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11. 发明专利

JP2005109502A Focusing device for radiation from optical source 有权
标题翻译：用于从光源辐射的聚焦装置
公开(公告)号：JP2005109502A
公开(公告)日：2005-04-21
申请号：JP2004284176
申请日：2004-09-29
申请人： Carl Zeiss Smt Ag , カール・ツァイス・エスエムティー・アーゲー
发明人： ANTONI MARTIN , MELZER FRANK , SEIFERT ANDREAS , SINGER WOLFGANG
IPC分类号： G21K1/06 , G02B5/10 , G02B7/182 , G02B17/02 , G02B27/00 , G02B27/30 , G03F7/20 , G21K5/00 , G21K5/02 , H01L21/027
CPC分类号： G03F7/70825 , B82Y10/00 , G02B5/10 , G02B17/02 , G02B27/0025 , G02B27/30 , G03F7/70058 , G03F7/70166 , G03F7/70175
摘要： PROBLEM TO BE SOLVED: To provide a focusing device for a radiation from an optical source, and to provide an illumination system.
SOLUTION: The focusing device for a radiation from an optical source (2), in particular from a laser plasma source, comprises a collector mirror (1) for collecting light from the optical source to a second focal point under the condition of a virtual image or real image and is used, in particular, for a microlithography using EUV radiation, and a routing unit and a downstream beam structure in an illumination system. The collector mirror is displaced in the z-direction (optical axis) and can be designed and/or provided so that the position of the second focal point will not change, even if the temperatures changes.
COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：提供一种用于来自光源的辐射的聚焦装置，并提供照明系统。解决方案：用于来自光源（2）的辐射的聚焦装置，特别是来自激光等离子体源的聚焦装置包括：收集器反射镜（1），用于在从光源到第二焦点的条件下收集光，虚拟图像或真实图像，并且特别地用于使用EUV辐射的微光刻，以及照明系统中的路由单元和下游波束结构。收集镜在z方向（光轴）上移位，并且可以设计和/或设置，使得即使温度改变，第二焦点的位置也不会改变。版权所有（C）2005，JPO＆NCIPI

12. 发明专利

JP2005084522A Combiner optical system 审中-公开
标题翻译：组合光学系统
公开(公告)号：JP2005084522A
公开(公告)日：2005-03-31
申请号：JP2003318507
申请日：2003-09-10
申请人： Nikon Corp , 株式会社ニコン
发明人： HORI KENJI
IPC分类号： G02B5/04 , G02B17/02 , G02B27/02 , G02B27/28
摘要： PROBLEM TO BE SOLVED: To provide a combiner optical system with thickness-reducible constitution.
SOLUTION: The combiner optical system is equipped with a transparent substrate (15) in which the optical path of display luminous flux introduced from an image display surface (20a) is formed, a beam splitter (13) which is inserted into the optical path formed in the substrate and transmits at least a portion of the display luminous flux, and a main reflecting surface (17) which imparts optical power to the display luminous flux transmitted through the beam splitter and reflects the display luminous flux in a direction where the display luminous flux is made incident again on the beam splitter. The angle of the beam splitter to the top surface of the substrate is set to 20 to 40°.
COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：提供具有厚度可缩短构造的组合器光学系统。解决方案：组合器光学系统配备有透明基板（15），其中形成从图像显示表面（20a）引入的显示光通量的光路，分束器（13）插入到形成在基板中的光路，并透射至少一部分显示光束;以及主反射面（17），其对通过分束器透射的显示光束赋予光功率，并将显示光束反射到显示光束再次入射到分束器上。分束器与基板的顶面的角度设定为20〜40°。版权所有（C）2005，JPO＆NCIPI

13. 发明专利

JP2003511730A 失效
公开(公告)号：JP2003511730A
公开(公告)日：2003-03-25
申请号：JP2001529965
申请日：2000-10-09
IPC分类号： G02B17/02 , B60R1/00 , B60R1/04 , B60R1/08 , B60R1/10
摘要： An optical system for extending the field of view of an operator through an opening is provided by fitting a light diverting optical component (14) to the roof (12) of a canopy (13). The system comprises a multi-element fresnel prism refractor (MEFPR) (14) pivotally connected by a pin (15) to the roof (12) so as to be perpendicular to the line of sight of an operator as indicated by the arrows (16). The MEFPR (14) can thus be moved between a use position and a stowed position either forwardly against the canopy (13) or rearwardly against the roof (12). Reflector only versions can be applied where either or both reflectors may be of a type comprising a plurality of elemental reflectors in a stacked array. The extension of the operator's field of view enabling the operator to observe, for example the bucket arm of a digger.

14. 发明专利

JP2000231060A IMAGE-FORMATION OPTICAL SYSTEM 失效
公开(公告)号：JP2000231060A
公开(公告)日：2000-08-22
申请号：JP3431499
申请日：1999-02-12
申请人： OLYMPUS OPTICAL CO
发明人： KENNO KOKICHI
IPC分类号： G02B17/08 , G02B17/02
摘要： PROBLEM TO BE SOLVED: To provide a high-performance image-formation optical system which is miniaturized and thinned by folding an optical path by using a reflection surface the number of reflecting times of which is small. SOLUTION: A prism member 10 is provided with a 1st incident surface 11, 1st to 4th reflection surfaces 12 to 15 and a 1st emitting surface 16. Then, an optical path made incident on the 1st reflection surface 12 and a reflection optical path from the 2nd reflection surface 13 form a crossing optical path, and an optical path made incident on the 3rd reflection surface 14 and a reflection optical path from the 4th reflection surface 15 form a crossing optical path. At least either the surface 12 or 13 and at least either the surface 14 or 15 have rotationally asymmetric curved surface shape giving power to luminous flux and compensating aberration caused by eccentricity, and an intermediate image surface is formed between the surfaces l2 and 15.

15. 发明专利

JP2000089121A FOCUS DETECTOR 失效
公开(公告)号：JP2000089121A
公开(公告)日：2000-03-31
申请号：JP25273598
申请日：1998-09-07
申请人： CANON KK
发明人： SUDA YASUO
IPC分类号： G03B13/36 , G02B7/09 , G02B7/34 , G02B17/02
摘要： PROBLEM TO BE SOLVED: To provide a screw-fixation system focus detector capable of suppressing the distortion of an optical path to the minimum. SOLUTION: As for the focus detector, a photoelectric conversion element and an optical means for guiding the object light passing through an objective lens to the photoelectric conversion element are integrally held on a substrate so as to be unitized, then, the unit is attached to an optical equipment main body by using a pair of screw hole parts formed in the substrate, then, a focus detecting signal with reference to the objective lens is outputted from the photoelectric conversion element, the pair of screw hole parts 161 and 16n are arranged so as to be positioned across the optical means, and also, one side is fixed by using a right-handed screw, and the other side is fixed by using a left-handed screw.

16. 发明专利

JPH10141918A IMAGE SENSOR HAVING A PLURALITY OF VIEWS AND USING ONLY REFLECTIVE OPTICAL ELEMENT 失效
公开(公告)号：JPH10141918A
公开(公告)日：1998-05-29
申请号：JP16592197
申请日：1997-06-23
申请人： HUGHES AIRCRAFT CO
发明人： BAKER GEORGE F , COOK LACY G
IPC分类号： G01B11/00 , G02B17/00 , G02B17/02 , G02B26/12 , G02B27/14
摘要： PROBLEM TO BE SOLVED: To facilitate selection of view by providing first and second means for projecting respective scenes with first and second views, and means for selecting one projection means. SOLUTION: An image to be observed is selected by an image selector 36 comprising two fixed mirrors and a movable view shift mirror and producing an output dependent on the position of two view shift mirrors being driven through a motor. When an image to be observed is selected, it is passed through a common detector optical unit 38 and received by a detector selector 44 which selects any one of detectors 46a, 46b receiving an image using the fixed mirrors and the movable mirror. No diffraction optical element nor electric element is present in the image sensor other than the detectors 46a, 46b. All optical path functions are executed by means of reflective optical elements.

17. 发明专利

JPH0950046A LIQUID CRYSTAL DISPLAY DEVICE 失效
公开(公告)号：JPH0950046A
公开(公告)日：1997-02-18
申请号：JP15182996
申请日：1996-05-24
申请人： CANON KK
发明人： MIYAWAKI MAMORU
IPC分类号： G02F1/1333 , G02B5/30 , G02B17/02 , G02B27/00 , G02B27/01 , G02B27/02 , G02F1/1335 , G02F1/136 , G02F1/1362 , G02F1/1368
摘要： PROBLEM TO BE SOLVED: To reduce the size of a liquid crystal display device used for view finders of 8-mm VTRs or goggle type display devices, etc., and to enhance the image quality. SOLUTION: A substrate formed by building MOSFETs 5 and polycrystalline silicon TFTs 7 as peripheral driving circuits onto a single crystal silicon substrate 4 and hollowing out the single crystal silicon of only the display region to impart translucency thereto and a polarizing plate 3 stuck to the surface 11 of a prism 3 are stuck to each other. As a result, the high-performance TRs are made usable for the peripheral driving circuits and the direct sticking of the polarizing plate 3 and the substrate 4 is made possible. The cost and size are reduced by the decreased number of parts and the image quality is improved.

18. 发明专利

JPH0854681A CAMERA 失效
公开(公告)号：JPH0854681A
公开(公告)日：1996-02-27
申请号：JP22074894
申请日：1994-08-12
申请人： SEKINE JIRO
发明人： SEKINE JIRO
IPC分类号： G03B13/02 , G02B5/04 , G02B17/02 , G03B19/12
摘要： PURPOSE:To shorten lens back and to thin camera main body by combining a prism and a Fresnel mirror. CONSTITUTION:A 1st prism 4, a 2nd prism 5, the Fresnel mirror 6, and a shutter film 7 are arranged between a photographing lens 3 and a photosensitive surface 9. A luminous flux passing through the photographing lens 3 passes through a low refractive index layer 15 consisting of an air layer and the 2nd prism 5 from the 1st prism 4 and reaches the Fresnel mirror 6. In the case of observation through a finder, the luminous flux is deflected and reflected by the Fresnel mirror 6, refracted by the prism 5, made incident on the 1st prism 10 of the finder, and reflected by prism surfaces 10c and 10d, then guided to an ocular 11 through the actuating space of the shutter 12 of an ocular part. At the time of photographing, the Fresnel mirror 6 is retreated to a dotted line position 6a out of the optical path of a photographing optical system so as to prevent the light from the ocular 11 from reversely entering. Then, a subject image is recorded on the photosensitive surface 9 by the opening/closing operation of a focal plane shutter curtain 7.

19. 发明专利

JPH07117649B2 失效
公开(公告)号：JPH07117649B2
公开(公告)日：1995-12-18
申请号：JP21940491
申请日：1991-08-06
IPC分类号： G02B17/00 , G02B17/02 , G02B17/08 , G02B19/00 , G02B27/18 , G03F7/20 , H01L21/027 , H01L21/30 , H01S3/101

20. 发明专利

JPH07170374A OPTICAL APPARATUS FOR ILLUMINATION 失效
公开(公告)号：JPH07170374A
公开(公告)日：1995-07-04
申请号：JP34199593
申请日：1993-12-13
申请人： NIKON CORP
发明人： FUJINAWA NOBUHIRO , INAMI MASAYUKI , MAEDA EISAKU
IPC分类号： G02B5/10 , G02B17/02 , G02B17/08 , H04N1/04
摘要： PURPOSE:To straighten illumination light on an original surface and to provide the illumination light of a uniform light quantity by a method wherein a low- shaped illumination light beam emitted from a light source and line low phenomena due to a toric mirror are cancelled out each other. CONSTITUTION:When a slit 12 is not present, when the light of a wide range exited from a light source part 11 reaches the toric mirror 13 and is reflected, the line bow phenomenon for which the illumination light is bent appears on a film surface. On the other hand, when the slit 12 is provided, only the passing light is reflected by the mirror 13 and bent. At the time, by bowing the slit 12, since it is bent in an opposite direction by the reflection of the mirror 13, it is cancelled and straightened on the film surface. That is, the bent of the slit 12 and the bent of the mirror 13 are cancelled. Thus, the illumination light uniformly reaches the read range of a line sensor and illumination irregularity is reduced.

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