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    • 28. 发明专利
    • AIR SHIELD PARTICLE BEAM IRRADIATION PROCESSOR
    • JPH0448300A
    • 1992-02-18
    • JP15734190
    • 1990-06-15
    • JAPAN ATOMIC ENERGY RES INST
    • SEGUCHI TADAOKASAI NOBORUKANAZAWA TAKAO
    • G21K5/00B01J19/08C08J7/00H01J37/317
    • PURPOSE:To shorten an irradiation time by composing the device of a beam irradiation container part which irradiates an object body with a particle beam in an airtight state and a stabilization processing container part for stabilizing the irradiated body in the airtight state. CONSTITUTION:The irradiation of a beam irradiating container part is performed while the object body to be irradiated is driven in the front-rear direction by running liquid nitrogen through a radiator in an inert gas running state after a sample is charged and deaeration is performed with an airtight shutter 1 closed. Consequently, the object can be irradiated uniformly with a sample which is relatively large in amount. After the irradiation in the beam irradiation container part, the airtight shutter 1 of the beam irradiation container part and the irradiated body are taken out and the airtight shutter 15 of the container part is connected; after shutters 1 and 15 of the both are opened, a manual rod 17 is operated to move a palette 2 containing the irradiated sample to the stabilization processing part and the airtight shutters 1 and 15 are closed. Thus, the stabilization processing is performed while the airtight state is maintained.