专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

11. 发明专利

JP2007087639A Electron beam device and pattern evaluation method 审中-公开
标题翻译：电子束装置和图案评估方法
公开(公告)号：JP2007087639A
公开(公告)日：2007-04-05
申请号：JP2005272181
申请日：2005-09-20
申请人： Ebara Corp , 株式会社荏原製作所
发明人： NAKASUJI MAMORU , KARIMATA TSUTOMU , KANEUMA TOSHIFUMI , MIYAMOTO MATSUTARO
IPC分类号： H01J37/21 , H01J37/153 , H01L21/66
摘要： PROBLEM TO BE SOLVED: To provide an electron beam device capable of achieving high throughput by obviating the need to manufacture a Z-map and of evaluating a sample by reducing deviation of a focus even when an electron optical system using a large aperture angle is used by correcting chromatic aberration on an axis without needing an expensive stage.
SOLUTION: This electron beam device used for evaluating a pattern by continuously moving a sample base has an electron optical system having a visual field larger than a stripe width in a direction perpendicular to the continuous movement direction of the sample base and at least 1/4 of the stripe width in the continuous movement direction of the sample base; a beam is moved in the movement direction of the sample base before the pattern evaluation to acquire a signal waveform for measuring a focusing condition; and a pattern is evaluated by an optimum focusing condition obtained as the result thereof.
COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：提供一种能够通过避免制造Z图的需要而获得高产量的电子束装置，以及即使当使用大孔径的电子光学系统时也减小焦点的偏差来评估样品通过校正轴上的色差而不需要昂贵的台阶来使用角度。解决方案：用于通过连续移动样品基底来评估图案的电子束装置具有在垂直于样品基底的连续移动方向的方向上具有大于条纹宽度的视场的电子光学系统，并且至少在样品基底的连续运动方向上的条带宽度的1/4; 在图案评估之前，将光束沿着样品台的移动方向移动，以获取用于测量聚焦条件的信号波形; 并且通过作为其结果获得的最佳聚焦条件来评估图案。版权所有（C）2007，JPO＆INPIT

12. 发明专利

JP2014195342A Stage device and electron beam application device 有权
标题翻译：阶段装置和电子束应用装置
公开(公告)号：JP2014195342A
公开(公告)日：2014-10-09
申请号：JP2013069943
申请日：2013-03-28
申请人： Ebara Corp , 株式会社荏原製作所
发明人： MIYAMOTO MATSUTARO
IPC分类号： H02K41/02 , H01J37/30 , H02K41/03
摘要： PROBLEM TO BE SOLVED: To configure the stage device of an electron beam application device, for irradiating a sample with an electron beam, simply and compactly so that the influence of magnetic force of a linear motor on the inspection or processing of the sample can be minimized.SOLUTION: A stage device having a first linear motor for driving and displacing a first stage provided on a guide-rail, and a second linear motor for driving and displacing a second stage provided on a guide-rail installed on the first stage in a direction orthogonal to the displacement direction thereof is configured by attaching a stage coupling guide, connecting the first stage and the motor mover of the first linear motor integrally and connecting the second stage and the motor mover of the second linear motor with the motor mover, slidably to a linear guide-rail provided along the side end of the second stage at least on one side.
摘要翻译：要解决的问题：为了配置电子束施加装置的台装置，用于用电子束照射样品，简单紧凑地使得线性电动机的磁力对样品的检查或处理的影响可以是最小化。解决方案：具有用于驱动和移动设置在导轨上的第一级的第一线性电动机的级装置和用于驱动和移动设置在安装在第一级上的导轨上的第二级的第二线性电动机通过安装平台联接引导件，将第一线性电动机的第一级和电动机构一体地连接并将第二级和第二线性电动机的电动机构与电动机构连接起来，构成与其位移方向正交的方向，可滑动地连接到至少在一侧上沿着第二阶段的侧端设置的直线导轨。

13. 发明专利

JP2010207086A Rotating device and turbo molecular pump 有权
标题翻译：旋转装置和涡轮分子泵
公开(公告)号：JP2010207086A
公开(公告)日：2010-09-16
申请号：JP2010130565
申请日：2010-06-07
申请人： Ebara Corp , 株式会社荏原製作所
发明人： KAWASAKI HIROYUKI , MIYAMOTO MATSUTARO
IPC分类号： H02K17/16 , F04D19/04 , H02K7/14
摘要： PROBLEM TO BE SOLVED: To provide a rotating device which rotates stably when a rotor rotates at a high speed and rotates at a relatively high speed by rotating force of an inductive motor with excellent reliability, and a turbo molecular pump.
SOLUTION: The rotating device includes a rotor shaft 11 which rotates at a high speed by rotating force of an inductive motor. A rotor spacer 20 comprises a fixed part in a small inner diameter fixed to the rotor shaft 11 and a cylindrical covering part in a large inner diameter for covering the periphery of a motor end ring 13b, the covering part being formed integrally with an end part on the side of a core 13a of a reverse motor rotor of the fixed part, and the outer diameter of the covering part being smaller than the outer diameter of a core of the motor rotor. By fixing the fixed part fitting to the rotor shaft 11, the covering part covers the periphery of the end part on the side of the core 13a of the reverse motor rotor of the motor end ring 13b.
COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：提供一种当转子高速旋转并且通过具有优异的可靠性的感应电机的旋转力以较高速度旋转时的旋转装置以及涡轮分子泵。解决方案：旋转装置包括通过感应电动机的旋转力高速旋转的转子轴11。转子间隔件20包括固定到转子轴11的小内径的固定部分和用于覆盖电动机端环13b的周边的大内径的圆柱形覆盖部分，该覆盖部分与端部部分在固定部的反转电动机转子的铁芯13a的一侧，并且覆盖部的外径小于电动机转子的铁芯的外径。通过将固定部件配合固定到转子轴11上，覆盖部分覆盖电动机端环13b的反向电动机转子的铁芯13a侧端部的周边。版权所有（C）2010，JPO＆INPIT

14. 发明专利

JP2006214448A Vacuum pump 审中-公开
标题翻译：真空泵
公开(公告)号：JP2006214448A
公开(公告)日：2006-08-17
申请号：JP2006136220
申请日：2006-05-16
申请人： Ebara Corp , 株式会社荏原製作所
发明人： MIYAMOTO MATSUTARO , OGAMINO HIROAKI , NAKAZAWA TOSHIHARU
IPC分类号： F04C25/02 , F04D19/04
摘要： PROBLEM TO BE SOLVED: To provide a vacuum pump which can improve performance such as an exhaust, compression, or the like of the pump, and minimize a miniaturization and required power of the pump even when a rotor or stator becomes high temperature.
SOLUTION: In the vacuum pump in which a pair of rotors 74 with the multi-stage arrangement of a plurality of lobes 72 along axial direction are set in parallel each other inside a pump casing 76 by setting the lobes 72 in proximity each other, the pump casing 76 comprises a casing 76d which moves freely in an axial direction of the rotor 74 and constitutes a gas exhausting portion between the lobes 72 by surrounding a periphery of the lobes 72, and has distance adjusting mechanisms 88, 99 which adjust a distance along the axial direction of the rotor 74 between the lobes 72 and the casing 76d in such a way that the casing 76d is transferred along the axial direction of the rotor 74 during a rotation of the rotor 74.
COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供一种可以改善泵的排气，压缩等性能的真空泵，并且即使当转子或定子变为高温时也最小化泵的小型化和所需的功率。解决方案：在真空泵中，其中具有沿着轴向的多个叶片72的多级布置的一对转子74通过将叶片72设置在每个邻近的位置而在泵壳体76内部彼此平行地设置另一方面，泵壳体76包括壳体76d，壳体76d在转子74的轴向方向上自由移动，并且通过围绕叶片72的周边构成在叶片72之间的排气部分，并且具有调节机构88,99 在叶片72和壳体76d之间的转子74的轴向方向上的距离，使得壳体76d在转子74的旋转期间沿着转子74的轴向传递。版权所有 C）2006，JPO＆NCIPI

15. 发明专利

JP2003083283A Turbo-molecular pump 有权
标题翻译：涡轮分子泵
公开(公告)号：JP2003083283A
公开(公告)日：2003-03-19
申请号：JP2002255227
申请日：2002-08-30
申请人： Ebara Corp , 株式会社荏原製作所
发明人： IKEGAMI TETSUMASA , MIYAMOTO MATSUTARO , KAWASAKI HIROYUKI
IPC分类号： F04D19/04
摘要： PROBLEM TO BE SOLVED: To provide a safe turbo-molecular pump preventing damage to a stator or a casing and accompanying destroying of a vacuum system even when abnormality occurs on a rotor side.
SOLUTION: This turbo-molecular pump has vane discharge parts L
1 , L
2 formed by the rotor R and the stator S. A friction reducing structure is placed in at least a part between the stator S of the vane discharge parts L
1 , L
2 and a pump casing 14.
COPYRIGHT: (C)2003,JPO
摘要翻译：要解决的问题：即使在转子侧发生异常，也可以提供安全的涡轮分子泵，防止对定子或壳体造成损坏，并伴随破坏真空系统。解决方案：该涡轮分子泵具有由转子R和定子S形成的叶片排出部分L1，L2。在叶片排出部分L1，L2的定子S和泵之间的至少一部分中放置减摩结构套管14。

16. 发明专利

JP2003065281A Vacuum pump 有权
标题翻译：真空泵
公开(公告)号：JP2003065281A
公开(公告)日：2003-03-05
申请号：JP2001255625
申请日：2001-08-27
申请人： Ebara Corp , 株式会社荏原製作所
发明人： MIYAMOTO MATSUTARO
IPC分类号： F04D19/04
CPC分类号： F04D19/042 , F04D19/044 , F04D29/662 , F05D2260/95
摘要： PROBLEM TO BE SOLVED: To provide a reliable vacuum pump which surely prevents corrosion by corrosive gas of a rotor even when the vacuum pump exhausts the corrosive gas in modifying imbalance of the rotor of the vacuum pump, modifies the imbalance of the rotor with high accuracy and realizes stability in high-speed rotation of the rotor. SOLUTION: In this vacuum pump provided with a casing 1 having an intake port 1a and an exhaust port 20 and a rotor R rotating in the casing 1 and exhausting gas from the intake port 1a to the exhaust port 20 by rotation of the rotor R, an imbalance modification part B is provided for modifying imbalance of the rotor R at a point excluding the point in contact with the exhaust gas A of the rotor R and/or an imbalance modification part B' is provided at a portion in contact with the exhaust gas A and having an anti- corrosion capability.
摘要翻译：要解决的问题：为了提供可靠的真空泵，即使当真空泵排出腐蚀性气体以改变真空泵的转子的不平衡时，也可以确保防止转子腐蚀性气体的腐蚀，从而以高精度修正转子的不平衡实现转子高速旋转的稳定性。解决方案：在具有进气口1a和排气口20的壳体1和在壳体1中旋转的转子R并通过转子R旋转将气体从进气口1a排出到排气口20的真空泵中，提供了一个不平衡修正部分B，用于在除了与转子R的排气A接触的点之外的点处改变转子R的不平衡，和/或不平衡变化部分B'设置在与排气接触的部分气A，具有抗腐蚀能力。

17. 发明专利

JPH11280690A Turbo-molecular pump 失效
标题翻译：涡轮分子泵
公开(公告)号：JPH11280690A
公开(公告)日：1999-10-15
申请号：JP9998998
申请日：1998-03-27
申请人： Ebara Corp , 株式会社荏原製作所
发明人： IKEGAMI TETSUMASA , MIYAMOTO MATSUTARO
IPC分类号： F04D19/04
摘要： PROBLEM TO BE SOLVED: To stop the pump safely before the rotating vane of the rotor touches or collides against the fixed vane or other members of the stator by measuring and grasping the relationship in terms of radial position.
SOLUTION: In the pump casing of this turbo-molecular pump in which a rotor R and a stator S constitute a vane exhaust zone L1 and a groove exhaust zone L2, a sensor 40 is provided to measure the positional relationship between the rotor R and stator S relative to the diameter. With the output from the sensor 40, positional relationship between the rotor R and the stator S relative to the diameter can be grasped. The pump can be safely stopped before the rotating vane of the rotor touches or collides against the fixed vane or other members of the stator.
COPYRIGHT: (C)1999,JPO
摘要翻译：要解决的问题：通过测量和掌握径向位置的关系，在转子的旋转叶片接触或碰撞固定叶片或定子的其他部件之前，安全地停止泵。解决方案：在该涡轮分子泵的泵壳中，转子R和定子S构成叶片排气区域L1和凹槽排出区域L2，设置传感器40以测量转子R和定子之间的位置关系 S相对于直径。通过传感器40的输出，可以掌握转子R与定子S之间的相对于直径的位置关系。在转子的旋转叶片接触或碰撞固定叶片或定子的其他部件之前，泵可以安全地停止。

18. 发明专利

JP2003097554A MAGNETIC BEARING CONTROL DEVICE 审中-公开
公开(公告)号：JP2003097554A
公开(公告)日：2003-04-03
申请号：JP2001291737
申请日：2001-09-25
申请人： EBARA CORP , EBARA DENSAN LTD
发明人： OCHIAI TOSHIHARU , NAKAZAWA TOSHIHARU , MIYAMOTO MATSUTARO
IPC分类号： F16C32/04
摘要： PROBLEM TO BE SOLVED: To provide a magnetic bearing control device utilizing a displacement signal from a displacement sensor for a rotor to be floated for recognizing a proper timing for maintenance and inspection of a magnetic bearing device to give information about the case that it exceeds a predetermined displacement to an external and permit safe and automatic stop of the rotor when the displacement reaches the condition of the contact with a protecting bearing. SOLUTION: The magnetic bearing control device comprises a radially active magnetic bearing 5-1 for supporting the flotation of a rotating shaft 2 of the rotor and a controller 9 for controlling an exciting current in the radially active magnetic bearing 5-1 to support the flotation of the rotating shaft 2 in position in accordance with a detection signal from the radial displacement sensor 6-1 for the magnetic bearing having the radial displacement sensor 6-1 for detecting the floating position of the rotating shaft 2. The controller 9 has displacement normality/abnormality determining means for detecting the displacement of the rotating shaft 2 in accordance with the detection signal from the radial displacement sensor 6-1 and determining whether the floating condition of the rotating shaft 2 is normal or abnormal in accordance with the detected displacement.

19. 发明专利

JP2002089560A MAGNETICALLY LEVITATED ROTATING MACHINE 失效
公开(公告)号：JP2002089560A
公开(公告)日：2002-03-27
申请号：JP2000278815
申请日：2000-09-13
申请人： EBARA CORP , EBARA DENSAN LTD
发明人： OYAMA ATSUSHI , NAKAZAWA TOSHIHARU , MIYAMOTO MATSUTARO
IPC分类号： F16C32/04 , F16C39/06 , H02K7/09 , H02K11/00
摘要： PROBLEM TO BE SOLVED: To provide a magnetically levitated rotating machine capable of stably detecting the displacement and the rotational frequency of a rotor and allowing an entire device to be made smaller and compacter than it was before. SOLUTION: The magnetically levitated rotating machine supports the rotor in a levitated condition by use of the magnetic force of an electromagnet or a permanent magnet. The rotor R has a position-detecting plane 33 and a recess 35 and/or a projection 34 provided on the plane. Displacement sensors 31 and 32 for detecting the displacement of the plane including the recess or the projection are provided on the fixed side and a detecting mechanism is provided for detecting the displacement of the rotor from the outputs of the displacement sensors and for detecting the rotational frequency of the rotor.

20. 发明专利

JPH11173293A TURBO-MOLECULAR PUMP DEVICE 失效
公开(公告)号：JPH11173293A
公开(公告)日：1999-06-29
申请号：JP36182097
申请日：1997-12-10
申请人： EBARA CORP , EBARA DENSAN LTD
发明人： TAIRA AKIKO , CHINO HIROYUKI , NAKAZAWA TOSHIHARU , MIYAMOTO MATSUTARO
IPC分类号： F04D19/04
摘要： PROBLEM TO BE SOLVED: To eliminate a cable for connecting a pump main body and a controller, to prevent the misconnection of the cable and to dispense with the adjustment of the controller for the length of a cable by integrating the pump main body and the controller. SOLUTION: A pump main body 1 is fitted on an upper part of a controller 3. The electric systems of the pump main body 1 and the controller 3 are connected by a pump/controller connector 5. The pump main body 1 and the controller 3 are fixed by the fixing legs 6 projected from the controller 3. Further a connector 4 for supplying the power source is mounted on the controller 3. Further an external interface connector 8 is mounted on the controller 3 to provide the controller 3 with the external input and output interface function. By integrating the pump main body 1 and the controller 3 as mentioned in the above, a cable for connecting the pump main body 1 and the controller 3 can be omitted.

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式