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31. 发明专利

JP2006053028A Probe scanning method of scanning probe microscope 审中-公开
标题翻译：扫描探针显微镜探测扫描方法
公开(公告)号：JP2006053028A
公开(公告)日：2006-02-23
申请号：JP2004234499
申请日：2004-08-11
申请人： Hitachi Kenki Fine Tech Co Ltd , 日立建機ファインテック株式会社
发明人： MORIMOTO TAKASHI , MURAYAMA TAKESHI , NAGANO YOSHIYUKI , KENBO YUKIO , SHINAKI TORU , KURODA HIROSHI , KUNITOMO YUICHI , KURENUMA TORU
IPC分类号： G01B21/30 , G01Q10/04 , G01Q10/06 , G01Q60/24
摘要： PROBLEM TO BE SOLVED: To provide a probe scanning method of a scanning probe microscope constituted so as to restrict the height of the difference in level due to the unevenness formed on the surface of a sample by the positional control in the height direction of a probe to shorten a scanning time and acquiring the data of the shape, size, dimension, position and the like of the hole or the like in the surface of the sample.
SOLUTION: In the prove scanning method of the scanning probe microscope for scanning the probe 15 along the surface 11a of the sample 11 and acquiring the data such as the uneven shape or the like of the surface of the sample, the lowest position of the probe is restricted to an arbitrary lower limit position not higher than the highest position on the basis of the highest position by controlling the height position of the probe within the scanning range of the probe on the surface of the probe.
COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供扫描探针显微镜的探针扫描方法，其构造为通过在高度方向上的位置控制来限制由于形成在样品表面上的不平坦度引起的水平差的高度的探针以缩短扫描时间并获取样品表面中的孔等的形状，尺寸，尺寸，位置等的数据。解决方案：在扫描探针显微镜的证明扫描方法中，沿着样品11的表面11a扫描探针15并获取样品表面的不均匀形状等数据，最低位置通过将探头的高度位置控制在探头表面的扫描范围内，将探头限制在不高于基于最高位置的最高位置的任意下限位置。版权所有（C）2006，JPO＆NCIPI

32. 发明专利

JP2005195548A Scanning probe microscope 有权
标题翻译：扫描探针显微镜
公开(公告)号：JP2005195548A
公开(公告)日：2005-07-21
申请号：JP2004004445
申请日：2004-01-09
申请人： Hitachi Kenki Fine Tech Co Ltd , 日立建機ファインテック株式会社
发明人： KURODA HIROSHI , KURENUMA TORU , YANAGIMOTO HIROAKI , KUNITOMO YUICHI , MORIMOTO TAKASHI , MINOMOTO YASUSHI
IPC分类号： G01Q30/02 , G01Q30/20 , G01Q60/24 , G01Q90/00 , G01N13/10 , G01N13/16
摘要： PROBLEM TO BE SOLVED: To provide a scanning probe microscope capable of stable and highly reliable operation in inspections on wafers etc. without operation halts in an inspection apparatus or any damage to a probe even if samples are charged in an inline automatic inspection process of wafers etc.
SOLUTION: The scanning probe microscope is provided with a measuring unit 1 provided with a probe 20 at a tip of a cantilever 21 for acquiring information on sample surfaces by bringing the probe close to the samples 12, destaticizing devices (301 and 302) for removing electrostatic charges of the samples, an electrostatically charged state determining part 311 for detecting the state of electrostatic charges of the samples based on displacements of the cantilever, and an additional destaticizing control part 312 for additionally removing electricity in the case that the state of electrostatic charge of the samples exceeds a threshold value.
COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：提供一种扫描探针显微镜，其能够在检查设备中进行检查时能够稳定且高度可靠地进行检查，而不会在检查装置中停止操作或对探针造成任何损坏，即使样品在直列自动检查中进行充电晶片等的处理。解决方案：扫描探针显微镜设置有测量单元1，该测量单元1在悬臂21的尖端处设置有探针20，用于通过将探针靠近样品12来静电获取样品表面的信息用于去除样品的静电荷的装置（301和302），用于基于悬臂的位移检测样品的静电电荷状态的静电充电状态确定部311和用于另外去除电的额外去静电控制部312 样品的静电电荷状态超过阈值的情况。版权所有（C）2005，JPO＆NCIPI

33. 发明专利

JP2005069972A Method for controlling travel in probe in scanning probe microscope 审中-公开
标题翻译：用于扫描扫描显微镜中探测探测的方法
公开(公告)号：JP2005069972A
公开(公告)日：2005-03-17
申请号：JP2003302991
申请日：2003-08-27
申请人： Hitachi Kenki Fine Tech Co Ltd , 日立建機ファインテック株式会社
发明人： KURENUMA TORU , YANAGIMOTO HIROAKI , KURODA HIROSHI , MINOMOTO YASUSHI , MIWA SHIGERU , MURAYAMA TAKESHI , KENBO YUKIO , KUNITOMO YUICHI , HIROKI TAKENORI , NAGANO YOSHIYUKI , MORIMOTO TAKASHI
IPC分类号： G01B21/30 , G01Q10/04 , G01Q10/06 , G01Q30/02 , G01Q60/24 , G01N13/16 , G01N13/10
CPC分类号： G01Q10/06 , G01Q30/06 , Y10T29/49828
摘要： PROBLEM TO BE SOLVED: To provide a method for controlling the travel of a probe in a scanning probe microscope for easily controlling the scanning travel of the probe on a sample surface, while maintaining high measurement precision, when measuring a part, or the like, having an inclination when measuring irregularities on the sample surface. SOLUTION: The method for controlling the travel of the probe in the scanning probe microscope comprises respective slight movement mechanisms 23, 29, 30 of X, Y, Z for relatively changing the positions of the probe and the sample, such as a cantilever 21 having the probe 20 that faces the sample 12, and an optical lever type optical detector for measuring atomic force, or the like generated between the probe and the sample, when the probe scans the surface of the sample. The method is applied to the scanning type probe microscope for measuring the sample surface by scanning the sample surface by the slight movement mechanism; while physical quantities are maintained constant by a measurement section, and has a feature for changing the approach direction of the probe, when the traveling direction for bringing the probe closer to the sample surface differs from a reaction direction, when the probe comes into contact with the sample surface at least by a set value. COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：提供一种用于在扫描探针显微镜中控制探针的行程的方法，用于容易地控制探针在样品表面上的扫描行程，同时保持高测量精度，当测量零件时，或在测量样品表面上的不规则性时具有倾斜度。解决方案：用于控制探针在扫描探针显微镜中的移动的方法包括用于相对地改变探针和样品的位置的X，Y，Z的各个轻微移动机构23,29,30，例如当探头扫描样品表面时，探头20面向样品12的悬臂21和用于测量探针与样品之间产生的原子力的光学杆式光学检测器。该方法应用于扫描型探针显微镜，用于通过轻微移动机构扫描样品表面来测量样品表面; 而当物理量由测量部保持恒定时，当探头更靠近样品表面的行进方向与反作用方向不同时，具有用于改变探针的接近方向的特征，当探针接触时样品表面至少设定值。版权所有（C）2005，JPO＆NCIPI

34. 发明专利

JP2005043108A Specific pattern detecting method of scanning probe microscope 审中-公开
标题翻译：扫描探针显微镜的特定图案检测方法
公开(公告)号：JP2005043108A
公开(公告)日：2005-02-17
申请号：JP2003200678
申请日：2003-07-23
申请人： Hitachi Kenki Fine Tech Co Ltd , 日立建機ファインテック株式会社
发明人： NAGANO YOSHIYUKI , MORIMOTO TAKASHI , SHINAKI TORU , KENBO YUKIO , KUNITOMO YUICHI , HIROKI TAKENORI , KURENUMA TORU , YANAGIMOTO HIROAKI , KURODA HIROSHI , MIWA SHIGERU , MURAYAMA TAKESHI
IPC分类号： G01B21/30 , G01Q10/02 , G01Q10/04 , G01Q10/06 , G01Q30/04 , H01L21/66 , G01N13/10
摘要： PROBLEM TO BE SOLVED: To provide a scanning probe microscope capable of detecting a specific pattern even in a case that a plurality of the same patterns are arranged on a sample and corresponding even to the detection of a specific pattern of a shape not having two orthogonal edges, for example, the shape of a round bottom hole or the like.
SOLUTION: The specific pattern formed on the surface of the sample is detected by the scanning probe microscope equipped with a probe part, a fine adjustment mechanism for finely adjusting the position of a probe, a coarse adjustment mechanism for allowing the probe to move, approach and retreat with respect to the sample and a measuring part for measuring the physical quantity produced between the probe and the sample. When the region, wherein patterns are arranged cyclically, of the surface of the sample is measured by the measuring part by allowing the probe to scan by the fine adjustment mechanism or the coarse adjustment mechanism, scanning is performed at a first pitch until the patterns are found out or scanning is performed at a second pitch after the patterns are found out to measure the region of the patterns and the specific pattern is detected from a plurality of the patterns in the region.
COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：即使在多个相同的图案被布置在样本上的情况下也能够提供能够检测特定图案的扫描探针显微镜，甚至对于甚至不检测形状的特定图案的图案也是如此具有两个正交边缘，例如圆底孔等的形状。解决方案：通过配有探针部分的扫描探针显微镜，用于精细调节探针位置的微调机构，用于使探头接近的微调机构，检测在样品表面形成的特定图案相对于样品移动，接近和退避，以及用于测量探针和样品之间产生的物理量的测量部件。当通过允许探针通过微调机构或粗调机构扫描测量部分来测量样品表面的图案周期性区域时，以第一间距进行扫描，直到图案为在发现图案以测量图案的区域并且从该区域中的多个图案检测到特定图案之后，以第二间距执行发现或扫描。版权所有（C）2005，JPO＆NCIPI

35. 发明专利

JP2005043107A Ultrasonic image inspection device 审中-公开
标题翻译：超声波图像检测装置
公开(公告)号：JP2005043107A
公开(公告)日：2005-02-17
申请号：JP2003200677
申请日：2003-07-23
申请人： Hitachi Kenki Fine Tech Co Ltd , 日立建機ファインテック株式会社
发明人： TAKEUCHI TAKESHI
IPC分类号： G01N29/04 , G01N29/28
CPC分类号： G01N29/043 , G01N2291/2697
摘要： PROBLEM TO BE SOLVED: To provide an ultrasonic image inspection device suitable for measurement performed in large quantities since a specimen disposed in a water tank is surely immobilized in the water tank without causing it to contact with a medium such as water.
SOLUTION: This ultrasonic image inspection device is structured so that an electric signal prepared by a flaw detector circuit 22 is converted into an ultrasonic wave by an ultrasonic probe 13, the ultrasonic wave is inlet into the specimen 20 via a liquid medium, and an ultrasonic reflection echo returning from within the specimen 20 is converted into an electric signal by the ultrasonic probe 13 to image the interior of the specimen 20. The specimen 20 is fixed to a specimen holding member 19 for conveyance. The holding member 19 conveyed into the device is placed in a water tank 17 stored with water 18 to keep the specimen 20 from contacting with the liquid medium. An ultrasonic wave is given via water from the outside of the holding member 19 to perform ultrasonic inspection.
COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：提供适合大量测量的超声波图像检查装置，因为设置在水箱中的试样可靠地固定在水箱中而不会使其与诸如水的介质接触。解决方案：该超声波图像检查装置被构造成使得由探伤器电路22准备的电信号通过超声波探头13转换成超声波，超声波通过液体介质入射到检体20中，并且通过超声波探头13将从试样20内返回的超声波反射回波转换成电信号，对试样20的内部进行成像。将试样20固定在试样保持构件19上进行输送。输送到装置中的保持构件19被放置在与水18一起储存的水箱17中，以使样本20不与液体介质接触。通过水从保持构件19的外部给出超声波，以进行超声波检查。版权所有（C）2005，JPO＆NCIPI

36. 发明专利

JP2004077342A Ultrasonic image inspection device and specimen holder case therefor 有权
公开(公告)号：JP2004077342A
公开(公告)日：2004-03-11
申请号：JP2002239632
申请日：2002-08-20
申请人： Hitachi Constr Mach Co Ltd , Hitachi Kenki Fine Tech Co Ltd , 日立建機ファインテック株式会社 , 日立建機株式会社
发明人： TAKEUCHI TAKESHI , YAMAMOTO HIROSHI , KAWAKAMI NAOYA
IPC分类号： G01N29/04 , G01N29/06
摘要： PROBLEM TO BE SOLVED: To provide an ultrasonic image inspection device and a specimen holder case therefor, enabling hundred-percent specimen inspection without causing a specimen disposed in a water tank to contact with water, and ensuring the adhesion of a specimen measurement face to an elastic film, thereby preventing the elastic film from being damaged.
SOLUTION: This specimen holder case 19 is equipped with a case body 31 with specimens disposed in its internal space, a lid member 33 mounted on the case body in an openable/closable manner and having an opening part formed therein, a polymer film 34 provided between the case body and the lid member, an exhaust hole 37, and a cover member 41 for covering the periphery of a specimen measurement face in conformity to the shape of the specimens 20. As to the holder case, in measurement, a specimen is disposed in the case body, the case body is closed with the lid member and evacuated by a vacuum pump 40 via the exhaust hole, and the polymer film is fast stuck to the measurement faces of the specimen.
COPYRIGHT: (C)2004,JPO

37. 发明专利

JP2004069656A Measuring method for scanning type probe microscope 有权
公开(公告)号：JP2004069656A
公开(公告)日：2004-03-04
申请号：JP2002233190
申请日：2002-08-09
申请人： Hitachi Kenki Fine Tech Co Ltd , 日立建機ファインテック株式会社
发明人： MURAYAMA TAKESHI , KURODA HIROSHI , KENBO YUKIO , KURENUMA TORU
IPC分类号： G01B21/30 , G01Q10/00 , G01Q10/02 , G01Q10/04 , G01Q30/04 , G01Q60/24 , G01N13/10
摘要： PROBLEM TO BE SOLVED: To easily acquire height information with respect to a reference point or reference face outside a measuring range to facilitate comparison of a height of a measured data with the reference point or the like, when the measuring range on a sample surface is measured.
SOLUTION: This method is applied for a scanning type probe microscope having a measuring part for scanning a sample 12 by a probe 25 to measure a physical quantity about the sample surface, and constituted to be provided with an XY fine moving mechanism 24 for moving the probe finely, and an XY stage 51 for moving the sample roughly. In the method, the height with respect to the reference point existing outside the measuring range is measured to acquire the measured data in the measuring range, when the measuring range on the sample surface is measured.
COPYRIGHT: (C)2004,JPO

38. 发明专利

JP2003028772A Scanning probe microscope and its measurement setting method 审中-公开
标题翻译：扫描探针显微镜及其测量设置方法
公开(公告)号：JP2003028772A
公开(公告)日：2003-01-29
申请号：JP2001212457
申请日：2001-07-12
申请人： Hitachi Kenki Fine Tech Co Ltd , 日立建機ファインテック株式会社
发明人： MURAYAMA TAKESHI , KENBO YUKIO , KURODA HIROSHI
IPC分类号： G01B9/04 , G01B21/30 , G01Q10/02 , G01Q10/04 , G01Q30/02 , G01Q60/24 , G01Q60/38 , G01N13/10 , G01N13/16 , G12B21/08
CPC分类号： G01Q30/025 , G01Q10/06
摘要： PROBLEM TO BE SOLVED: To provide a scanning probe microscope and its measurement setting method capable of specifying a measuring spot on the sample surface highly accurately at high speed, and aligning the spot with a probe, to thereby heighten measurement efficiency by an atomic force microscope or the like.
SOLUTION: This microscope is equipped with a cantilever 21 having the probe 20, a Z-slight movement mechanism for imparting height displacement of the probe to a sample 14, an XY-scanning mechanism for imparting relative displacement of the probe along the sample surface, a photodetector 22 for detecting the displacement quantity generated in the cantilever, and a control device 31 (controller 32) for keeping the interval between the probe and the sample constant by controlling operation of the Z-slight movement mechanism based on a detection signal outputted from the photodetector and a reference value, and simultaneously controlling operation of the XY-scanning mechanism, to thereby allow the probe to scan the sample surface. The microscope is also equipped with an optical microscope 17 for observing the measuring spot on the sample surface together with the cantilever, a camera 18 for generating image data from an observation image acquired by a second microscope, and transmitting the data to the control device, and a storage part 51 for storing the image data. The data are stored beforehand in the storage part 51 as a reference image used for final positioning.
COPYRIGHT: (C)2003,JPO
摘要翻译：要解决的问题：提供一种能够高精度地高精度地指定样品表面上的测量点的扫描探针显微镜及其测量设定方法，并且将该点与探针对准，从而通过原子力显微镜提高测量效率或类似物。解决方案：该显微镜配备有具有探头20的悬臂21，用于将探针的高度位移赋予样品14的Z轻微移动机构，用于使探针沿着样品表面的相对位移的XY扫描机构，用于检测在悬臂中产生的位移量的光电检测器22以及通过基于从所述悬臂梁输出的检测信号控制Z轻微移动机构的操作来保持探头和样品之间的间隔恒定的控制装置31（控制器32）光电检测器和参考值，并且同时控制XY扫描机构的操作，从而允许探针扫描样品表面。显微镜还配备有用于与悬臂一起观察样品表面上的测量点的光学显微镜17，用于从由第二显微镜获取的观察图像产生图像数据的照相机18，并将数据发送到控制装置，以及用于存储图像数据的存储部分51。该数据预先存储在存储部分51中作为用于最终定位的参考图像。

39. 发明专利

JP2010038856A Scanning probe microscope 审中-公开
标题翻译：扫描探针显微镜
公开(公告)号：JP2010038856A
公开(公告)日：2010-02-18
申请号：JP2008205235
申请日：2008-08-08
申请人： Hitachi Kenki Fine Tech Co Ltd , 日立建機ファインテック株式会社
发明人： BABA SHUICHI , WATANABE MASAHIRO , NAKADA TOSHIHIKO , KURENUMA TORU , MORIMOTO TAKASHI , SEKINO SATOSHI
IPC分类号： G01Q30/06
摘要： PROBLEM TO BE SOLVED: To solve the problem that a highly precise measurement result cannot be obtained owing to distortion of a measured image caused by drifting in measurement of a pattern shape and a pattern arrangement in nanometer order in the fields of semiconductor and storage having further increasing demands in the future.
SOLUTION: A previously selected reference pattern region is measured at a certain timing during measurement of a measurement region of sample characteristics with a scanning probe microscope, and the displacement of a probe is corrected while necessarily specifying the displacement in an XYZ axis from a measured image of the reference pattern. Further, the specified displacement and the temperature data in a measurement chamber are used to correct the distortion of the measurement image of the sample characteristics.
COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：解决的问题：为了解决由于在半导体领域中的图案形状和图案排列的测量中由漂移引起的测量图像的失真而导致的无法获得高精度测量结果的纳米级的问题，存储在未来有更进一步的需求。解决方案：在扫描探针显微镜测量样品特性的测量区域期间，在某个定时测量先前选择的参考图案区域，并且校正探针的位移，同时必须指定XYZ轴中的位移参考图案的测量图像。此外，使用测量室中的指定位移和温度数据来校正样品特性的测量图像的失真。版权所有（C）2010，JPO＆INPIT

40. 发明专利

JP2009250902A Probe unit for scanning probe microscope 审中-公开
标题翻译：用于扫描探针显微镜的探针单元
公开(公告)号：JP2009250902A
公开(公告)日：2009-10-29
申请号：JP2008101953
申请日：2008-04-09
申请人： Hitachi Kenki Fine Tech Co Ltd , 日立建機ファインテック株式会社
发明人： SEKINO SATOSHI , MORIMOTO TAKASHI
IPC分类号： B82Y15/00 , G01Q60/38 , G01Q70/12
摘要： PROBLEM TO BE SOLVED: To provide a probe unit for scanning probe microscopes suitable for uses for strictly managing the depth of a shape having a relatively large aperture size of 500 nm to a few microns, a depth of a few microns, and a high aspect ratio such as of a via hole connecting each wiring layer and managing the surface coarseness of a bottom part.
SOLUTION: The probe unit 10 for scanning probe microscopes includes a lever part 13 having one fixed end and the other free end and a probe 12 provided for the free end of the lever part. A carbon nanotube 14 is mounted from the tip part of the probe toward its connection part to the lever part 13 in such a way as to be along the probe and that the tip of the carbon nanotube 14 may protrude from the tip part of the probe 12.
COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：提供一种用于扫描探针显微镜的探针单元，其适用于严格管理具有500nm至几微米的较大孔径尺寸，几微米深度的形状的深度，以及高纵横比，例如连接每个布线层的通孔，并管理底部的表面粗糙度。解决方案：用于扫描探针显微镜的探针单元10包括具有一个固定端和另一个自由端的杆部分13，以及为杠杆部分的自由端设置的探针12。碳纳米管14从探针的前端朝向杆部13的连接部安装，使其沿着探针，并且碳纳米管14的前端部可以从探头的前端突出 12.版权所有（C）2010，JPO＆INPIT

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