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    • 11. 发明专利
    • Method and apparatus for room temperature joining
    • 室温加热方法与装置
    • JP2008062267A
    • 2008-03-21
    • JP2006241961
    • 2006-09-06
    • Mitsubishi Heavy Ind LtdNational Institute Of Advanced Industrial & Technology三菱重工業株式会社独立行政法人産業技術総合研究所
    • GOTO TAKAYUKIUCHIUMI ATSUSHIIDE KENSUKETAKAGI HIDEKIFUNAYAMA MASAHIRO
    • B23K20/00B23K101/40C23C14/34H01L21/02
    • H01L21/2007B23K20/02B23K20/16B23K20/24B23K2201/36C23C14/16C23C14/3464C23C14/46
    • PROBLEM TO BE SOLVED: To provide a method and an apparatus for room temperature joining, which evenly form an intermediate material on the surface of a substrate, need no heating at the time of joining, and secure sufficient joint strength even in joining at room temperature. SOLUTION: The method for room temperature joining is used for joining a plurality of substrates 4 via an intermediate material at room temperature, and includes a step of forming intermediate materials on the to-be-joined surfaces of the substrates by subjecting a plurality of targets 7 to physical sputtering, and a step of activating the to-be-joined surfaces with ion beams. In this case, the targets subjected to physical sputtering are preferably composed of a plurality of kinds of materials. The intermediate materials are sputtered from a plurality of targets that are arranged in various directions as seen from the to-be-joined surfaces of the substrates, so that the intermediate materials are evenly formed on the to-be-joined surfaces. Further, since the intermediate materials are composed of a plurality of kinds of materials, the room temperature joining of the substrates that are hard to join with an intermediate material composed of a single kind of material is realized without requiring heating or excessive joining pressure at the time of joining. COPYRIGHT: (C)2008,JPO&INPIT
    • 要解决的问题:为了提供在基板表面上均匀地形成中间材料的室温接合方法和装置,在接合时不需要加热,并且即使在接合时也确保足够的接合强度 在室温下。 解决方案:常温接合方法用于在室温下通过中间材料接合多个基板4,并且包括在基板的被接合表面上形成中间材料的步骤, 多个靶7进行物理溅射,以及利用离子束激活被接合面的工序。 在这种情况下,物理溅射的靶优选由多种材料构成。 中间材料从从基板的被接合面观察的各个方向上排列的多个靶溅射,使得中间材料均匀地形成在被接合面上。 此外,由于中间材料由多种材料构成,所以在不需要加热或过度接合压力的情况下实现难以与单一材料组成的中间材料接合的基板的室温接合 加入时间 版权所有(C)2008,JPO&INPIT
    • 13. 发明专利
    • Reformer system
    • JP2004026526A
    • 2004-01-29
    • JP2002181916
    • 2002-06-21
    • Mitsubishi Heavy Ind Ltd三菱重工業株式会社
    • SATO KEIICHISHINYA KENJIGOTO TAKAYUKI
    • C01B3/38C01B3/48H01M8/04H01M8/06
    • Y02E60/50
    • PROBLEM TO BE SOLVED: To provide a reformer system, which enhances heat exchange efficiency without increasing the pressure loss of fluid, which has a simple and compact shape requiring no piping etc., and which can be incorporated into other apparatuses and inexpensively mass-produced. SOLUTION: A fluid flow-passage plate is formed by punching out a plurality of fluid flow-passages. A header plate is formed by punching out header through-holes for supplying/discharging a raw material gas to/from the fluid flow-passages into a shape and punching out header through-holes for supplying/discharging a fuel gas to/from the fluid flow-passages into another shape. An intermediate plate for making the fluid flow-passage plate to form the fluid flow-passages is formed. Besides, through-holes for supplying /discharging separately the raw material gas and the fuel gas to/from the header through-holes, which have different shapes as mentioned above, are formed in each of the plates. These plates are laminated to form a laminate-type fluid passage unit. The units are prepared for the raw material gas and the fuel gas, and so composed that the through-holes of each apparatus of the system for discharging the raw material gas and the fuel gas are connected to the through-holes of other apparatuses for supplying them. In this way, the reformer system has each of its devices composed integrally. COPYRIGHT: (C)2004,JPO
    • 16. 发明专利
    • Surface plasmon resonance sensor system
    • 表面质谱共振传感器系统
    • JP2003042945A
    • 2003-02-13
    • JP2001232157
    • 2001-07-31
    • Mitsubishi Heavy Ind Ltd三菱重工業株式会社
    • NAKAYAMA HIROYUKIGOTO TAKAYUKITAWARA SATOSHIINUZUKA HIROMASAUCHIUMI ATSUSHI
    • G01N21/27
    • PROBLEM TO BE SOLVED: To continuously measure and process a large number of samples, to simplify constitution, to facilitate relative movement, to measure with proper precision, and to reduce cost.
      SOLUTION: This surface plasmon resonance sensor system is provided with a first optical system mounted with plural samples for measuring biochemical reaction on one face; and it is formed with a thin film for causing surface plasmon resonance on the other face constituting reflecting face, a light source for emitting a laser beam for generating plasmon resonance on the reflecting face in the thin film, a second optical system for converting the emitted laser beam, emitted from the light source into a parallel beam, and a photodetecting means for detecting an intensity distribution of reflected light reflected on the light reflecting face. In the first optical system, biochemical reactions in the plural sample are detected at the same time, by conducting irradiation using the laser beam converted into the parallel beam by the second optical system, as a parallel beam for irradiating a sample-mounted area mounted with plural samples in the thin film.
      COPYRIGHT: (C)2003,JPO
    • 要解决的问题:为了连续测量和处理大量样品,简化结构,便于相对运动,以适当的精度进行测量并降低成本。 解决方案:该表面等离子体共振传感器系统设有安装有多个样品的第一光学系统,用于在一个面上测量生化反应; 并且其形成有用于在构成反射面的另一面上引起表面等离子体共振的薄膜,用于发射用于在薄膜中的反射面上产生等离子体共振的激光束的光源,用于转换发射的第二光学系统的第二光学系统 激光束从光源发射成平行光束;以及光检测装置,用于检测在反射面上反射的反射光的强度分布。 在第一光学系统中,通过使用由第二光学系统转换成平行光束的激光束进行照射,同时检测多个样品中的生化反应,作为平行光束,用于照射安装有 薄膜中的多个样品。
    • 17. 发明专利
    • STRAIGHTNESS MEASUREMENT METHOD USING DIFFRACTION GRATING AND DEVICE THEREFOR
    • JPH11325863A
    • 1999-11-26
    • JP13797298
    • 1998-05-20
    • MITSUI KIMIYUKIMITSUBISHI HEAVY IND LTD
    • MITSUI KIMIYUKIASANO SHINGOTO TAKAYUKIHASEGAWA OSAMU
    • G01B11/30B23Q17/24
    • PROBLEM TO BE SOLVED: To provide a straightness measurement method and the device for improving the signal-to-noise ratio of observation signals, being hardly affected of peripheral disturbance light, and facilitating optical axis adjustment and the assembly of an optical system. SOLUTION: In this measurement method for matching the moving direction of a linear moving mechanism 8 and the normal line of the working surface of a diffraction grating 6 installed on the mechanism, making coherent light emitted from a light source 1 be incident parallelly to the normal line, making +1st order and -1st order diffracted light from the diffraction grating into parallel light in a paralleling optical system 10, then obtaining interference signals by overlapping both of the diffracted light on a photodetector 18 by an interference optical system, and detecting the straightness of the moving mechanism by the phase change of the interference signals, the difference of the number of times of reflection by a mirror or the like until both of the diffracted light after being made into the parallel light reach the photodetector 18 is turned to the odd-number of times. Of the condition is satisfied, regardless of the number of the mirrors inserted in the middle, even when the linear moving mechanism 8 is moved, the optical axes of both of the diffracted light 9a and 9b are shifted in the same direction without separating from each other while keeping a matched state.
    • 19. 发明专利
    • GLOBE VALVE
    • JPH10110836A
    • 1998-04-28
    • JP28130396
    • 1996-10-03
    • MITSUBISHI HEAVY IND LTD
    • ARIMOTO MITSURUIKUTA KIYOSHIGOTO TAKAYUKI
    • F16K5/06F03B11/00F16K27/06
    • PROBLEM TO BE SOLVED: To prevent leakage of liquid from a gap formed between a valve shaft and an opening by fitting a projection or a recession formed on an inner side surface of a mounting flange to a recession or a projeciton formed on a mounting surface. SOLUTION: An opening 20 is formed through a cylindrical bush case 23 holding a bush 22, while a disc-like mounting flange 31 is formed on the outer side of the bus case. The mounting flange 31 is fastened to divided valve stems 2A, 2B by means of a plurality of bolts 35. A projection 32 of the mounting flange 31 is fitted to a recession groove 34 of the valve stems 2A, 2B. It is thus possible to prevent the valve stems 2A, 2B from being widened near the opening 20 even intensive liquid pressure is applied to a poriton near the opening 20. As a result, thickness of the flange near the opening 20 and a diameter of a bolt 17 can be reduced, and liquid leakage from a gap formed between the opening 20 and a valve stem 10 is prevented.