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21. 发明专利

JP2005176156A Antenna integrated element and its producing method 审中-公开
标题翻译：天线综合元件及其生产方法
公开(公告)号：JP2005176156A
公开(公告)日：2005-06-30
申请号：JP2003415907
申请日：2003-12-15
申请人： Nippon Telegr & Teleph Corp , 日本電信電話株式会社
发明人： NAKAJIMA FUMITO , FURUTA TOMOSHI , ITO HIROSHI
IPC分类号： H01L31/10 , G01S7/03 , H01P11/00 , H01Q1/38 , H01Q23/00
摘要： PROBLEM TO BE SOLVED: To produce an antenna integrated element using a semiconductor process technology with high reproducibility or controllability, the antenna integrated element being adopted to suppress a loss of incident light and to make a surface where light is made incident, different from a surface where an electromagnetic wave is radiated. SOLUTION: A photo-detector 2, a plane antenna 4, wiring 6 are formed on a semiconductor substrate 1, a high dielectric film 7 is formed and flattened thereon, an insulator substrate 8 is adhered, and the semiconductor substrate 1 is finally removed. Thus, the antenna integrated element can be produced using the semiconductor process technology. In this formed antenna integrated element, light is made incident from a lower surface side, and electromagnetic waves are radiated from an upper surface side. COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：为了使用具有高再现性或可控性的半导体工艺技术制造天线集成元件，采用天线集成元件来抑制入射光的损失并使得入射光的表面不同从辐射电磁波的表面。解决方案：在半导体基板1上形成有光电检测器2，平面天线4，布线6，高电介质膜7形成并平坦化，绝缘体基板8粘接，半导体基板1为终于删除了。因此，可以使用半导体工艺技术来制造天线集成元件。在该形成天线的集成元件中，从下表面侧入射光，从上表面侧照射电磁波。版权所有（C）2005，JPO＆NCIPI

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