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11. 发明专利

JPS5227646A OPTICAL DEVICE 失效
公开(公告)号：JPS5227646A
公开(公告)日：1977-03-02
申请号：JP10301075
申请日：1975-08-27
申请人： HITACHI LTD
发明人： KATAOKA KEIJI , TAKEDA KASUSHI
IPC分类号： H04N3/02 , G02B26/12 , G03G15/04 , H04N1/23 , H04N3/08
摘要： PURPOSE:By locating each cylindrical lens in an optical path of the laser light which is incident upon a rotary polyhedral mirror and in an optical path whereto the laser light emitting from this polyhedral mirror reaches a parabolic reflector, a laser recording display of few amount of distotion and optical scanning pitch deviation shall be made possible.

12. 发明专利

JPS51104844A 失效
公开(公告)号：JPS51104844A
公开(公告)日：1976-09-17
申请号：JP2899775
申请日：1975-03-12
申请人： HITACHI LTD
发明人： KATAOKA KEIJI , TAKEDA KASUSHI
IPC分类号： G11B7/00 , G11B7/0065

13. 发明专利

JPH08241512A MAGNETIC RECORDING MEDIUM 失效
公开(公告)号：JPH08241512A
公开(公告)日：1996-09-17
申请号：JP3032496
申请日：1996-02-19
申请人： HITACHI LTD
发明人： YONEZAWA SEIJI , KURAUSU KINSUTETSUTA , KATAOKA KEIJI , ITO SHO
IPC分类号： G11B5/82 , G11B5/596 , G11B5/64 , G11B5/73 , G11B21/10
摘要： PURPOSE: To produce disks in large quantities at a low cost as well as to attain high density recording by using a magnetic head for tracking with high precision. CONSTITUTION: This magnetic recording medium is a medium in which information which can be magnetically readout is recorded. A mark made of a recessed or protruding part 3 on the substrate 1 is disposed and a magnetic film 5 is not formed on the part 3.

14. 发明专利

JPH056257B2 失效
公开(公告)号：JPH056257B2
公开(公告)日：1993-01-26
申请号：JP23616583
申请日：1983-12-16
申请人： HITACHI LTD
发明人： KATAOKA KEIJI , TATENO KIMIO
IPC分类号： G02B7/28 , G02B6/12 , G11B7/09 , G11B7/12 , G11B7/1245 , G11B7/135

15. 发明专利

JPH03250464A INFORMATION RECORDER 失效
公开(公告)号：JPH03250464A
公开(公告)日：1991-11-08
申请号：JP28700190
申请日：1990-10-26
申请人： HITACHI LTD
发明人： NAKAO TAKESHI , FUTAMOTO MASAAKI , KUGIYA FUMIO , MIYAMURA YOSHINORI , TAKANO KOJI , MATSUDA YOSHIFUMI , SUZUKI MIKIO , AKAGI KYO , TSUYOSHI TOSHIAKI , YONEZAWA SEIJI , AOI MOTOI , KATAOKA KEIJI
IPC分类号： G11B5/596 , G11B20/14
摘要： PURPOSE:To eliminate the need of servo write for each individual device and to enable the high precision recording by forming a recessed or projecting pit pattern on a magnetic recording medium, and recording a servo signal or a clock signal. CONSTITUTION:A magnetic disk 1 is provided with a servo pattern area constituted of a pattern for a tracking signal or a clock signal to be recorded in advance on the disk 1 as a recessed or projecting servo pit or clock pit on a magnetic film surface of the disk 1 by transferring a original plate pattern. Then, a write clock signal S17 is generated by a PLL circuit 17 based on the timing of a regenerative signal from a clock pit, and a data signal WD is modulated 18 based on the signal S17, and is recorded in a data area of the disk 1 via a read/write amplifier 7. Thus, by forming the servo pattern in the mastering system, the need of the servo write for each individual device is eliminated, and the precise servo pattern can be made, and hence the high precision recording is feasible.

16. 发明专利

JPH0351703A METHOD AND APPARATUS FOR PATTERN TRANSFER 失效
公开(公告)号：JPH0351703A
公开(公告)日：1991-03-06
申请号：JP18463289
申请日：1989-07-19
申请人： HITACHI LTD
发明人： KATAGIRI SOUICHI , TERASAWA TSUNEO , KATAOKA KEIJI
IPC分类号： G01B11/00 , G03F7/20 , G03F9/00 , H01L21/027 , H01L21/30
摘要： PURPOSE:To align a position highly accurately by operating a liquid crystal shutter, transmitting + linear diffraction light and - linear diffraction light, quantitatively obtaining errors in mixing, correcting the errors, and eliminating the effects due to the errors in the alignment of the plane of polarization. CONSTITUTION:At first, a liquid shutter 8a as a space filter 8 is operated, and only + or - linear diffraction light beams on the side of a reticle are transmitted. A beat signal caused by the interference between two waves is detected. The phase difference between the amplitude of said signal and the reference signal of reference light 16 is obtained. Then, the shutter 8a is operated, and only + linear light or - linear light is sequentially transmitted. The phase difference between the amplitude of the light and the reference light 16 is obtained. The same procedure is performed for a wafer mark. The position alignment of a wafer 1 and a reticle 19 is performed based on the respective phase differences. In this way, the errors due to mixing can be quantitatively obtained and corrected. The errors due to the alignment of the plane of polarization are eliminated. Therefore, the highly accurate position alignment can be performed.

17. 发明专利

JPH01303632A OPTICAL DISK DEVICE 失效
公开(公告)号：JPH01303632A
公开(公告)日：1989-12-07
申请号：JP13269188
申请日：1988-06-01
申请人： HITACHI LTD
发明人： KATAOKA KEIJI , YONEZAWA SEIJI , TSUYOSHI TOSHIAKI
IPC分类号： G02B7/28 , G11B7/09
摘要： PURPOSE:To eliminate difficulty in attaining the positioning accuracy and miniaturization of optical system by executing a side spot formation by a diffraction grating and the focusing control of an objective lens by a reflecting light intensity comparison from a side spot. CONSTITUTION:Two side spots 17a and 17c out of optical spots 17a (c) of three branching lights by a diffraction grating 16 for detecting a focus are used for focus detection. A side spot 17a is at the position of an optical disk 6 closer than a spot 17c, a signal recorded at the optical disk 6 is detected by respective light detecting elements 13a (c), and then, the modulation of a signal detected by a detecting element 13a is larger than that of the spot 17c by the side spot 17a. At this time, the position of a main spot at the intermediate position of the side spot is the one dislocated from an optical disk position. Consequently, when the modulation of the detecting signal by the side spot is made equal, the position of a main spot 17b becomes the focusing condition. Thus, the device is made small and the adjustment is facilitated.

18. 发明专利

JPH01287924A COHERENT CONTROL EXPOSURE DEVICE 失效
公开(公告)号：JPH01287924A
公开(公告)日：1989-11-20
申请号：JP7429388
申请日：1988-03-30
申请人： HITACHI LTD
发明人： KATAOKA KEIJI
IPC分类号： G02B19/00 , G02B27/16 , G03F7/20 , H01L21/027 , H01L21/30 , H01S3/00 , H01S3/101
摘要： PURPOSE:To make it possible to conduct a highly precise light-exposing operation in which the interferential noise caused by coherence is reduced by a method wherein a branching element is composed of a first reflection plate, consisting of the part divided by the prescribed different reflection factor, and a second reflection plate which is formed in such a manner that a light will be made incident on the split having the reflection factor different from the first reflection plate. CONSTITUTION:A branching element 16 consists of two paralleled flat plates 16-1 and 16-2, a laser beam 15 is converted to the branched light 19 which is branched into an alloy state in one-dimentional direction by the branching element 16, and the branched light 19 is made incident into a lens array 17 as an integrator. The lens array 17 forms a pupil surface 10, and a capacitor lens 8 is set in a manner that said pupil surface 10 will be image-formed on the pupil surface 10 of a projection lens 11. Also, when a mask 9 is arranged on the focus surface of the capacitor 8, all the branched lights are brought into the state wherein they illuminate the same place of the mask, a uniform illumination is obtained, and the illuminated mask pattern 13 is image-formed by the lens 11 at the position 14 on a wafer 12. As a result, a highly precise light-exposure, having reduced coherent noise caused by the coherence of the laser beam, can be obtained without mechanically scanning the laser beam.

19. 发明专利

JPH0152731B2 失效
公开(公告)号：JPH0152731B2
公开(公告)日：1989-11-09
申请号：JP3680883
申请日：1983-03-07
申请人： HITACHI LTD
发明人： KATAOKA KEIJI , SAITO SUSUMU
IPC分类号： B41J2/44 , G02B26/12 , H04N1/053 , H04N1/113 , H04N1/23

20. 发明专利

JPH01243445A PATTERN DETECTOR 失效
公开(公告)号：JPH01243445A
公开(公告)日：1989-09-28
申请号：JP6936888
申请日：1988-03-25
申请人： HITACHI LTD
发明人： KATAGIRI SOUICHI , TERASAWA TSUNEO , KUROSAKI TOSHISHIGE , KATAOKA KEIJI
IPC分类号： G01N21/88 , G01N21/93 , G01N21/956 , G03F7/20 , G03F9/00 , H01L21/027 , H01L21/30 , H01L21/66
摘要： PURPOSE:To reduce an error resulting from an asymmetric shape of a lattice pattern by comparing the phase of + or - first-order diffracted light caused by diffraction and the phase of diffracted light other than + or - first-order diffracted light except a zero-order and estimating the shape of the lattice pattern. CONSTITUTION:A lattice pattern 2 is irradiated with beams emitted from a laser oscillator 12 linearly polarizing two wavelength light having slightly different frequency and oscillating through a projection lens 15, diffracted light is reflected, and first-order light 13, 13' and third-order light 14, 14' are projected to a Fourier transform lens 5, and selected respectively by a liquid crystal shutter 6. The plane of polarization is selected by a spatial filter 7, one part of a projection spot on a slit 10 is chosen by the slit 10 and heterodyne interference is generated, and phase difference between a beat signal capable of being obtained by a photo-detector 11 and the reference signal of the laser oscillator 12 is acquired. The quantity of offset and the quantity of positional displacement are computed from both phase difference, thus estimating seven offset errors.

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