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21. 发明专利

JPH04235521A CONTACT TYPE WRITING DEVICE 失效
公开(公告)号：JPH04235521A
公开(公告)日：1992-08-24
申请号：JP1302791
申请日：1991-01-10
申请人： RICOH KK
发明人： HORIGUCHI HIROYUKI , TAKAHASHI JUNICHI , OZAKI MOTOMI
IPC分类号： G02B26/08 , G02B26/10
摘要： PURPOSE:To provide a fine writing optical system by removing optical scanning in the main scanning direction. CONSTITUTION:A writing device is composed of micromirrors 21 and writing light sources arranged in the main scanning direction above a recording body 22, and a micromirror vibrating member to vibrate light advancing in the main scanning direction for its reflection to the direction of the recording body, and used for writing on the recording body 22. Laser light used as writing light is therefore projected in the main scanning direction of the recording body 22, and vertically vibrates the micromirrors 21 arranged in the main scanning direction of the recording body 22 in order, and the light is thereby projected in the main scanning direction of the recording body 22 in order.

22. 发明专利

JPH04222471A CYLINDRICAL ACTUATOR 失效
公开(公告)号：JPH04222471A
公开(公告)日：1992-08-12
申请号：JP41245090
申请日：1990-12-20
申请人： RICOH KK
发明人： HORIGUCHI HIROYUKI , TAKAHASHI JUNICHI , OZAKI MOTOMI
IPC分类号： H02N1/00
摘要： PURPOSE:To provide a small-sized and powerful electrostatic actuator. CONSTITUTION:This actuator is constituted of an inner cylinder 1 and an outer cylinder 2 which is installed on the outer surface of the inner cylinder 1. Three spiral electrodes are formed spirally on the surface of the insulating material- made inner cylinder or outer cylinder and a high resistance layer 3 is formed on the surface of the inner cylinder or outer cylinder which faces the spiral electrodes. Then, an electrode voltage application and control device is installed in order to apply the voltage which varies with the passage of time to each of the spiral electrodes which are formed on the inner or outer cylinder. An electrostatic force is generated between the inner and outer cylinders due to the voltage applied to the spiral electrodes and an electric charge induced in the high resistance layer. With this electrostatic force, the inner cylinder 1 or outer cylinder 2 is moved in the cylinder direction.

23. 发明专利

JPH04210783A ELECTROSTATIC ACTUATOR 失效
公开(公告)号：JPH04210783A
公开(公告)日：1992-07-31
申请号：JP41116490
申请日：1990-12-17
申请人： RICOH KK
发明人： TAKAHASHI JUNICHI , HORIGUCHI HIROYUKI , OZAKI MOTOMI
IPC分类号： H02N1/00
摘要： PURPOSE:To set bias relationship freely between regions formed with low resistance element and not formed with low resistance element by forming the low resistance elements on an insulation film at a fixed part and a movable part. CONSTITUTION:An insulation film i.e., Si3N4 15(first insulation film), is formed on an epitaxial layer 14 at a movable part 18 and a fixed part 19. A low resistance element, i.e., poly-Si 20, is formed in a region on the Si3N4 15 where the movable part 18 and the fixed part 19 opposes each other. The poly-Si 20 contains impurities with high density and electrostatic attraction functions between the movable part 18 and the fixed part 19. A protective film, i.e., Si3N4 21 (second insulation film) is formed on the poly-Si 20. Consequently, short circuit can be prevented when poly-Si 20 at the movable part 18 contacts through excessive electrostatic attraction with poly-Si 20 at the fixed part 19.

24. 发明专利

JPH04127887A ELECTROSTATIC ACTUATOR 失效
公开(公告)号：JPH04127887A
公开(公告)日：1992-04-28
申请号：JP24769190
申请日：1990-09-18
申请人： RICOH KK
发明人： TAKAHASHI JUNICHI , HORIGUCHI HIROYUKI , OZAKI MOTOMI
IPC分类号： H02N13/00 , H02N1/00
摘要： PURPOSE:To eliminate the need of providing an actuator of a piezoelectric element, etc., to the outside so as to remarkably improve the productivity and reduce the weight of an electrostatic actuator by controlling the drive of a mobile section provided with a functional element by means of an electrostatic attracting force which acts between a low-resistance area formed on the end face of the mobile section and the low-resistance area of a fixed section facing the mobile section. CONSTITUTION:When a voltage is applied across the Va while the Vb is maintained at '0' in the figure, an electrostatic attracting force acts between low-resistance areas 18 and 19 and, because of the attracting force, a mobile section 15 moves in the direction P. On the other hand, when a voltage is applied across the Vb while the Va is maintained at '0', the section 15 moves in the direction Q. In addition, when voltages are respectively applied across the Va and Vb, with the value of one voltage being made larger than that of the other, the section 15 moves toward the larger-voltage applied side. Therefore, photographic images taken with a CCD 17 mounted on the mobile section 15 can be prevented from blurring or the CCD 17 can take high-resolution pictures when the section 15 is displaced in the direction P or Q.

25. 发明专利

JPH04115165A ACCELERATION SENSOR 失效
公开(公告)号：JPH04115165A
公开(公告)日：1992-04-16
申请号：JP23495890
申请日：1990-09-05
申请人： RICOH KK
发明人： OZAKI MOTOMI , TAKAHASHI JUNICHI , HORIGUCHI HIROYUKI
IPC分类号： G01P15/00 , B81B3/00 , G01P15/125
摘要： PURPOSE:To measure acceleration by simple constitution by providing the cantilevered beam fixed to a base at one end thereof and having a weight vibratile in a planar direction formed at the other end thereof and providing the first comblike projections to the cantilevered beam. CONSTITUTION:The first comblike parts 4 are formed to the cantilevered beam 3 fixed to a base 1 at one end thereof and having a weight 2 attached to the other end thereof. A comblike protruding plate 5 is fixed on the base 1 and the second comblike parts 6 are formed to the protruding plate 5. The comblike parts 6, 4 are meshed in a non-contact state to constitute a condenser varied in capacity by the vibration of the weight 2. In this case, the beam 3 and the protruding plate 5 are respectively composed of a conductor and insulated each other. A controller 9 is connected between terminals 7, 8 and detects the change of electrostatic capacity or applies voltage so as to keep electrostatic capacity constant to apply electrostatic capacity or detects the resonance frequency of vibration to make it possible to detect acceleration. This apparatus can be prepared by micromachining.

26. 发明专利

JPH04109191A PARALLEL-MOVEMENT TABLE 失效
公开(公告)号：JPH04109191A
公开(公告)日：1992-04-10
申请号：JP22744990
申请日：1990-08-29
申请人： RICOH KK
发明人： HORIGUCHI HIROYUKI , TAKAHASHI JUNICHI , OZAKI MOTOMI
IPC分类号： G12B5/00 , B23Q5/28 , G05D3/00 , G11B7/09
摘要： PURPOSE:To perform the fine position control with high precision by movably arranging a mobile section moved in parallel by the electrostatic force between two drive electrode sections arranged face to face. CONSTITUTION:Comb-shaped electrodes 1a are formed on both the right and left ends of a mobile section 1 provided near the center, and support sections 1b provided on both the upper and lower ends are mounted on rails 2. Comb- shaped electrodes 3a of fixed electrode sections 3 serving as drive electrode sections provided on both sides across the mobile section 1 are combined with the electrodes 1a together. When high voltage is applied between the right and left electrode sections 3 while the mobile section 1 serves as the ground, for example, the mobile section 1 is moved in parallel in the right and left (Y, X) directions by the electrostatic force. A super-lightweight parallel- movement table can be realized, positioning can be performed very compactly, thus a photo-head for a photo-disk can be made lightweight. When a mobile section drive control means feeding the output of a sensor incorporated on the surface of the mobile section 1 back to the electrode sections 3 is provided, the fine position control of the parallel movement can be performed with high precision.

27. 发明专利

JPH0486594A STAGE 失效
公开(公告)号：JPH0486594A
公开(公告)日：1992-03-19
申请号：JP20270590
申请日：1990-07-31
申请人： RICOH KK
发明人： OZAKI MOTOMI , TAKAHASHI JUNICHI , HORIGUCHI HIROYUKI
IPC分类号： G12B5/00 , G05D3/00
摘要： PURPOSE:To achieve an expansion of an application scope with a table made free to adjust finely in a multiple axial direction by deforming a pantagraph type mobile body through a mobile electrode with the application of a voltage to transmit a resultant tension force to the table through a beam. CONSTITUTION:For example, when a mobile power source V4 is driven to apply a voltage between a fixed part 9 and a fixed electrode 11, an electrostatic attraction force is generated between the electrode 11 and the mobile electrode 10, which causes a pantagraph type mobile body 8 to deform elastically so that a beam 7 receives the tension force in a direction of +X axis while a table 6 moves in the direction of the +X axis. Likewise, when a voltage is applied to a mobile voltage part V2, the table 6 moves in the direction of -X axis and when a voltage is applied to a mobile voltage part V1, the table 6 moves in the direction of +Y axis. When a voltage is applied to a mobile voltage part V3, the table 6 moves in the direction of -Y axis. Thus, the table 6 is pulled through the beam 7 by applying voltages to four fixed electrodes 11 thereby making the table free to adjust finely in the directions of + or -X axis and + or -Y axis and within an angle theta between the X and Y axes.

28. 发明专利

JPH03214064A ACCELERATION SENSOR 失效
公开(公告)号：JPH03214064A
公开(公告)日：1991-09-19
申请号：JP911290
申请日：1990-01-18
申请人： RICOH KK
发明人： TAKAHASHI JUNICHI , HORIGUCHI HIROYUKI , OZAKI MOTOMI
IPC分类号： G01P15/12 , G01P15/18
摘要： PURPOSE:To detect acceleration separating from an angular acceleration by providing a weight having a center of gravity within an equally divided plane pertaining to a thickness of a detecting surface to set a shape so that an inertial moment on the center of gravity increases. CONSTITUTION:A strain gauge body 13 is made up of an Si monocrystal substrate; the center thereof is made as working part 14 while a peripheral part thereof as support part 15. Four beams 16 are arranged successively between both the parts 14 and 15 as a thin detecting surface. Weights 17a and 17b (17), upper and lower, are formed separately at the working part 14 and an added weight Au19 is mounted at the tips thereof. A piezo-electric resistances 18(Rx1-Rx4, Ry1-Ry4) are formed on the surfaces of the beams 16 as detector. The weights 17 have the center of gravity within an equally divided surface 20 pertaining to the thickness of the beams 16 and the shape of the weight 17 is so set that moment on the center of gravity increases. This enables detection insensitive to accelerations alphax and alphay parallel with the beams 16 and separating from angular accelerations omegax and omegay about X and Y axes thereby achieving independent detection of an acceleration alphaz vertical to the beams 16.

29. 发明专利

JPH06221846A SCANNING-TYPE FORCE MICROSCOPE, POTENTIOMETER, AND POTENTIAL AND SHAPE MEASURING INSTRUMENT 失效
公开(公告)号：JPH06221846A
公开(公告)日：1994-08-12
申请号：JP1294993
申请日：1993-01-28
申请人： RICOH KK
发明人： TAKAHASHI JUNICHI , OZAKI MOTOMI
IPC分类号： G01B21/30 , G01Q60/24 , G01Q60/30 , G01Q60/32 , G01R19/00 , G01R29/12
摘要： PURPOSE:To solve halmful influence due to a voltage-elimination means by eliminating the voltage-elimination means for indicating the reference of amplitude of a cantilever while maintaining advantages by the ac detection method. CONSTITUTION:A probe 25 opposing an object 21 to be measured is retained at the tip of a cantilever 27, the cantilever 27 is deformed by force operated between the object 21 to be measured and the probe 25, and force operated between the object 21 to be measured and the probe 25 is detected by detecting the deformation of the cantilever 27, thus measuring the state of the object 21 to be measured. A means 40 for vibrating the object for vibrating the object 21 to be measured at the resonance frequency of the cantilever 27 or a frequency which is equivalent to the resonance frequency in the direction of the probe 25 is provided, thus vibrating the side of the object 21 to be measured.

30. 发明专利

JPH06212477A PRODUCTION OF FINE STRUCTURE 失效
公开(公告)号：JPH06212477A
公开(公告)日：1994-08-02
申请号：JP334993
申请日：1993-01-12
申请人： RICOH KK
发明人： OZAKI MOTOMI , TAKAHASHI JUNICHI
IPC分类号： C23F1/00 , B81B1/00 , B81C99/00 , C25D1/00
摘要： PURPOSE:To provide a method or producing fine structures which improves a height accuracy and is capable of easily mass-producing. CONSTITUTION:A first material is laminated as a first layer 9 on a substrate 8 and part of the first layer 9 is removed by an etchant to form a desired shape of a fine structure 14. Then a second layer 10 consisting of a second material which is not etched by the etchant is laminated on the first layer 9, a hole 11 is formed in the second layer 10 and a hollow part 12 is formed by infiltrating the etchant from the hole 11 and removing the first layer 9. After performing an electrocasting or an injection molding by using the hollow part 12 as a mold, the second layer 10 is removed to form a fine structure 14 made of a metal or a plastic.

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