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    • 27. 发明专利
    • ROTARY TARGET FOR X-RAY TUBE
    • JPS5859545A
    • 1983-04-08
    • JP15487781
    • 1981-10-01
    • TOKYO SHIBAURA ELECTRIC CO
    • FUKUHARA YOSHIOMORITA TADASHIKOIZUMI HIDEO
    • H01J35/10
    • PURPOSE:To obtain a light target which realizes an excellent thermal conductivity between an Mo plate and a W plate, which is located at a focus orbit surface, by making pulverized tungsten or tungsten alloy particles to adhere to the focus orbit surface of a base body made of Mo or an Mo alloy so as to form a thin film of tungsten or a tungsten alloy on the focus orbit surface. CONSTITUTION:Highly pure WF6 charged in a sealed case, and highly pure H2 gas charged in a sealed case are prepared. These gases are mixed in a sealed chamber which contains an Mo plate 1 on which a thin film is to be formed, and the mixed gas is heated so as to make it to undergo the reaction of Wf6+3H2 W+6HF. Since W atoms are produced due to the above reaction, they are introduced and deposited on a given surface of the Mo plate 1. Immediately after that, the Mo plate 1 on which W is deposited is heated at a relatively low temperature of around 1,000 deg.C so as to make a thin W layer 6 closely adhering to the Mo plate 1. When treatments of the above reaction, deposition and heating are repeatedly performed, a W layer 6 with a given thickness is formed on the given surface of the plate 1.