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    • 33. 发明专利
    • Method for treating waste water containing tetraalkylammonium hydroxide
    • 用于处理含有四氢氨基氢氧化镁的废水的方法
    • JP2003340449A
    • 2003-12-02
    • JP2002152352
    • 2002-05-27
    • Babcock Hitachi Kkバブコック日立株式会社
    • YAMADA RIKUOSATO KAZUNORITANIGUCHI YUKIHISAMIZOGUCHI TADAAKI
    • C02F1/42B01D9/02B01J49/00C02F1/58
    • PROBLEM TO BE SOLVED: To provide a method for treating waste water containing a tetraalkylammonium hydroxide (TMAH) by which waste water containing the tetraalkylammonium hydroxide and containing a photoresist is efficiently treated and the TMAH can be regenerated and recovered. SOLUTION: The method for adsorbing and removing tetraalkylammonium cations by using a cation exchange resin and for recovering the cations as salts from waste water containing the photoresist and the tetraalkylammonium hydroxide includes the following processes: the photoresist is preliminarily removed while keeping the waste water near neutral to weak acid; then the waste liquid is passed through the cation exchange resin to adsorb the tetraalkylammonium cations; the cation exchange resin is regenerated by an acid, while the tetraalkylammonium salts are recovered in a regenerating liquid; an aqueous solution of perchloric acid is added to the liquid to crystallize the perchlorate of tetraalkylammonium to be recovered. COPYRIGHT: (C)2004,JPO
    • 要解决的问题:提供一种处理含有四烷基氢氧化铵(TMAH)的废水的方法,通过该方法可以有效地处理含有四烷基氢氧化铵的废水并含有光致抗蚀剂,并且可以再生和回收TMAH。 解决方案:通过使用阳离子交换树脂吸附和除去四烷基铵阳离子并从含有光致抗蚀剂和四烷基氢氧化铵的废水中回收阳离子的方法包括以下过程:预先除去光致抗蚀剂,同时保持废物 水接近中性至弱酸; 然后废液通过阳离子交换树脂吸附四烷基铵阳离子; 阳离子交换树脂由酸再生,而四烷基铵盐在再生液中回收; 将高氯酸水溶液加入到液体中以结晶待回收的四烷基铵的高氯酸盐。 版权所有(C)2004,JPO