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    • 26. 发明专利
    • Semiconductor chip carrier
    • JP3465464B2
    • 2003-11-10
    • JP1970896
    • 1996-02-06
    • 富士通株式会社
    • 博樹 染田重憲 青木
    • H01L23/12
    • H01L2224/16225H01L2924/15311
    • PROBLEM TO BE SOLVED: To reduce the switching noise and restrain signal reflection without lowering the mounting density, by forming and unifying a thin film capacitor on one side of a semiconductor chip carrier and a thin film resistor on the other side, and using the thin film capacitor and the thin film resistor as a decoupling capacitor and a terminating resistor, respectively. SOLUTION: On one side of a supporting board 4, a decoupling capacitor is formed by stacking a pair of metal films including an earthing layer 5 and a power supply layer 6 with a dielectric layer 7 provided between these layers 5, 6. On the other side of the supporting board 4, a second earthing pad 12, a second power supply pad 13 and a second signal pad 14 are formed which are connected to an earthing terminal, a signal terminal and a power supply terminal of a wiring board, respectively. A first earthing pad 9 and a first power supply pad 10 are connected to the second earthing pad 12 and the second power supply pad 13 through penetrating conductor passages 15, 16. A first signal pad 11 and the second signal pad 14 are connected to one and the other electrodes of a thin film resistor 8 provided on the other side or the supporting board 4, through the penetrating conductor passages 15, 16.