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11. 发明专利

JP2009274158A Minutely movable device and its driving method 有权
标题翻译：可移动设备及其驱动方法
公开(公告)号：JP2009274158A
公开(公告)日：2009-11-26
申请号：JP2008125724
申请日：2008-05-13
申请人： Japan Aviation Electronics Industry Ltd , 日本航空電子工業株式会社
发明人： HAMADA YOSHIHIKO
IPC分类号： B81B3/00 , G02B26/08
摘要： PROBLEM TO BE SOLVED: To simplify structures of a main actuator and a driving circuit and to reduce a voltage to be fed from the outside. SOLUTION: This minutely movable device is provided with a movable part (a needle 42), a deformable member (a hinge 41) connected with the movable part to operate bistably, and the main actuator for driving the movable part on a base to make the movable part displace between two stable conditions by the main actuator. The deformable member is provided with an energy barrier reducing means for reducing an energy barrier existent between two stable conditions temporarily. COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：为了简化主致动器和驱动电路的结构，并且减少从外部供给的电压。解决方案：该微动移动装置设置有可动部（针42），与可动部连接的可变形部件（铰链41），双向运行，主致动器用于将可动部驱动到基座以使可动部分通过主执行器在两个稳定状态之间移动。可变形构件设置有用于在两个稳定条件之间暂时减少存在的能量屏障的能量屏障减少装置。版权所有（C）2010，JPO＆INPIT

12. 发明专利

JP2005134895A Fine movable device 有权
标题翻译：精细可移动设备
公开(公告)号：JP2005134895A
公开(公告)日：2005-05-26
申请号：JP2004296491
申请日：2004-10-08
申请人： Japan Aviation Electronics Industry Ltd , 日本航空電子工業株式会社
发明人： KATO YOSHICHIKA , MORI KEIICHI , YOSHIDA MEGUMI , IMAKI OSAMU , HAMADA YOSHIHIKO , KONDO KENJI
IPC分类号： G02B26/08 , B81B3/00
摘要： PROBLEM TO BE SOLVED: To provide a high yield of manufacturing of an optical switch by allowing two switching positions of the mirror of the optical switch by a self-holding action of a hinge. SOLUTION: The fine movable device supports a movable rod 7 which holds the mirror 4 at a fixing part 10 with deformed S-type leaf spring hinges 6A through 6D, an electric voltage is applied between a comb tooth electrode 5 fixed on the rod 7 and a fixed comb tooth electrode 8, the mirror 4 is retracted from a central part 1c by the electrostatic attracting force, the state of the mirror 4 is kept by itself by reversed flexural condition of the hinges 6A through 6d even after the applied voltage is cut off, under this condition the mirror 4 is moved to the central part 1c by applying an electric voltage between the electrode 8 and the electrode 9, the hinges 6A through 6D are reversed to the original shape, and this state is kept even after the applied voltage is cut off. In an initial condition assumed upon manufacture, the distances D1 and D3 between the hinges 6A through 6D and a facing wall surface on both sides, and the distances D2 and D4 are same, respectively. COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：通过允许光开关的反射镜的两个切换位置通过铰链的自保持动作来提供光学开关的高产率。解决方案：精细可动装置支撑可动杆7，活动杆7将反射镜4保持在具有变形的S型叶簧铰链6A至6D的固定部分10处，在固定在杆7和固定梳齿电极8，反射镜4通过静电吸引力从中心部分1c缩回，即使在施加之后，反射镜4的状态也由铰链6A至6d的相反弯曲状态自身保持电压被切断，在这种情况下，通过在电极8和电极9之间施加电压将反射镜4移动到中心部分1c，铰链6A至6D与原始形状相反，并且该状态保持均匀施加电压被切断后。在制造时假设的初始状态下，铰链6A至6D与两侧的相对壁面之间的距离D1和D3以及距离D2和D4分别相同。版权所有（C）2005，JPO＆NCIPI

13. 发明专利

JP2005279919A Micro movable device and manufacturing method of the same 有权
标题翻译：微型可移动装置及其制造方法
公开(公告)号：JP2005279919A
公开(公告)日：2005-10-13
申请号：JP2005010514
申请日：2005-01-18
申请人： Japan Aviation Electronics Industry Ltd , 日本航空電子工業株式会社
发明人： MORI KEIICHI , KATO YOSHICHIKA , YOSHIDA MEGUMI , KONDO KENJI , HAMADA YOSHIHIKO , IMAKI OSAMU
IPC分类号： G02B26/08 , B81B3/00 , B81C1/00 , H02H3/18
CPC分类号： B81C1/00825 , B81B7/0029 , B81B2201/045 , B81B2203/033 , G02B26/0841 , Y10T29/49 , Y10T29/49002 , Y10T307/865
摘要： PROBLEM TO BE SOLVED: To provide a micro movable device allowing no nonconformities to occur, such as a foreign matter being sandwiched, thereby unabling a movable body to be operated or further, generating electrical short circuiting. SOLUTION: In a micro movable device, having movable bodies formed on a single-crystal silicon substrate 61, such as movable bodies (movable rod 46, movable comb-line electrodes 49, and leaf spring hinges 48a to 48d or the like) which are displaced in parallel with the surface of a substrate, and structures other than the movable bodies (first and second fixed comb-line electrodes 51 and 52 or the like), the structures are fixed on the single-crystal silicon substrate 61 through an insulating layer 62, and recessed portions 64 are formed, in a range where the movable bodies on the single-crystal silicon substrate 61 are displaced. Ample void, where foreign matter is not sandwiched by the recessed portions 64, is secured. COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：为了提供不会发生不合格的微型可移动装置，例如夹杂的异物，从而使可移动体无法操作或进一步发生电短路。解决方案：在可移动体（可移动杆46，活动梳状电极49和板簧铰链48a至48d等）的单晶硅基板61上形成有移动体的微型可动装置中，），以及除了可移动体（第一和第二固定梳线电极51和52等）之外的结构，结构被固定在单晶硅衬底61上，通过在单晶硅基板61上的移动体移位的范围内形成有绝缘层62和凹部64。确保了异物不被凹部64夹住的充足的空隙。版权所有（C）2006，JPO＆NCIPI

14. 发明专利

JP2005134896A Fine movable device 审中-公开
标题翻译：精细可移动设备
公开(公告)号：JP2005134896A
公开(公告)日：2005-05-26
申请号：JP2004296501
申请日：2004-10-08
申请人： Japan Aviation Electronics Industry Ltd , 日本航空電子工業株式会社
发明人： KATO YOSHICHIKA , MORI KEIICHI , YOSHIDA MEGUMI , KONDO KENJI , HAMADA YOSHIHIKO , IMAKI OSAMU
IPC分类号： G02B26/08 , B81B3/00 , G02B26/02
摘要： PROBLEM TO BE SOLVED: To comparatively easily manufacture a fine movable device supporting a movable part on a substrate with springy hinges which has desired flexibility. SOLUTION: The fine movable device is so composed that a movable electrode 5 is fixed on a movable rod 7 with a mirror 4, the mirror 4 is retracted from the central part 1c of a cross groove 1 by applying an electric voltage between the movable electrode 5 and a fixed electrode 8, a light beam, which has been reflected on the mirror 4, is made straight advance, and the mirror 4 is returned to the central part 1c by applying an electric voltage between the electrode 5 and a fixed electrode 9. The rod 7 is supported at a fixed part with springy hinges 6A through 6D. The cross section of the hinges 6A through 6D is a regular trapezoid or a regular triangle of which base is the surface side 31u of the substrate 31. COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：相对容易地制造具有弹性铰链的具有期望的柔性的在基板上支撑可移动部件的精细可移动装置。解决方案：微动移动装置的结构是，可动电极5用反射镜4固定在可动杆7上，反射镜4通过在十字槽1的中心部分1c之间施加电压将反射镜4反射的可动电极5和固定电极8，光束直线前进，通过在电极5和电极5之间施加电压而将反射镜4返回到中央部1c 固定电极9.杆7被支撑在具有弹性铰链6A至6D的固定部分上。铰链6A至6D的横截面是规则的梯形或正三角形，其基部是基底31的表面侧31u。版权所有（C）2005，JPO＆NCIPI

15. 发明专利

JP2005037885A Optical device 有权
标题翻译：光学装置
公开(公告)号：JP2005037885A
公开(公告)日：2005-02-10
申请号：JP2004095944
申请日：2004-03-29
申请人： Japan Aviation Electronics Industry Ltd , 日本航空電子工業株式会社
发明人： YOSHIDA MEGUMI , KONDO KENJI , IMAKI OSAMU , HAMADA YOSHIHIKO , KATO YOSHICHIKA , MORI KEIICHI
IPC分类号： G02B26/08 , B81B3/00
摘要： PROBLEM TO BE SOLVED: To provide an optical device which is strong against impulsive force and stably operated against unnecessary vector component of driving force. SOLUTION: The optical device is characterized in that the optical device is composed of: a plurality of optical fiber grooves which are formed on a substrate and holds an optical device; a movable part composed of a movable rod and a mirror mounted on the distal end of the movable rod; comb-teeth shaped electrostatic actuator which is mounted on the intermediate part of the movable rod composing the movable part and moves the movable rod axially; and a plurality of hinges which freely movably support the movable rod both at the front end part and the rear end part of the movable rod interposing a driving force acting point on which the driving force of the comb-teeth shaped electrostatic actuator acts, and in that the driving force from a first stable state to a second stable state and driving force in reverse direction are balanced by appropriately selecting the relation between the number of the comb-teeth and the gap of the comb-teeth of the comb-teeth shaped electrostatic actuator, then, the allowable margin of the width of the hinge is expanded and the yield of the device is improved. COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：提供一种抗冲击力强的光学装置，并且针对驱动力的不必要的矢量分量进行稳定的操作。解决方案：光学装置的特征在于，光学装置由以下部分组成：多个光纤槽，形成在基板上并保持光学装置; 可移动部分，由可动杆和安装在所述可动杆的远端上的反射镜构成; 梳齿形的静电致动器，安装在构成可动部分的可动杆的中间部分上，并使活动杆轴向移动; 以及多个铰链，其在可动杆的前端部和后端部处可自由移动地支撑可动杆，其中插入有驱动力作用点，在该驱动力作用点上，梳齿状静电致动器的驱动力起作用，通过适当选择梳齿数与梳齿形静电的梳齿间的关系来平衡从第一稳定状态到第二稳定状态的驱动力和相反方向的驱动力致动器，则可以扩大铰链宽度的允许余量，提高装置的产量。版权所有（C）2005，JPO＆NCIPI

16. 发明专利

JP2004294996A Dielectric multilayer filter block, wavelength multiplexer demultiplexer, and method for manufacturing dielectric multilayer block 审中-公开
公开(公告)号：JP2004294996A
公开(公告)日：2004-10-21
申请号：JP2003090398
申请日：2003-03-28
申请人： Japan Aviation Electronics Industry Ltd , 日本航空電子工業株式会社
发明人： UKECHI MITSUO , KONDO KENJI , HAMADA YOSHIHIKO , IMAKI OSAMU , HIRAYAMA TOMOJI
IPC分类号： G02B5/28 , G02B6/293
摘要： PROBLEM TO BE SOLVED: To provide a dielectric multilayer film filter block whose external size is reducible, a wavelength multiplexer/demultiplexer, and a manufacturing method therefor, and to further provide a method for manufacturing a multilayer film block by which a small-sized multilayer film block can be manufactured. SOLUTION: A process of manufacturing the dielectric multilayer film filter block 50 (equivalent to a dielectric multilayer film block) constituting the wavelength multiplexer/demultiplexer comprises: a first step for preparing a substrate 10 of glass, single-crystal/polycrystalline silicon (Si), etc; a 2nd step for fixing a sacrifice layer 20 on a substrate 10 and further fixing a transparent member 30 on the opposite surface of the sacrifice layer 20 seen from the substrate 10; a 3rd step for etching the transparent member layer 30 of the three-layered substrate where the transparent member layer 30 is etched up to the sacrifice layer 20 to divide the transparent member layer 30 into a plurality of transparent members 31 fixed to the sacrifice layer 20; a 4th step for forming a dielectric multi-layered film filter 41 on the surfaces of the divided transparent members 31 which face the fixation surface of the sacrifice layer 20; a 5th step for removing the sacrifice layer 20 by etching to manufacture filter chips 51 to 54; a 6th step for joining those filter chips 51 to 54 together; and a 7th step for forming a reflecting film 60. COPYRIGHT: (C)2005,JPO&NCIPI

17. 发明专利

JP2003039392A Electrostatic drive device 有权
标题翻译：静电驱动装置
公开(公告)号：JP2003039392A
公开(公告)日：2003-02-13
申请号：JP2001227613
申请日：2001-07-27
申请人： Japan Aviation Electronics Industry Ltd , 日本航空電子工業株式会社
发明人： KATO YOSHICHIKA , HAMADA YOSHIHIKO
IPC分类号： G02B26/08 , B81B3/00 , H01L49/00 , H02N1/00
摘要： PROBLEM TO BE SOLVED: To provide an electrostatic drive device preventing a movable electrode plate from sticking to a fixed electrode base by forming a second electrode area and a first electrode area in an electrically insulated condition on the surface of the fixed electrode base. SOLUTION: The electrostatic drive device is manufactured using micromachining techniques and includes anchor parts 11 and the movable electrode plate 2 mounted and coupled to the fixed electrode base 8 via flexures 21. The first electrode area 87 and the second electrode area 88 insulated from each other are formed on the surface of the fixed electrode base 8.
摘要翻译：要解决的问题：提供一种通过在固定电极基体的表面上形成电绝缘状态的第二电极区域和第一电极区域来防止可动电极板粘附到固定电极基体的静电驱动装置。解决方案：静电驱动装置使用微加工技术制造，并且包括锚固部件11和可动电极板2，其经由挠曲件21安装并联接到固定电极基座8.第一电极区域87和第二电极区域88彼此绝缘形成在固定电极基体8的表面上。

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