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    • 34. 发明专利
    • AUTOMATIC VENDING MACHINE
    • JPH10247282A
    • 1998-09-14
    • JP5027797
    • 1997-03-05
    • SHIBAURA ENG WORKS LTD
    • OSAWA MASATO
    • G07F9/02G07F11/58
    • PROBLEM TO BE SOLVED: To provide an automatic vending machine which can indicate the display of 'sold-out' only when the merchandise in a column is completely sold out. SOLUTION: Rack boards 36 which can hold the merchandise in a horizontal state are suspended in a right/left endless chain 32 at prescribed intervals in a vertical direction. A light-emitting part 90 which radiates light beams is provided above or below the vertical columns of the rack boards 36 and a light- receiving sensor 90 outputting a merchandise 1 sold-out command with the input of the light beam is provided on the other side. All the rack board 36 are provided with light beam passing parts constituted of holes or notches so that the light beams can pass through them in a thickness direction. When the merchandise 1 is loaded on the rack boards 36, the light beams are interrupted by the merchandise 1. When the merchandise 1 does not exist on any rack board 36, the light beams by the light-emitting part 90 pass through the light beam passing parts of the respective rack boards 36, reach the light- reception part and the sold-out of the merchandise 1 is displayed.
    • 35. 发明专利
    • METHOD AND DEVICE FOR WET ETCHING TREATMENT
    • JPH10242114A
    • 1998-09-11
    • JP4554097
    • 1997-02-28
    • SHIBAURA ENG WORKS LTD
    • ISO AKINORI
    • C23F1/08H01L21/306
    • PROBLEM TO BE SOLVED: To provide a method by which wet etching treatment can be performed on a substrate in such a state that particles hardly adhere to the lower surface of the substrate even when the substrate has a large area. SOLUTION: In a method for wet etching treatment, the upper surface 18a of a rotationally driven substrate 18 is etched by injecting an etchant upon the surface 18a. When the etchant is injected upon the upper surface 18a, the etchant is simultaneously injected upon the lower surface 18b of the substrate 18. Since an etchant flow is generated on the lower surface 18b from the etchant injected upon the surface 18b, the creeping of the etchant to the lower surface 18b from the end section of the substrate 18 can be prevented even when the substrate 18 is rotationally driven. Therefore, the particles contained in the etchant hardly adhere to the lower surface and the substrate 18 can be treated excellently even when the substrate 18 has a large area. In addition, the adhesion of particles to the lower surface of the substrate 18 can also be prevented by utilizing the so-called ξ-potential.
    • 36. 发明专利
    • VACUUM APPARATUS
    • JPH10239204A
    • 1998-09-11
    • JP3792697
    • 1997-02-21
    • SHIBAURA ENG WORKS LTD
    • WATANABE KANAME
    • G01M3/26
    • PROBLEM TO BE SOLVED: To provide a vacuum apparatus by which the leak of a vacuum chamber can be detected even under a comparatively high pressure condition by a method wherein an evacuation line before a main valve and the vacuum chamber are connected via a differential pressure gage and an isolation valve is installed at the evacuation line between the vacuum chamber and the main valve. SOLUTION: An isolation valve 12, a differential-pressure-gage isolation valve 17 and a main valve 13 are opened, a vacuum evacuation operation is performed for a definite time by a vacuum evacuation pump 14, and the isolation valve 12 and the main valve 13 are then closed simultaneously. While a mass-flow controller MFC is used, also the valves are closed. A pressure by a differential pressure gage 18 at this time is designated as P1 . Thereby, a pressure between the isolation valve 12 and the main valve 13 is maintained to be always constant, and also a pressure inside a vacuum chamber 11 is maintained. However, when leak is generated in the vacuum camber 11 with the passage of time, a pressure between the vacuum chamber 11 and the differential pressure gate 18 is raised, and a difference is generated in the pressure between the isolation valve 12 and main valve 13 and in the pressure inside the vacuum tank 11 is generated. A pressure by the differential pressure gage 18 after the passage of a definite time is designated as P2 , a discharge gas amount is calculated by a relational expression, it is subtracted from a measured result, and the leak of the vacuum chamber 11 can be detected on the basis of the value.
    • 37. 发明专利
    • TRANSMISSION
    • JPH10238600A
    • 1998-09-08
    • JP4574097
    • 1997-02-28
    • SHIBAURA ENG WORKS LTD
    • HANAZAWA TAKAO
    • B25F5/00F16H1/06
    • PROBLEM TO BE SOLVED: To allow an easy assembly work by forming a body via the combination of a housing case and the lid thereof, and clamping a ball bearing between the bearing presser member of the lid and the housing case. SOLUTION: A ball bearing 6 is forced into a spindle 47, and then a parallel key 1 is press fitted into the spindle 47. Thereafter, the spindle 47 is inserted in the hole of a bearing presser member 3, and a helical bear 8 is press fitted into the spindle 47. Then, a ball bearing 10 is press fitted into the forward end of the spindle 47, and a parallel key 16 is inserted in a pinion 15. A helical gear 17 is then press fitted into the pinion 15. In addition, ball bearings 14 and 5 are press fitted into both ends of the pinion 15, and then the assembled spindle 47 and the assembled pinion 15 are mounted on a bearing bracket 19. Thereafter, grease is applied to the spindle 47 and the pinion 13. Finally, a gear case 13 is secured with four screws 11 in alignment with the assembled bearing bracket 19. According to this construction, an assembly work can be easily executed.
    • 39. 发明专利
    • TICKET ISSUING MACHINE WITH IMAGE DISPLAY DEVICE
    • JPH10232955A
    • 1998-09-02
    • JP3369697
    • 1997-02-18
    • SHIBAURA ENG WORKS LTD
    • ASANO MASAKI
    • G07B1/00G06F3/048G06F3/14G07B5/00
    • PROBLEM TO BE SOLVED: To make the use of only a part on the front surface side of the ticket issuing machine be sufficient as a space for image display by calling and displaying photograph images or video image for indicating a merchandize or a service. SOLUTION: In this ticket issuing machine 1, a display 2 is arranged at a part of a front surface and a hard disk drive 21, a merchandize selection button 11, a ticket issuing part 3 and a cash processing part 4 are directly connected to a built-in personal computer main body 20 and controlled. Then, the price data of the respective merchandizes and respective produce selection buttons are related and stored in the hard disk 21. The data on the hard disk 21 are called along with an operation program and developed on the memory 22 when a built-in personal computer main body 20 is activated. In the case that the merchandize selection button 11 is pressured, the data of the price and the images relating to the pressed merchandize selection button 11 are selected from the data on the memory 22 and supplied to the display of the display 2.