会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 21. 发明专利
    • New compound, and method for producing the same
    • 新化合物及其生产方法
    • JP2013133281A
    • 2013-07-08
    • JP2011282950
    • 2011-12-26
    • Sumitomo Chemical Co Ltd住友化学株式会社
    • TAKEMOTO KAZUKI
    • C07C309/17C07C303/22
    • PROBLEM TO BE SOLVED: To provide a new compound having a photoacid generating group as a side chain, and to provide a method for producing the same.SOLUTION: The new compound represented by formula (I) is produced by reacting benzyl halide having an ethenyl group or 2-propenyl group on 4-position with a new sulfonic acid residue-containing compound. [In the formula, n represents 0 or 1; Uand Ueach independently represent an oxygen atom, a sulfur atom or -NR-; L represents a 1-20C divalent hydrocarbon group; a methylene group not adjacent to Uand Uin a hydrocarbon group may be replaced with an oxygen atom, a sulfur atom or the like; Yand Yeach independently represent a fluorine atom or a 1-4C perfluoroalkyl group; and Arepresents organic counter ion].
    • 要解决的问题:提供具有光酸产生基团作为侧链的新化合物,并提供其制备方法。溶液:由式(I)表示的新化合物通过使具有乙烯基的苄基卤反应 在4-位上具有新的含磺酸残基的化合物或2-丙烯基。 [式中,n表示0或1; Uand Ueach独立地表示氧原子,硫原子或-NR-; L表示1-20C的二价烃基; 与Uand不相邻的亚甲基烃基可以被氧原子,硫原子等取代; Yand Yeach独立地表示氟原子或1-4C全氟烷基; 和有机反离子]。
    • 28. 发明专利
    • Photoacid generator, method for producing the same, and resist composition containing the same
    • 光致发电机及其制造方法以及含有它们的电阻组合物
    • JP2011251961A
    • 2011-12-15
    • JP2011105329
    • 2011-05-10
    • Korea Kumho Petrochemical Co Ltdコリア クンホ ペトロケミカル カンパニー リミテッド
    • HAN JOON HEEKIM JIN-HOCHO SEUNG DUKSHIN DAE-HYEON
    • C07C309/17C07C303/22C07C381/12C09K3/00G03F7/004H01L21/027
    • PROBLEM TO BE SOLVED: To provide a photoacid generator, to provide a method for producing the same, and to provide a resist composition containing the same.SOLUTION: The photoacid generator is a compound represented by chemical formula (wherein, Y is either one group selected from the category consisting of 3C-30C cycloalkyl and 3C-30C cycloalkenyl; Qand Qare each independently a halogen atom; X is either one group selected from the category consisting of alkanediyl, alkenediyl, NR', S, O, CO, and combination thereof, wherein R' is either one group selected from the category consisting of H and alkyl; n is an integer of 0-5; and Ais an organic counterion). This photoacid generator, which is low in the diffusive speed of an acid generated under exposure and short in the acid's diffusive distance and has an appropriate acidity, therefore can improve LWR (line width roughness) characteristics and can suppress its own seeping into a solvent such as pure water used in a process.
    • 要解决的问题:提供光致酸发生剂,以提供其制备方法,并提供含有该光致酸产生剂的抗蚀剂组合物。 光解酸产生剂是由化学式表示的化合物(其中,Y为选自3C-30C环烷基和3C-30C环烯基的一个基团; Q 1 < / SB>和Q 2 各自独立地为卤素原子; X为选自烷二基,亚烯基,NR',S,O,CO和 其组合,其中R'为选自由H和烷基组成的类别中的一个基团; n为0-5的整数;并且A + 为有机抗衡离子)。 该光酸产生剂在曝光时产生的酸的扩散速度低,酸扩散距离短,具有适当的酸度,因此可以提高LWR(线宽粗糙度)特性,并且可以抑制其自身渗入溶剂中 作为一个过程中使用的纯水。 版权所有(C)2012,JPO&INPIT