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    • 14. 发明专利
    • PARTIAL VACUUM ELECTRON BEAM WELDING EQUIPMENT AND METHOD THEREOF
    • JPH06269956A
    • 1994-09-27
    • JP5833493
    • 1993-03-18
    • HITACHI LTDHITACHI ENG SERVICE
    • SENBA SATOYUKIKUROISHI KAZUOISHIMURA TETSURO
    • B23K15/00B23K15/06
    • PURPOSE:To improve working efficiency of carrying-in and carrying-out of materials to be welded by setting multidimensionally the electron beam irradiation position of an electron gun provided on the vacuum vessel inside and providing differential exhaust chambers on a carrying-in port and a carrying-out port. CONSTITUTION:The materials 1 to be welded enter the vacuum vessel 2 inside through a vacuum seal part 7 and a differential exhaust chamber 3 via a line arranging device 8. In the vacuum vessel 2, the electron gun 10 irradiates a welding groove of the materials 1 to be welded with an electron beam and heat input required for partial melting of the welding groove part is carried out to perform welding. The electron gun 10 is subjected to positional control multidimensionally by an electron gun traveling device 9. The periphery of a weld zone is cooled by using a cooling plate 11 as nccessary on the materials 1 to be welded after welding. The materials 1 to be welded after welding enters the line arranging device 8 through the carrying-out side differential exhaust chamber 3 and the vacuum seal parts 7 and after the deformation thereof is corrected, these materials are wound around a drum by a winding device 6.
    • 16. 发明专利
    • VACUUM CHAMBER
    • JPH0523571A
    • 1993-02-02
    • JP17923491
    • 1991-07-19
    • HITACHI LTD
    • UMEO KOUJIWAI SHINICHIIMAI KUNINORISASAKI HIDEAKI
    • B01D53/26B01J3/02B23K15/06
    • PURPOSE:To ensure that a vacuum pumping time is shortened and stabilized by providing a system to supply a dry air to a vacuum chamber through a tank capable of storing a fixed amount of dry air constantly and a means for preventing an atmospheric air from becoming entrained into the vacuum chamber during the opening of a door for operation. CONSTITUTION:A dry air sent from a dry air source is stored in an air tank 3 through an air tank supply pipe 2, and then is supplied to a vacuum chamber 5 by a predetermined amount through a pipe for supply to a vacuum chamber 5 by control of a solenoid valve. The air used contains a low percentage of moisture so that the amount of moisture attaching to the vacuum chamber 5 is extremely small. Therefore, the effect of minimizing a vacuum pumping time is obtained through a pipe for vacuum pumping 11. In addition, the dry air sent from a dry air source is supplied to the front of a door for operation 7 through a pipe for air shower 6 to form a dry air shower 12 and thus the strainment of an atmospheric air into the vacuum chamber 5 is prevented.
    • 18. 发明专利
    • ELECTRON BEAM MACHINING MACHINE
    • JPH03268880A
    • 1991-11-29
    • JP6755190
    • 1990-03-16
    • MITSUBISHI ELECTRIC CORP
    • WATABE YOSHIO
    • B23K15/00B23K15/06
    • PURPOSE:To maintain an electron gun without breaking a vacuum in a machining chamber having huge capacity by opening a machining chamber cathode exchanging door and a cathode exchanging door of a press plate part of the electron gun and communicating only the electron gun part with the air to carry out maintenance. CONSTITUTION:The electron gun 5 is moved to the front of a through port 18 by a three-dimensional moving device 7 and presses the press plate part 14 against a gasket part 19 fitted on the machining chamber inner wall surface around the through port 18. In this stake, leak valves 11 and 17 are opened and the air is introduced into the inside of the electron gun 5 and the through port 18. Afterward, the machining chamber cathode exchanging door 16 and the cathode exchanging door 15 are opened and a cathode 13 in the electron gun 5 is exchanged. After exchange work is completed, the cathode exchanging door 15 is closed and the leak valve 11 is closed and an electron gun exhaust system 10 is operated and when the specified degree of vacuum is attained, an electron gun high vacuum evacuating pump 8 is operated and the electron gun 5 inside is evacuated to a high vacuum.