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11. 发明专利

JPH03146671A DEVICE FOR FORMING FILM ON INSIDE SURFACE OF PIPE SHAPE BODY 失效
公开(公告)号：JPH03146671A
公开(公告)日：1991-06-21
申请号：JP28192789
申请日：1989-10-31
申请人： NIPPON KOKAN KK
发明人： TANAKA YUZO , SUZUKI MITSUO , MIZUNO KENICHIRO , AKASHI TETSUO
IPC分类号： C23C16/44
摘要： PURPOSE:To form a film having uniform film quality and film thickness on the inside surface of a long pipe shape body by moving a nozzle relative to the pipe shape body at the time of introducing a gaseous raw material mixture by the nozzle into the pipe body. CONSTITUTION:Two or more kinds of gases from gaseous raw material supply sources 9A, 9B are premixed in a premixing chamber 1A and are introduced by the nozzle 1 into the pipe shape body P. The inside of the pipe shape body P is maintained under a prescribed vacuum pressure and the inside surfaces thereof are kept at the reaction temp. or above by heaters 10A, 10B. The raw material gases introduced from the nozzle 1 into the pipe shape body P are heated up to the reaction temp. near the inside surface of the pipe shape body P and react with each other to form the film. The nozzle 1 is guided by bearings 2A, 2B and are thereby moved in the axial direction at this time. The film is finally formed uniformly in the longitudinal direction of the nozzle.

12. 发明专利

JPH0353071A METHOD AND DEVICE FOR FORMING FILM ON INSIDE SURFACE OF PIPE-SHAPED BODY AND VESSEL 失效
公开(公告)号：JPH0353071A
公开(公告)日：1991-03-07
申请号：JP18591389
申请日：1989-07-20
申请人： NIPPON KOKAN KK
发明人： TANAKA YUZO , SUZUKI MITSUO , MIZUNO KENICHIRO , AKASHI TETSUO
IPC分类号： C23C16/44 , C23C16/455
摘要： PURPOSE:To form the chemical-vapor deposited film having uniform film quality and thickness on the inside surface of the pipe-shaped body by heating the pipe-shaped body and hermetically closing this body to a vacuum state, then supplying previously mixed gaseous raw materials therein at the time of formation of the chemical vapor deposited film on the inside surface of the pipe-shaped body by a vapor reaction. CONSTITUTION:Heaters 12A, 12B are provided over the entire part in the longitudinal direction of the pipe-shaped body P to be formed with the chemical-vapor deposited film by the vapor reaction on the inside surface and the pipe-shaped body P is heated over the entire part thereof to the reaction temp. of the gaseous raw materials or above. The inside of this body is simultaneously evacuated to a vacuum by a vacuum pump 14 and is closed by a stop valve 13. The gaseous raw materials 5A, 5B are once stored at a prescribed volumetric ratio into respective gas reservoirs 8A, 8B and are thereafter mixed at the temp. below the reaction temp. of both gases in a premixing chamber 11. These raw materials are ejected as the gaseous mixture into the pipe-shaped body P in which the vacuum state is maintained. The gaseous mixture diffuses instantaneously into the pipe-shaped body P and reacts on the inside surface of the pipe kept at the reaction temp. or above. The chemical-vapor deposited film having the uniform material quality and thickness is thus formed on the inside surface of the pipe.

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