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21. 发明专利

JPS6472426A MANUFACTURE OF SUPERCONDUCTING MATERIAL 失效
公开(公告)号：JPS6472426A
公开(公告)日：1989-03-17
申请号：JP22913887
申请日：1987-09-12
申请人： UNIV TOKAI , NIPPON KOKAN KK
发明人： TACHIKAWA KYOJI , KOSUGE SHIGECHIKA , ONO MORIAKI , NAKADA KIYOKAZU , SUZUKI TERUO , WATANABE ITARU
IPC分类号： C04B41/80 , C01G1/00 , C01G3/00 , C04B41/87 , H01B12/06 , H01B13/00 , H01L39/24
摘要： PURPOSE:To obtain a composite oxide superconducting coating film with a required thickness by forming a first layer of Cu or CuO on a basic material while a second layer of metal element oxide of superconducting material having no Cu on the first layer, and making mutual dispersion of the first and the second layer elements through thermal processing to this superconducting body. CONSTITUTION:A vapor deposition source 9 is arranged in a vacuum vessel 8 of a razor deposition device, on which source 9 a basic material 1 is arranged, as which material 1 Cu or CuO sintered body is used. The source 9 is irradiated with a razor beam 10 to form a first layer 2 of Cu or CuO by the particles vaporized and deposited on the surface of the material 1. Next, the source 9 is changed into a sintered body of metal element oxide composed of a superconducting material such as YBaOx having no Cu. Then beam 10 is applied to form a second layer 3 of superconducting metal element oxide. A superconducting element 11 having the first and second layers 2, 3 therein is thermally processed in an oxygen atmosphere to obtain a superconducting material 13 having a superconducting coat film.

22. 发明专利

JPS6443915A MANUFACTURE OF SUPERCONDUCTIVE MATERIAL 失效
公开(公告)号：JPS6443915A
公开(公告)日：1989-02-16
申请号：JP19828087
申请日：1987-08-10
申请人： UNIV TOKAI , NIPPON KOKAN KK
发明人： TACHIKAWA KYOJI , NAKADA KIYOKAZU , KOSUGE SHIGECHIKA , ONO MORIAKI , WATANABE ITARU
IPC分类号： C04B41/87 , C01G1/00 , C01G3/00 , C23C14/08 , C23C14/28 , H01B12/06 , H01B13/00 , H01L39/24
摘要： PURPOSE:To make it possible to stably form a dense superconductive film at a fast speed, and in required thickness by forming a film with particles evaporated arom a compound oxide sintered body made to adhere to the base material surface by a laser beam. CONSTITUTION:An evaporation source 2 is a compound oxide sintered body composed of elements constituted with superconductive substance insluding a CuxOy group. The inside of a pressure reduction chamber 1 is maintained at a given degree of vacuum by oxygen environment, a laser beam is irradiated from an unillustrated laser beam generation device via a laser transmission window 5 and condensed on the source 2 with a condensing lense 6, and the source 2 is rotated at a given peripheral speed. The surface of the source 2 to which the laser beam is irradiated is melted and evaporated, and evaporated particles adhere to the material 3 surface to form a film 9. This enables the dense film 9 having a given thickness of a compound oxide superconductive substance including the CuxOy group to be uniformly formed at a fast speed on the material 3 surface.

23. 发明专利

JPH02104678A PRODUCTION OF SUPERCONDUCTING MATERIAL 失效
公开(公告)号：JPH02104678A
公开(公告)日：1990-04-17
申请号：JP25541188
申请日：1988-10-11
申请人： UNIV TOKAI , NIPPON KOKAN KK
发明人： TACHIKAWA KYOJI , SHINPO YUKIO , ONO MORIAKI , KOSUGE SHIGECHIKA , SUZUKI TERUO
IPC分类号： C23C28/04
摘要： PURPOSE:To render superior superconducting characteristics to a low m.p. coating film by successively forming a high m.p. coating film and the low m.p. coating film each consisting of a rare earth element, Ba, Cu and O on the surface of a base material so that the reaction of the low m.p. coating film with the base material under heating is prevented by the high m.p. coating film. CONSTITUTION:A first coating film 2 of Ln2BaCuO5 (Ln is a rare earth element or Y) having a high m.p. is formed on the surface of a base material 1 such as an Ni alloy by plasma thermal spraying. A second coating film 3 of LnBa2 Cu3O7-x having a low m.p., is formed on the first coating film 2 by plasma thermal spraying. The base material 1 is then put in a heating furnace and heat-treated to form a superconducting phase in the second coating film 3. The diffusion of the elements of the base material 1 into the second coating film 3 is hindered by the first coating film 2 and superior superconducting characteristics are rendered to the first coating film 2.

24. 发明专利

JPH02103810A LAMINATED SUPERCONDUCTIVE FILM 失效
公开(公告)号：JPH02103810A
公开(公告)日：1990-04-16
申请号：JP25390888
申请日：1988-10-11
申请人： UNIV TOKAI , NIPPON KOKAN KK
发明人： TACHIKAWA KYOJI , SHINPO YUKIO , ONO MORIAKI , KABASAWA MAKOTO , KOSUGE SHIGECHIKA , SUZUKI TERUO
IPC分类号： C01G3/00 , C01G1/00 , H01B12/06 , H01L39/02
摘要： PURPOSE:To prevent deterioration in characteristic by depositing a first layer composed of Ln2BaCuOx, a second layer composed of a superconductive layer LnBa2Cu3O7-x, and a third layer composed of a mixture of BaCuO3, CuO, and LnBa2Cu3O7-x. CONSTITUTION:Y is adopted as Ln. A laminated superconductive film is formed by plasma flame coating, and after an hour of preliminary heating at 900 deg.C in oxygen, it is kept at 980 deg.C for 5 minutes, for a third layer 4 composed of a mixture of BaCuO2, CuO, and YBa2Cu3O7-x to be flame coated. After the slow cooling, the layer 4 is completely flame coated and its surface is covered up. Elemental analysis performed for the laminated superconductor shows that the Ni diffusion in a substrate 1 is stopped in a first layer 2 of Y2BaCuOx, and does not reach a second layer 3 composed of YB2Cu3O7-x. After having been left in an atmosphere of the humidity of 90%, and at the temperature of 80% for 5 months, superconductive characteristic of the film is not deteriorated at all. Ni is used as the substrate 1 as well as the other element such as Co and Cu.

25. 发明专利

JPH01172217A PRODUCTION OF SUPERCONDUCTING MATERIAL 失效
公开(公告)号：JPH01172217A
公开(公告)日：1989-07-07
申请号：JP33109487
申请日：1987-12-26
申请人： UNIV TOKAI , NIPPON KOKAN KK
发明人： TACHIKAWA KYOJI , KOSUGE SHIGECHIKA , ONO MORIAKI , NAKADA KIYOKAZU , SUZUKI TERUO , WATANABE ITARU
IPC分类号： H01L39/24 , C01G1/00 , C01G3/00 , H01B12/06 , H01B13/00
摘要： PURPOSE:To form a film having high superconducting characteristic on a substrate by blowing gaseous stimulated O2 to said substrate in a stage for depositing a compound oxide on the surface of the substrate by a laser vapor deposition process, and compensating the deficiency of oxygen in the film. CONSTITUTION:A substrate 3 (material to be subjected to vapor deposition) and a sintered body 2 (vapor deposition source) of a compound oxide contg. a CuxOy group, are disposed in an evacuated chamber 1. The sintered body 2 is evaporated by the irradiation with laser beam, and the evaporated material is deposited to the substrate 3. In this stage, the inside of the evacuated chamber 1 is held in O2 atmosphere, and excited gaseous oxygen is blown from an injector 11 toward the surface of the substrate 3.

26. 发明专利

JPS6472506A SUPERCONDUCTING COIL 失效
公开(公告)号：JPS6472506A
公开(公告)日：1989-03-17
申请号：JP22912987
申请日：1987-09-12
申请人： UNIV TOKAI , NIPPON KOKAN KK
发明人： TACHIKAWA KYOJI , KOSUGE SHIGECHIKA , ONO MORIAKI , NAKADA KIYOKAZU , SUZUKI TERUO , WATANABE ITARU
IPC分类号： H01F6/06
摘要： PURPOSE:To obtain a superconducting coil, which is not required for forming a wiring material from a superconductive material, by laminating a plurality of one-turn coils each comprising a ring-shaped substrate and a film, which is formed on the upper surface of the substrate so that a part of the film is cut and made of a composite oxide superconductive material including CuxOy. CONSTITUTION:This device is composed of a plurality of one-turn coils 3. Each coil 3 comprises a ring-shaped substrate 1 and a film 2 comprising a composite oxide superconductive material including a CuxOy base, which is formed on the upper surface of the substrate 1 so that a part of the film is cut. A starting edge 1A of the one-turn coil 3 is formed on the upper surface of the substrate 1. The terminating edge 1B of the one-turn coil 3 is formed on the lower surface of the substrate 1. A plurality of the one-turn coils 3 are laminated so that each terminating edge 1B is brought into contact with the starting edge 1A of the one-turn coil 3 closely. For example, the film 2 comprising the superconductive material of Y0.4Ba0.6O3-y is formed on the substrate 1 comprising Al2O3 as shown in the Figure by a plasma flame coating method and one-turn coil 3 is formed. A plurality of the films and the coils are laminated.

27. 发明专利

JPS6472425A MANUFACTURE OF SUPERCONDUCTING MATERIAL 失效
公开(公告)号：JPS6472425A
公开(公告)日：1989-03-17
申请号：JP22913787
申请日：1987-09-12
申请人： UNIV TOKAI , NIPPON KOKAN KK
发明人： TACHIKAWA KYOJI , KOSUGE SHIGECHIKA , ONO MORIAKI , NAKADA KIYOKAZU , SUZUKI TERUO , WATANABE ITARU
IPC分类号： C23C12/02 , C01G1/00 , C01G3/00 , C23C14/08 , C23C14/28 , H01B12/06 , H01B13/00 , H01L39/24
摘要： PURPOSE:To stably obtain a fine composite oxide superconducting coat film excellent in its superconducting property by forming a second layer made of elements without Cu and O composing a superconducting material on the surface of a Cu or CuO first layer formed on a basic material, and thermally processing this basic material for making mutual dispersion of the elements of the first and second layers. CONSTITUTION:A Cu or CuO sintered body is used for a vapor deposition source 9 of a razor deposition device, and a basic material 1 is arranged on the upper side thereof, then the internal pressure of a vacuum vessel 8 is reduced, a razor beam 10 is radiated to the source 9, thereby particles vaporized by the source 9 is deposited on the surface of the material 1 and a first layer 2 of Cu or CuO is formed. Next, the source is changed into a sintered body comprising elements composed of a superconducting material such as YBa without Cu and O. Then, the razor beam 10 is radiated to the source 9 to form a second layer 3 comprising elements having a superconducting material on the surface of the second layer 2. It is thus possible to stably obtain a fine composite oxide superconducting coating film having a required thickness excellent in its super conductivity.

28. 发明专利

JPS6447859A VAPOR DEPOSITION METHOD WITH LASER 失效
公开(公告)号：JPS6447859A
公开(公告)日：1989-02-22
申请号：JP20194787
申请日：1987-08-14
申请人： UNIV TOKAI , NIPPON KOKAN KK
发明人： TACHIKAWA KYOJI , NAKADA KIYOKAZU , KOSUGE SHIGECHIKA , ONO MORIAKI , WATANABE ITARU
IPC分类号： H01S3/00 , C23C14/28 , H01L21/203
摘要： PURPOSE:To form a film having a desired compsn. and a desired thickness by combining plural evaporating sources in a bar shape or other shape to form an evaporating source and by separately projecting laser beams on the divided parts of the formed evaporating source. CONSTITUTION:An evaporating source 2 is divided into every desired components or every group of plural desired components and the divided evaporating sources 2a, 2b, 2c are combined in the longitudinal direction to form an evaporating source 2 in a bar or cylinder shape. Laser beams generated from a laser beam generator are divided with partial transmitting mirrors 7a, 7b and a total reflecting mirror 7c and the divided laser beams are separately and simultaneously projected on the evaporating sources 2a-2c. Particles evaporated from the sources 2a-2c are deposited on a substrate 3. Thus, a dense film of a ceramic superconductive material can be effectively formed.

29. 发明专利

JPS6447857A VAPOR DEPOSITION METHOD WITH LASER 失效
公开(公告)号：JPS6447857A
公开(公告)日：1989-02-22
申请号：JP20194587
申请日：1987-08-14
申请人： UNIV TOKAI , NIPPON KOKAN KK
发明人： TACHIKAWA KYOJI , NAKADA KIYOKAZU , KOSUGE SHIGECHIKA , ONO MORIAKI , WATANABE ITARU
IPC分类号： C23C14/28 , H01L21/203 , H01S3/00
摘要： PURPOSE:To form a film having a desired compsn. and a desired thickness by combining plural evaporating sources in a bar shape or other shape to form an evaporating source and by projecting laser beams on the source while vibrating the beams. CONSTITUTION:An evaporating source 2 is divided into every desired components or every group of plural desired components and the divided evaporating sources 2a, 2b, 2c are combined in the longitudinal direction to form an evaporating source 2 in a bar or cylinder shape. Laser beams from a laser beam generating source are projected on a vibrating mirror 7 and the mirror 7 is vibrated in the axial direction of the formed evaporating source 2. By the vibration, the laser beams are continuously moved back and forth along the source 2 and projected on the source 2 over the nearly full length. The surfaces of the sources 2a-2c are separately evaporated and fine particles deposit together on the surface of a substrate 3 to form a dense film of a compd. oxide superconductive material, etc.

30. 发明专利

JPS6445023A HEAT TREATMENT METHOD FOR SUPERCONDUCTIVE FILM 失效
公开(公告)号：JPS6445023A
公开(公告)日：1989-02-17
申请号：JP20194887
申请日：1987-08-14
申请人： UNIV TOKAI , NIPPON KOKAN KK
发明人： TACHIKAWA KYOJI , NAKADA KIYOKAZU , KOSUGE SHIGECHIKA , ONO MORIAKI , WATANABE ITARU
IPC分类号： C04B41/80 , C01G1/00 , C01G3/00 , C22F1/00 , H01B12/06 , H01B13/00 , H01L39/24
摘要： PURPOSE:To improve superconductive characteristics by radiating laser beams together with spraying air or oxygen on a surface of a film made of a composite oxide superconductive material containing a CuxOy radical and by heating this film for a prescribed time and next cooling it at a prescribed speed. CONSTITUTION:Laser beams are radiated through an opening 3 of a nozzle 1 on a film 5b of a superconductive material 5 formed on a substrate 5a. Under an atmosphere of air or oxygen sprayed through the opening 3 of the nozzle 1, this film 5b is heated for a prescribed time by laser beams radiated through the opening 3 and next it is cooled at a prescribed speed. A heating temperature for the film 5b by the laser beams is defined to be 500-980 deg.C, a heating speed be 2000 deg.C/sec or less, a holding time at said heating temperature be 0.1-600sec, and the speed for cooling this film to a room temperature be 1000 deg.C/sec or less.

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