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    • 31. 发明专利
    • Method of treating substrate and chemical used therefor
    • 处理基材及其所用化学品的方法
    • JP2005159294A
    • 2005-06-16
    • JP2004230717
    • 2004-08-06
    • Nec Kagoshima Ltd鹿児島日本電気株式会社
    • KIDO SHUSAKU
    • G02F1/1333G03F7/20G03F7/26H01L21/00H01L21/027H01L21/312H01L21/32H01L51/40
    • G03F7/425G02F1/1303H01L21/0273H01L21/32139
    • PROBLEM TO BE SOLVED: To provide a method of treating substrate by which a process of working an organic film pattern into a new pattern form can be performed smoothly by performing second developing treatment. SOLUTION: In the method of treating substrate, pretreatment performed for removing a damaged layer formed on the surface of the organic film pattern and the second developing treatment performed for contracting at least part of the organic film pattern or removing part of the pattern are performed in this order. Since the developing treatment is performed after the damaged layer is removed by the pretreatment, the second developing treatment can be performed smoothly and highly uniformly. Therefore, the working of a base film into a pattern performed after the developing treatment can be performed highly uniformly. COPYRIGHT: (C)2005,JPO&NCIPI
    • 要解决的问题:提供一种处理基板的方法,通过该方法可以通过进行第二显影处理平滑地执行将有机膜图案加工成新图案形式的工艺。 解决方案:在处理基板的方法中,进行用于除去形成在有机膜图案的表面上的损伤层的预处理和用于收缩至少部分有机膜图案或去除图案的一部分的第二显影处理 按此顺序执行。 由于在通过预处理去除损伤层之后进行显影处理,所以可以平滑且高度均匀地进行第二显影处理。 因此,可以高度均匀地进行基膜的显影处理后进行的图案的加工。 版权所有(C)2005,JPO&NCIPI
    • 32. 发明专利
    • Method for manufacturing liquid crystal display device
    • JP2004258091A
    • 2004-09-16
    • JP2003045739
    • 2003-02-24
    • Nec Kagoshima Ltd鹿児島日本電気株式会社
    • JINNO TAKASHI
    • G02F1/13G02F1/1341
    • PROBLEM TO BE SOLVED: To provide a method for manufacturing a liquid crystal display device which uses a mask to prevent scattering of a liquid crystal in evacuating substrates with the liquid crystal material applied thereto in a defoaming step of the liquid crystal material in a laminating method via liquid crystal dropping.
      SOLUTION: The liquid crystal display device is manufactured by a step to place and hold the substrate with the liquid crystal material held inside a sealant on a supporting plate in a chamber, a step to place and hold the mask to prevent scattering of the liquid crystal with a ring shaped side wall on the substrate by a member conveying mechanism so as to cover an inner side face and a top face of the sealant, a step to defoam the liquid crystal material by evacuating the inside of the chamber, a step to remove the mask to prevent scattering of the liquid crystal from the substrate by the member conveying mechanism, a step to dispose another substrate on the sealant of the substrate so as to be opposite to the substrate by the member conveying mechanism and a step to stick the another substrate and the substrate to each other by releasing the inside of the chamber into the atmosphere.
      COPYRIGHT: (C)2004,JPO&NCIPI
    • 34. 发明专利
    • Optical film fitting apparatus and optical film fitting method using it
    • 光学贴膜装置和使用它的光学胶片贴装方法
    • JP2004198950A
    • 2004-07-15
    • JP2002370132
    • 2002-12-20
    • Nec Kagoshima Ltd鹿児島日本電気株式会社
    • TAKAHASHI ATSUSHI
    • G02B5/30G02F1/1335
    • PROBLEM TO BE SOLVED: To provide a polarizing film fitting apparatus which realizes satisfactory operation efficiency and a high fitting level and produces no waste, and to provide a polarizing film fitting method using it. SOLUTION: The optical film fitting apparatus which fits polarizing films 2, 12 to a liquid crystal panel 6 uses the polarizing films 2, 12 having adhesive surfaces developing adhesive force by heating. A temporary fitting unit 60 has a function of temporarily tacking the polarizing films 2, 12 to the liquid crystal panel 6 for every one panel. A main fitting unit 50 presses/heats a plurality of panels, sticks the polarizing films 2, 12 and deaerates the panels concurrently. Since there is no separator on the adhesive surface of the polarizing film, the failure of glue lacking in the circumference occurring on the stripping of the separator is prevented and, at the same time, generation of a large amount of industrial waste including tapes for separator stripping and the separators is avoided. In addition, the deaeration between the adhesive surface and the liquid crystal panel which has been performed by using an autoclave hitherto can be performed concurrently with the sticking in the main fitting unit. COPYRIGHT: (C)2004,JPO&NCIPI
    • 要解决的问题:提供一种实现令人满意的操作效率和高配合水平并且不产生浪费的偏光膜装配装置,并提供使用它的偏光膜配合方法。 解决方案:将偏振膜2,12配合到液晶面板6的光学膜装配装置使用具有通过加热而发生粘合力的粘合剂表面的偏振膜2,12。 临时装配单元60具有将每个面板的偏振膜2,12临时固定到液晶面板6的功能。 主配件单元50按压/加热多个面板,粘贴偏振膜2,12并同时对面板进行脱气。 由于在偏光膜的粘合剂表面上没有隔板,因此防止了在隔膜剥离时发生的周边胶水的失效,同时产生大量工业废弃物,包括用于隔膜的带 剥离和避免分离器。 此外,通过使用高压釜进行的粘合剂表面和液晶面板之间的脱气可以与主配件单元中的粘着同时进行。 版权所有(C)2004,JPO&NCIPI