SHINYA , YAMADA KOJI , HIRANO MIKIO
IPC分类号： H01L39/22
摘要： PURPOSE:To prevent the laminated superconductors from being short-circuited to each other so as to restrain a superconductive device from malfunctioning by a method wherein a metal fluoride is provided to a part of the side wall of the superconductor layer. CONSTITUTION:A metal fluoride is provided to a part of the side wall of a superconductor layer. Therefore, when superconductors laminated sandwiching an insulator 5 between them are formed through etching, even if residuals induced by etching adhere to the side walls of the superconductors and the insulator 5, the side walls are turned into insulators as exposed to plasma of CF4 or CHF3. By this setup, in a superconductive device possessed of a structure where two or more superconductors are laminated sandwiching an insulator between them, the laminated superconductors are prevented from being short- circuited to each other, and the superconductive device is restrained from malfunctioning.

32. 发明专利

JPH01212225A OXIDE SUPERCONDUCTING MATERIAL 失效
公开(公告)号：JPH01212225A
公开(公告)日：1989-08-25
申请号：JP3580488
申请日：1988-02-18
申请人： TANAKA SHOJI , TOKYO ELECTRIC POWER CO , CHUBU ELECTRIC POWER , KANSAI ELECTRIC POWER CO , OKI ELECTRIC IND CO LTD , SUMITOMO ELECTRIC INDUSTRIES , TOSHIBA CORP , HITACHI LTD , FURUKAWA ELECTRIC CO LTD , MATSUSHITA ELECTRIC IND CO LTD , MITSUBISHI ELECTRIC CORP
发明人： TANAKA SHOJI , WADA TAKAHIRO , HONDA TOSHIHISA , SAKAI SUKEYUKI , SUZUKI NOBURO , IKEDA HIROSHI , MIYAJIMA MASAMICHI , NISHIKAWA TOKUHIRO , ITO TAKAO , OKUDA SHIGERU , IKEGAWA SUMIO , KOMINAMI SHINYA , MAEDA TOSHIHIKO
IPC分类号： H01L39/12 , C01G1/00 , C01G29/00 , C04B35/00 , C04B35/45 , H01B12/00
摘要： PURPOSE:To decrease the synthesis temp. and to increase the critical temp. of the title material by substituting a part of Sr and Ca for >=1 kind of an alkali metal element in a specified molar ratio in the oxide superconducting material based on Bi-Sr-Ca-Cu-O. CONSTITUTION:The oxide superconducting material is the superconducting oxide consisting of oxygen and metallic elements such as Bi, Sr, Ca, Cu, and A (A is >=1 kind of alkali metal element selected from La, Na, K, Rb, or Cs). The composition of the metallic elements is in the range shown by the formula. In the formula, (a+b+c)=1, (X+Y+Z)=1, 0.05

33. 发明专利

JP2002141565A MANUFACTURING METHOD OF SUPERCONDUCTING DEVICE 审中-公开
公开(公告)号：JP2002141565A
公开(公告)日：2002-05-17
申请号：JP2001277477
申请日：2001-09-13
申请人： HITACHI LTD
发明人： NISHINO JUICHI , KAWABE USHIO , TARUYA YOSHINOBU , AIDA TOSHIYUKI , FUKAZAWA TOKUMI , KOMINAMI SHINYA , HATANO MUTSUKO
IPC分类号： H01L39/22 , H01L39/24
摘要： PROBLEM TO BE SOLVED: To provide a manufacturing method of a superconducting device which can be easily structured and has a uniform characteristic. SOLUTION: After forming in a processing way a weakly bonded portion on a single-crystal substrate, a superconducting thin film is formed on the processed substrate to manufacture a superconducting device. For example, an amorphous alumina film 13 is formed on the region of an SrTiO3 single- crystal substrate 1 wherein the weakly bonded portion is formed. Subsequently, by forming extensively on the substrate a Ba-Y-Cu oxide superconducting film, a non-oriented Ba-Y-Cu film 9 is so formed on the alumina film, and c-axis oriented Ba-Y-Cu films 3a, 3b are so formed on the exposed SrTiO3 substrate as to create a weakly bonded element.

34. 发明专利

JPH10163540A RESISTANCE ELEMENT FOR SUPERCONDUCTING INTEGRATED CIRCUIT 失效
公开(公告)号：JPH10163540A
公开(公告)日：1998-06-19
申请号：JP31591596
申请日：1996-11-27
申请人： HITACHI LTD
发明人： KOMINAMI SHINYA , MITA REEKO
IPC分类号： H01L39/22
摘要： PROBLEM TO BE SOLVED: To prevent the deviation of a sheet resistance of a resistor from a designed value by forming such a silicon film that is in contact with the upper surface of the resistor, covers the entire upper surface of the resistor except the parts connected to superconducting wiring, and does not exist in the other area than the upper surface. SOLUTION: After a base insulating film 2 is formed on a silicon substrate 1 by depositing silicon dioxide, a molybdenum film and a silicon film are deposited on the insulating film 2. Then a resistor protecting layer 3 is formed on the silicon film by forming and etching a photoresist. After the formation of the protective layer 3, a resistor 4 is formed by etching the molybdenum film by using the protective layer 3 as a mask. The width accuracy of the resistor 4 is improved by reducing the retreat of the silicon film, which becomes a mask by utilizing the etching rate difference between the molybdenum film and silicon film. Next, an interlayer insulating film 5 and superconducting wiring 6 are formed.

35. 发明专利

JPH09257998A SUPERCONDUCTIVE SPECTROMETER AND MICROSCOPE 失效
公开(公告)号：JPH09257998A
公开(公告)日：1997-10-03
申请号：JP6593596
申请日：1996-03-22
申请人： HITACHI LTD
发明人： SUGA MITSUO , HOSOYA MUTSUMI , KOMINAMI SHINYA , MITA REEKO , NINOMIYA TAKESHI
IPC分类号： G21K1/06 , G21K7/00
摘要： PROBLEM TO BE SOLVED: To improve the energy resolution by providing a detection part with a superconductor to which radiation is incident and a plurality of superconducting tunnel junction parts electrically connected, and providing a signal processing part, the junction parts being arranged at the positions surrounding a specified region on one surface of the superconductor. SOLUTION: A detection part 1 has four tunnel junction parts 108 arranged to include a part of each side of square on the upper surface of radiation absorbing layers 101, 101 formed of Nb laminated on the upper surfaces of substrates 100, 100 formed of Si. Each of the parts 108 is formed in the shape of a band by sequancially laminating a lower vicinity superconducting layer 102 made of Al, a tunnel insulation film 103 made of AlOx and an upper superconducting electrode 104 made of Nb. To the electrode 104 and the layer 102 upper and lower wiring 106, 107 made of Nb respectively are connected, and on the outer circumference of the part 108 an insulation film 105 for wiring is formed.

36. 发明专利

JPH098365A SUPERCONDUCTING CONTACT 失效
公开(公告)号：JPH098365A
公开(公告)日：1997-01-10
申请号：JP14998195
申请日：1995-06-16
申请人： HITACHI LTD
发明人： KOMINAMI SHINYA , MITA REEKO
IPC分类号： H01L39/00
摘要： PURPOSE: To increase the superconducting critical current flowing through a contact part without increasing the planar dimensions by employing a protruding or recessed structure at least partially on the contacting faces of two or more wirings or thin films of superconductor. CONSTITUTION: After depositing silicon dioxide 2 on a silicon substrate 1 by high frequency magnetron sputtering employing argon gas, niobium is deposited by 500nm by DC magnetron sputtering employing argon gas. It is then micromachined by reactive ion etching using CF4 gas thus forming a superconducting interconnection of Nb having line width of 1.5μm. The interconnection is subjected again to reactive ion etching by 250nm deep in the direction of thickness to form an irregular contact face 3 thus obtaining a lower layer superconducting interconnection 4 of Nb including the contact face 3. A protrusion in the center of contact face 3 has width of 0.5μm.

37. 发明专利

JPH07142776A PATTERN FORMATION 失效
公开(公告)号：JPH07142776A
公开(公告)日：1995-06-02
申请号：JP28640693
申请日：1993-11-16
申请人： HITACHI LTD
发明人： YAMADA KOJI , KOMINAMI SHINYA , MITA REEKO
IPC分类号： H01L39/24
摘要： PURPOSE:To prevent narrow part of the corner end of wiring pattern by providing a square groove at the predetermined position on a substrate, thereafter laminating a metal film and a resist film on the entire part, inserting the corner end part of photomask into the groove to form a resist pattern and thereafter processing a metal film pattern and removing resist on such metal film pattern. CONSTITUTION:A square groove 12 having tapered angle is formed at two predetermined locations on a substrate 11. Next, Nb film 13 is deposited on the substrate 11 and a resist film 14 is formed on it. Thereafter, a corner end of the photomask is inserted into the groove 12 by mask alignment and pattern transfer is performed. Moreover, after the transfer, a resist pattern 14' to be deloped is formed. Etching is carried out using the resist pattern 14' as a mask to pattern the Nb film 13 and the Nb film pattern 13' is formed by removing the resist pattern 14'. Accordingly, connecting area at the wiring pattern connecting portion can be formed as it is designed.

38. 发明专利

JPH0783995A SEMICONDUCTOR INSPECTION FAILURE DIAGNOSTIC DEVICE AND INSPECTION METHOD 失效
公开(公告)号：JPH0783995A
公开(公告)日：1995-03-31
申请号：JP22987093
申请日：1993-09-16
申请人： HITACHI LTD
发明人： NAKAHARA KOJI , OKABE HIROSHI , KOMINAMI SHINYA , NISHINO JUICHI
IPC分类号： G01R31/26 , G01R33/00 , G01R33/12 , H01L21/66 , H01L39/22
摘要： PURPOSE:To non-destructively judge IC and simultaneously diagnose a plurality of circuits, particularly, a plurality of memory cells even if IC is provided after failure reasons such as a failure part of IC, a broken wire, a short circuit and leakage are packaged in a semiconductor inspection failure diagnostic device. CONSTITUTION:A magnetic flux detector 102, a current analyzer 103 and a pattern discriminator 104 are included. Current allowed to flow in IC 101 is detected with a magnetic flux of a magnetic flux detector 102 and how current is allowed to flow is analyzed with a current analyzer 103. A design pattern of IC 101 is stored in a pattern discriminator 104, and judgement is performed on whether operation of IC 101 is normal from the information of the current analyzer 103.

39. 发明专利

JPH0637365A CONNECTING STRUCTURE FOR SUPERCONDUCTING WIRING 失效
公开(公告)号：JPH0637365A
公开(公告)日：1994-02-10
申请号：JP19188792
申请日：1992-07-20
申请人： HITACHI LTD
发明人： YAMADA KOJI , KOMINAMI SHINYA , TAKAHASHI SACHIKO
IPC分类号： H01L39/24
摘要： PURPOSE:To realize a superconducting connection of an Nb/Nb connection and to reduce a connecting area and a wiring pitch by forming a connecting member of a superconducting wiring of one layer of a lower electrode in the wiring for connecting superconducting devices therebetween on a board. CONSTITUTION:A board 11 is coated with a three-layer film of a lower electrode 12 made of an Nb film, an AlOx layer 13 to become a tunnel barrier layer and an upper electrode 14 made of an Nb film by a sputtering method. Then, after an inductor pattern B having first superconducting wirings A-A' and a connecting part is formed, an insulating film 15 is provided, a connecting part of a first superconducting wiring is dry etched to remove the film 14 and the layer 13, a surface of the electrode 12 is exposed, and a steplike sectional shape is formed at the connecting part of the wirings A-A'. Thereafter, after the connecting part is surface-cleaned, an Nb film 17 is formed on the entire surface by sputtering, and eventually the wiring 17 and a connecting wiring electrode 17' are simultaneously pattern-formed by dry etching.

40. 发明专利

JPH04186886A VERTICAL TYPE MAGNETIC FLUX COUPLING JOSEPHSON DEVICE 失效
公开(公告)号：JPH04186886A
公开(公告)日：1992-07-03
申请号：JP31401190
申请日：1990-11-21
申请人： HITACHI LTD
发明人： HATANO YUJI , YAMADA KOJI , MIYAMOTO NOBUO , KOMINAMI SHINYA , HIRANO MIKIO
IPC分类号： H01L39/22
摘要： PURPOSE:To make it possible to obtain a vertical type magnetic flux coupling Josephson device with three-layer superconducting films by installing a groove around a ground plane under the device and isolating/insulating the plane in island shape and connecting a wiring with the both ends of the island-shaped ground plane over a junction lower part electrode and passing control input current by way of said wiring. CONSTITUTION:A groove 111 is installed around a ground plane under this device so that the plane may be isolated and insulated, thereby forming three long island-shaped parts 112, 113, and 114. Holes 115 and 116 of a first insulation layer are installed to both ends of the island-shaped ground plane portion where first wiring layers 105 and 106 are connected with both ends of the island-shaped ground plane part 112. First wiring layers 106 and 109 are connected with both ends of the island-shaped ground plane portion 113 while the first wiring layers 107 and 110 are connected with both ends of the island-shaped ground plane part 114. Then, the wiring is connected with an input signal line over the first wiring layer, thereby providing control input to a vertical type magnetic flux coupling Josephson device.

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