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    • 11. 发明专利
    • LOW DUST PRODUCTION DISK ASSEMBLING HAND
    • JPH0192981A
    • 1989-04-12
    • JP24930387
    • 1987-10-02
    • HITACHI LTD
    • KUZE TSUTOMUTSUMAKI NOBUO
    • G11B25/04
    • PURPOSE:To minimize dust production by providing a mechanism adsorbing contactless a disk to an assembling hand and a contact preventing mechanism forming a gaseous film to a slight gap between a disk and a cylinder or a spindle from a gas supply hole so as to support them contactless. CONSTITUTION:A gas supply hole 6 and a gas discharge hole 7 form the contactless adsorbing mechanism of a disk and the gas supply hole forms a contact preventing mechanism to prevent the contact between a spindle 2 and a spacer 3/disk 1. Since the air blown from the air supply hole 6 is compressed, the hole diameter is smaller than that of the gas discharge hole 7. On the other hand, the two gas discharge holes 7 are provided on both sides of the supply hole 6 and since an external air is hardly suctioned, the hole diameter is comparatively large. The disk 1 is adsorbed to the adsorbing face 5 by a pressure difference between the supplied gas and the discharged gas. Since the insertion and extraction of the disk to/from the spindle or cylinder are applied completely contactless, the disk is assembled with high clean state, then a large effect is given to improve the quality of a magnetic disk device or the like.
    • 12. 发明专利
    • CONTROL TYPE MAGNETIC BEARING DEVICE
    • JPS6483916A
    • 1989-03-29
    • JP24074187
    • 1987-09-28
    • HITACHI LTD
    • SATO SATOYUKITSUMAKI NOBUO
    • F16C32/04H02K7/09
    • PURPOSE:To enable strict control of a bearing device having no connection with positions for fitting displacement sensors and electromagnets by providing a position correcting circuit for correcting the detected values of the displacement sensors to the displacement values at the positions where the suction forces of the electromagnets are applied. CONSTITUTION:The signals of displacement sensors S1, S1' and S2, S2' for detecting the displacement of a rotary body 1 are multiplied, through displacement detecting circuits 2, 2', by constant (l1-l2)/l1 at coefficient circuits 3, 3', and by constant l2/l1 at coefficient circuits 7, 7' respectively, due to relative positions l1, l2 between the displacement sensors S1, S1', S2, S2' and the electromagnets A1, A1', A2, A2' and they are corrected to displacement value at the position where the suction forces of the magnets are applied. The signals from the coefficient circuit 3, 7' and 3', 7 are respectively added to addition circuits 4, 4', control circuits 5, 5' and driving currents to the electromagnets A1, A1', A2, A2' are controlled through electric power amplification circuits 6, 6'. Thus, strict control can be carried out by the displacement values at the position where the suction force of the electromagnets are applied and also the degree of freedom of a structural design and lay-out can be improved.
    • 13. 发明专利
    • PLATE-SHAPED MATERIAL HOLDING APPARATUS
    • JPS63164235A
    • 1988-07-07
    • JP30845186
    • 1986-12-26
    • HITACHI LTD
    • HASHIMOTO TAIZOMURAMATSU KIMIONAKAGAWA TAKASHITSUMAKI NOBUOTOKISUE HIROMITSU
    • B65H5/14B65G49/07B65H3/14H01L21/677H01L21/68
    • PURPOSE:To obtain a holding apparatus, which can prevent the damages and the yield of dust of a plate shaped material, by providing a pushing-force generating part, which generates a force that pushes the plate-shaped material held by a head in the arbitrary engaging direction. CONSTITUTION:A fluid is made to blow to a plate-shaped material 1, or the fluid is sucked through a sucking surface. A stream layer is formed between the plate-shaped material 1 and the sucking surface in this way, and balance is provided between the sucking pressure and the flowing pressure. A head 12 sucks and holds the plate- shaped material 1. A plurality of engaging parts 5 are arranged so as to about on the side surface of the plate-shaped material 1, which is sucked and held with the side surface of the head 2. A pushing-force generating part 16 generates a force, which pushes the plate-shaped material 1 held by the head 2 in the direction of the arbitarry engaging parts 5. Said pushing-force generating part 16 inclines, e.g., the head 2 with respect to the horizontal direction. Thus a force of component F in the direction in parallel with the sucking surface of the head 2 is energized on the plat-shaped material 1. Thus the frequent hitting phenomenons of the plate-shaped material to a guide can be suppressed, and the damages and the yield of dust of the plate-shaped material can be prevented.
    • 16. 发明专利
    • MAGNETIC BEARING CONTROL DEVICE
    • JPS61201921A
    • 1986-09-06
    • JP4260785
    • 1985-03-06
    • HITACHI LTD
    • NODA KOSUKETSUMAKI NOBUO
    • F16C32/04
    • PURPOSE:To obtain a stabe bearing characteristic, by inputting the output of position detectors, oppositely arranged for a rotary shaft, to a differential amplifier and regulating the level of an output signal from said differential amplifier in accordance with the temperature in a set part of the position detector. CONSTITUTION:A differential amplifier 10 inputs each position signal, output from position detectors 41, 42 arranged in an opposite position for a rotary shaft 1, to be output to a gain controller 11. On the other hand, an output from a temperature measuring device 9, measuring the temperature in a set part of the position detectors 41, 42, is input to the gain controller 11, and in accordance with a level of its output the level of an output signal of the differential amplifier 10 is controlled. And a control device, comparing the output of the gain controller 11 with a position setting signal 5 to be input to a control circuit 6, controls power, applied to a stator excitation coil 3 in a magnetic bearing, through a power amplifier circuit 7.
    • 18. 发明专利
    • Molecular turbo-pump
    • 分子涡轮泵
    • JPS59119094A
    • 1984-07-10
    • JP22608282
    • 1982-12-24
    • Hitachi Ltd
    • UEDA SHINJIROUOKAWADA TAKESHITSUMAKI NOBUONODA KOUSUKEIZUMI HIDEKIMATSUSHITA OSAMI
    • F16C32/04F04D19/04
    • F04D19/048F16C2300/62F16C2360/45
    • PURPOSE:To enable to obtain clean ultra-high vacuum, by disposing rotor blades on the high-vacuum side located above a magnetic bearing utilizing permanent magnets, and preventing reverse diffusion of the vapor of lubricating oil. CONSTITUTION:Suction gas is compressed by the turbine function of rotor blades 28, 28 and mating stator blades 12, 12 on the suction side and rotor blades 27, 27 and mating stator blades 14, 14 on the intermediate stage and then discharged to the next stage from an outlet port 9. Here, since a magnetic bearing 18 utilizing permanent magnets, disposed on the high-vacuum side, is of a contactless type and does not use lubricating oil or the like, reverse diffusion of the oil vapor to the high-vacuum side is not caused when a pump is not in operation, so that it is enabled to obtain clean vacuum.
    • 目的:为了获得清洁的超高真空,通过使用永磁体将转子叶片设置在位于磁轴承上方的高真空侧,并防止润滑油蒸汽的反向扩散。 构成:吸入气体由转子叶片28,28的涡轮机功能和吸入侧上的配合定子叶片12,12以及中间级的转子叶片27,27和配合的定子叶片14,14而被压缩,然后排出到下一个 这里,由于使用设置在高真空侧的永久磁铁的磁性轴承18是非接触型的,不使用润滑油等,油蒸气的反向扩散到高 当泵不工作时不会造成真空侧,从而能够获得清洁的真空。
    • 19. 发明专利
    • MAGNETIC BEARING
    • JPS58109719A
    • 1983-06-30
    • JP20691981
    • 1981-12-23
    • HITACHI LTD
    • TSUMAKI NOBUONODA KOUSUKE
    • F16C32/04F16C39/06
    • PURPOSE:To suppress the generation of eddy current to minimum and consequently reduce the generation of heat by a structure wherein a bias magnet is made annular and yet a U-shape in its axial cross section so as to produce no change of magnetic flux in the direction of rotation of a shaft. CONSTITUTION:The iron core 5a of the bias electromagnet is made annular and yet a U-shape in its axial cross section as illustrated in the accompanying figure. When a permanent magnet is employed as bias magnet, the magnet is magnetized so as to produce circumferentially same magnetic pole as shown in the figure. While, when an electromagnet 5b is employed as bias magnet, circumferentially same magnetic pole can be obtained by winding a coil as indicated in the figure. Owing to the structure as mentioned above, because no change of magnetic flux is produced circumferentially even under the rotation of the shaft 2, no eddy current is resulted to be produced.