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11. 发明专利

JPH08118231A POLISHING DEVICE 失效
公开(公告)号：JPH08118231A
公开(公告)日：1996-05-14
申请号：JP27985994
申请日：1994-10-19
申请人： EBARA CORP , TOSHIBA CORP
发明人： NISHI TOYOMI , TSUJIMURA MANABU , TAKAHASHI YOSHIMIZU , YAJIMA HIROMI , AOKI RIICHIRO , IMOTO YUKIO , KODAMA SHOICHI , HIUGA KAZUAKI , KONO YOSHISUKE , NISHIMURA TAKANOBU
IPC分类号： B24B37/20 , B24B37/24 , H01L21/304 , B24B37/00
摘要： PURPOSE: To provide a polishing device on which a cloth cartridge mountable on and demountable from a turntable is hardly deformed. CONSTITUTION: In this polishing device, a cloth cartridge 1 formed by sticking a cloth 3 on a pedestal 2 is installed to a turntable 4 allowable to mount and demount, a polishing liquid is dropped to the cloth 3 on the upper surface of the cloth cartridge 1 rotating together with the turntable 4, and a work is pressed on the upper surface of the cloth 3 so as to polish the contact surface between the work and the cloth 3. And in this polishing device, the cloth cartridge 1 is fixed to the turntable 4 both at the peripheral part and at the center.

12. 发明专利

JP2003254682A HEAT EXCHANGER AND ABSORPTION REFRIGERATING MACHINE USING IT 审中-公开
公开(公告)号：JP2003254682A
公开(公告)日：2003-09-10
申请号：JP2002052709
申请日：2002-02-28
申请人： EBARA CORP
发明人： SUZUKI AKIYOSHI , MURATA JUN , ISHIYAMA TAKESHI , MATSUBARA TOSHIO , ITO OSAMU , MORI KIKUICHI , KUNIMASA KOICHI , ISHII HIROSHI , IMOTO YUKIO
IPC分类号： F28F9/00 , F25B33/00 , F25B37/00 , F25B39/02 , F25B39/04 , F28D5/02 , F28F9/16 , F28F13/18
摘要： PROBLEM TO BE SOLVED: To provide an inexpensive and strong heat exchanger by forming a constant falling liquid film, and also to provide a compact and high performance absorption refrigerating machine using it. SOLUTION: In this heat exchanger, a plurality of heat exchanger pipes 3 having a shape to be bent at an intermediate part of the pipe for reversing a flow direction are stacked in an upward and downward direction with the bent shapes at the intermediate parts sequentially changed in a manner that an inner face and an outer face of the pipes 3 are almost brought into close contact with each other, so as to form a heat exchanger pipe unit 4. The units 4 are arranged in a horizontal direction at predetermined intervals, so that heats are exchanged between in-pipe fluid flowing inside the pipe 3 and out-pipe fluid flowing outside the pipe 3. Both ends of the pipe 3 are jointed with a pipe plate or a header for in-pipe fluid. Outside dimension at both ends of the pipe 3 is smaller than outside dimension of a center of the pipe 3. The outer surface of the pipe 3 had better to be applied with a hydrophilic treatment for improving wettability. In this absorption refrigerating machine, the heat exchanger is used for at least one of facilities constituting the absorption refrigerating machine. COPYRIGHT: (C)2003,JPO

13. 发明专利

JP2003254681A HEAT EXCHANGER AND ABSORPTION REFRIGERATING MACHINE USING IT 审中-公开
公开(公告)号：JP2003254681A
公开(公告)日：2003-09-10
申请号：JP2002051118
申请日：2002-02-27
申请人： EBARA CORP
发明人： SUZUKI AKIYOSHI , MURATA JUN , ISHIYAMA TAKESHI , MATSUBARA TOSHIO , ITO OSAMU , MORI KIKUICHI , KUNIMASA KOICHI , ISHII HIROSHI , IMOTO YUKIO
IPC分类号： F28F1/22 , F25B15/00 , F25B33/00 , F25B37/00 , F25B39/02 , F25B39/04 , F28D5/02 , F28F13/18
摘要： PROBLEM TO BE SOLVED: To provide an inexpensive and strong heat exchanger by forming a constant falling liquid film, and also to provide a compact and high performance absorption refrigerating machine using it. SOLUTION: In this heat exchanger, heats are exchanged between in-pipe fluid flowing inside a heat exchanger pipe 3 and out-pipe fluid flowing outside the pipe. A plurality of the heat exchanger pipes 3 are arranged in a horizontal direction, and stacked in an upward and downward direction, so as to form a heat exchanger pipe unit 4. A plurality of the units 4 are arranged in a horizontal direction at predetermined intervals, and both ends of the pipe 3 are jointed with a pipe plate 2 or a header for in-pipe fluid. A plate-like fin 12 is installed at the bottom of the pipes 3 in a manner that it is almost brought into close contact with the top face of the pipe 3 arranged at a lower stage of the pipes 3. The outer surface of the pipe 3 had better to be applied with a hydrophilic treatment for improving wettability. In this absorption refrigerating machine, the heat exchanger is used for at least one facility of an evaporator, an absorber, a regenerator and condenser constituting the absorption refrigerating machine. COPYRIGHT: (C)2003,JPO

14. 发明专利

JP2003222437A ABSORPTION REFRIGERATING MACHINE 审中-公开
公开(公告)号：JP2003222437A
公开(公告)日：2003-08-08
申请号：JP2002023085
申请日：2002-01-31
申请人： EBARA CORP
发明人： SUZUKI AKIYOSHI , MURATA JUN , ISHIYAMA TAKESHI , MATSUBARA TOSHIO , ITO OSAMU , MORI KIKUICHI , KUNIMASA KOICHI , ISHII HIROSHI , IMOTO YUKIO
IPC分类号： F25B15/00 , F25B33/00 , F25B37/00 , F25B39/02 , F28D7/16
摘要： PROBLEM TO BE SOLVED: To provide a compact and high performance absorption refrigerating machine by improving a falling liquid film type heat exchanger. SOLUTION: This absorption refrigerating machine is so formed that a plurality of heat transfer pipes 3 having shapes bent in their intermediate parts are vertically stacked with the bent shapes of the mutual transfer pipes 3 vertically changed in order so as to be formed as a unit and the unit is used as an evaporator E and an absorber A. This machine is so constituted that the unit used as the evaporator E feeds cold water to the inside of the heat transfer pipes 3 and drips refrigerant liquid from a spray device 5 to the outside, while the unit used as the absorber A feeds cooling water to the heat transfer pipes 3 and drips absorptive solution from the outside 5. The E unit and the A unit are alternately disposed horizontally in prescribed intervals apart in two tube plates with the heat transfer pipes 3 disposed in the both ends and the E unit and the A unit are joined with one-side tube plate 2 and the other-side tube plate 2 respectively. In this absorption type refrigerating machine, the unit can be used as a regenerator G and a capacitor C. COPYRIGHT: (C)2003,JPO

15. 发明专利

JP2003254683A HEAT EXCHANGER AND ABSORPTION REFRIGERATING MACHINE USING IT 审中-公开
公开(公告)号：JP2003254683A
公开(公告)日：2003-09-10
申请号：JP2002052710
申请日：2002-02-28
申请人： EBARA CORP
发明人： SUZUKI AKIYOSHI , MURATA JUN , ISHIYAMA TAKESHI , MATSUBARA TOSHIO , ITO OSAMU , MORI KIKUICHI , KUNIMASA KOICHI , ISHII HIROSHI , IMOTO YUKIO
IPC分类号： F28F13/18 , F25B15/00 , F25B33/00 , F25B37/00 , F25B39/02 , F25B39/04 , F25B43/04 , F28D5/02
摘要： PROBLEM TO BE SOLVED: To provide an inexpensive and strong heat exchanger by forming a constant falling liquid film, and also to provide a compact and high performance absorption refrigerating machine using it. SOLUTION: In this heat exchanger, a plurality of heat exchanger pipes 3 having a shape to be bent at an intermediate part of the pipe for reversing a flow direction are stacked in an upward and downward direction with the bent shapes at the intermediate parts sequentially changed in a manner that an inner face and an outer face of the pipes 3 are almost brought into close contact with each other, so as to form a heat exchanger pipe unit 4. The units 4 are arranged in a horizontal direction at predetermined intervals, so that heats are exchanged between in-pipe fluid flowing inside the pipe 3 and out-pipe fluid flowing outside the pipe 3. Both ends of the pipe 3 are jointed with a pipe plate or a header for in-pipe fluid. As to outside dimension at both ends of the pipe 3, the center part of the pipe 3 is shaped like a circle, and the intermediate part except for the both ends of the pipe 3 is shaped like an ellipse or a general rectangle longer in an upward and downward direction. Height dimension in the upward and downward direction of the intermediate part is larger than the outside diameter of both ends. In this absorption refrigerating machine, the heat exchanger is used for at least one of facilities constituting the absorption refrigerating machine. COPYRIGHT: (C)2003,JPO

16. 发明专利

JP2003254679A HEAT EXCHANGER AND ABSORPTION REFRIGERATING MACHINE USING IT 审中-公开
公开(公告)号：JP2003254679A
公开(公告)日：2003-09-10
申请号：JP2002051116
申请日：2002-02-27
申请人： EBARA CORP
发明人： SUZUKI AKIYOSHI , MURATA JUN , ISHIYAMA TAKESHI , MATSUBARA TOSHIO , ITO OSAMU , MORI KIKUICHI , KUNIMASA KOICHI , ISHII HIROSHI , IMOTO YUKIO
IPC分类号： F25B15/00 , F25B33/00 , F25B37/00 , F25B39/02 , F25B39/04 , F28D5/02
摘要： PROBLEM TO BE SOLVED: To provide an inexpensive and strong heat exchanger by forming a constant falling liquid film, and also to provide a compact and high performance absorption refrigerating machine using it. SOLUTION: In this heat exchanger, heats are exchanged between in-pipe fluid flowing inside a heat exchanger pipe 3 and out-pipe fluid flowing outside the pipe. A plurality of the heat exchanger pipes 3 are arranged in a horizontal direction, and stacked in an upward and downward direction in a manner that they are almost brought into close contact with outer faces of the pipes 3, so as to form a heat exchanger pipe unit 4. A plurality of the units 4 are arranged in a horizontal direction at predetermined intervals, and both ends of the pipe 3 are jointed with a pipe plate 2 or a header for in-pipe fluid. Outside dimension d at both ends of the pipe 3 is smaller than outside dimension D of a center of the pipe 3. The outer surface of the pipe 3 had better to be applied with a hydrophilic treatment for improving wettability. In this absorption refrigerating machine, the heat exchanger is used for at least one facility of an evaporator, an absorber, a regenerator and condenser constituting the absorption refrigerating machine. COPYRIGHT: (C)2003,JPO

17. 发明专利

JP2003254680A HEAT EXCHANGER AND ABSORPTION REFRIGERATING MACHINE USING IT 审中-公开
公开(公告)号：JP2003254680A
公开(公告)日：2003-09-10
申请号：JP2002051117
申请日：2002-02-27
申请人： EBARA CORP
发明人： SUZUKI AKIYOSHI , MURATA JUN , ISHIYAMA TAKESHI , MATSUBARA TOSHIO , ITO OSAMU , MORI KIKUICHI , KUNIMASA KOICHI , ISHII HIROSHI , IMOTO YUKIO
IPC分类号： F28F13/18 , F25B15/00 , F25B33/00 , F25B37/00 , F25B39/02 , F25B39/04 , F28D5/02
摘要： PROBLEM TO BE SOLVED: To provide an inexpensive and strong heat exchanger by forming a constant falling liquid film, and also to provide a compact and high performance absorption refrigerating machine using it. SOLUTION: In this heat exchanger, heats are exchanged between in-pipe fluid flowing inside a heat exchanger pipe 3 and out-pipe fluid flowing outside the pipe. A plurality of the heat exchanger pipes 3 are arranged in a horizontal direction, and stacked in an upward and downward direction in a manner that they are almost brought into close contact with outer faces of the pipes 3, so as to form a heat exchanger pipe unit 4. A plurality of the units 4 are arranged in a horizontal direction at predetermined intervals, and both ends of the pipe 3 are jointed with a pipe plate 2 or a header for in-pipe fluid. The pipe 3 is shaped into a circle at both ends, and into an ellipse or a general rectangle longer in an upward and downward direction at the middle. Height dimension of the pipe in the upward and downward direction at the middle is larger than outside diameter of both ends. The outer surface of the pipe 3 had better to be applied with a hydrophilic treatment for improving wettability. In this absorption refrigerating machine, the heat exchanger is used for at least one facility of an evaporator, an absorber, a regenerator and condenser constituting the absorption refrigerating machine. COPYRIGHT: (C)2003,JPO

18. 发明专利

JP2003240454A PLATE HEAT EXCHANGER AND ABSORPTION REFRIGERATOR USING IT 审中-公开
公开(公告)号：JP2003240454A
公开(公告)日：2003-08-27
申请号：JP2002035219
申请日：2002-02-13
申请人： EBARA CORP
发明人： SUZUKI AKIYOSHI , MURATA JUN , ISHIYAMA TAKESHI , MATSUBARA TOSHIO , ITO OSAMU , MORI KIKUICHI , KUNIMASA KOICHI , ISHII HIROSHI , IMOTO YUKIO
IPC分类号： F28F3/12 , F25B15/00 , F25B33/00 , F25B37/00 , F25B39/02 , F25B39/04 , F28D3/02 , F28D5/02 , F28F13/18
摘要： PROBLEM TO BE SOLVED: To provide a plate heat exchanger which assures an effective heat transfer area and has a simplified structure, and also to provide a compact and high performance absorption refrigerator using the plate heat exchanger. SOLUTION: In this plate heat exchanger 52, two sheets 51 are connected to each other, first fluid is allowed to flow on the inside thereof, and second fluid is allowed to flow on the outside for a heat exchange. An inlet 53 and an outlet 54 for the first fluid are provided at one end part of a plate separately from each other, and a flow passage 60 allowing the first fluid flowing from the inlet at one end part to return to the opposite side of the plate and to flow out of the outlet at one end part is formed in the plate, and a plurality of pipes 65 and 66 connected to a tube sheet 2 are fitted to the inlet and outlet. The flow passage 60 is formed as the plurality of flow passages returned on the opposite side, and desirably formed by connecting projected parts on the surface of the plate to each other. The plate heat exchanger 52 can be used for equipment forming the absorption refrigerator. COPYRIGHT: (C)2003,JPO

19. 发明专利

JP2003240378A PLATE HEAT-EXCHANGER, AND ABSORPTION REFRIGERATING MACHINE USING THE SAME 审中-公开
公开(公告)号：JP2003240378A
公开(公告)日：2003-08-27
申请号：JP2002035218
申请日：2002-02-13
申请人： EBARA CORP
发明人： SUZUKI AKIYOSHI , MURATA JUN , ISHIYAMA TAKESHI , MATSUBARA TOSHIO , ITO OSAMU , MORI KIKUICHI , KUNIMASA KOICHI , ISHII HIROSHI , IMOTO YUKIO
IPC分类号： F28F3/12 , F25B15/00 , F25B33/00 , F25B37/00 , F25B39/02 , F25B39/04 , F28D3/02 , F28F13/18
摘要： PROBLEM TO BE SOLVED: To provide a plate heat-exchanger capable of securing an effective heat transfer area, and simplified in structure, and a compact absorption refrigerating machine of high performance using the heat-exchanger. SOLUTION: In this plate heat-exchanger 52 in which two sheets of thin plates are joined, in which the first fluid flows in an inside, in which the second fluid flows in an outside, and in which heat is exchanged between the first and second fluids, an inlet 53 and an outlet 54 for the first fluid are provided separately in one end part side face of the plate respectively, a flow passage 60 is constituted in a plate inside to turn the first fluid flowing in from the one side face inlet back in a contrary side of the plate, so as to flow out from the one side face outlet, the inlet and the outlet are joined to the plate 2, the flow passage 60 is constituted as a plurality of independent flow passages turned in the contrary side, the flow passage is preferably constituted to join fellow protrusions in a continuous uneven part on a plate face, and the heat-exchanger 52 is allowed to be used for each equipment constituting the absorption refrigerating machine. COPYRIGHT: (C)2003,JPO

20. 发明专利

JPS62206830A APPLICATION OF RESIST LIQUID 失效
公开(公告)号：JPS62206830A
公开(公告)日：1987-09-11
申请号：JP4823686
申请日：1986-03-07
申请人： TOSHIBA CORP
发明人： IMOTO YUKIO , SUGANUMA TATSUMI
IPC分类号： B05D1/40 , B05D3/12 , G03F7/16 , H01L21/027 , H01L21/30
摘要： PURPOSE:To form a resist film having no application nonuniformity and equal film thickness by deaerating a resist liquid, forming the nuclei of bubbles and previously removing a dissolved gas before applying the resist liquid. CONSTITUTION:One end side of a pipe 4 mounted to a cover 3 closing a resist liquid vessel 1 for deaeration is opened in a vapor phase section in the vessel 1, and the other end side is connected to a decompression source 5 such as a vacuum line. When the vapor phase section in the vessel 1 is decompressed as much as possible in an extent that a solution does not boil, dissolved gases in a resist liquid 2 are vaporized actively and the resist liquid is deaerated. Air is entrained by shaking the vessel 1 as shown in the arrow at that time, nuclei are easy to be shaped on the formation of bubbles, and the deaeration of the dissolved gases is promoted further. Consequently, the bubbling of the resist liquid 2 at a time when a wafer 15 is supplied with the resist liquid 2 can be prevented. Application nonuniformity is not generated on spin coating, thus acquiring a resist film having equal film thickness.

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