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    • 15. 发明专利
    • Apparatus for generating homogeneous angular distribution of laser irradiation
    • 用于产生激光辐射的均质角分布的装置
    • JP2007334350A
    • 2007-12-27
    • JP2007153402
    • 2007-06-08
    • Hentze-Lissotschenko Patentverwaltungs Gmbh & Co Kgヘンツェ−リソチェンコ パテントフェルヴァルトゥングス ゲーエムベーハー ウント コー.カーゲーHentze−Lissotschenko Patentverwaltungs GmbH & Co.KG
    • BAYER ANDREAS
    • G02B27/09G02B3/00G02B3/02
    • G02B19/0057G02B19/0014G02B27/0961
    • PROBLEM TO BE SOLVED: To vary the size of a work surface by achieving variable angular distribution. SOLUTION: An apparatus for generating an angular distribution is equipped with: a first homogenisation unit 10 equipped with a first substrate 1 having an incident surface and an emitting surface and a first lens array 4 through which the laser irradiation 17 can pass and which is formed on the incident surface and/or the emitting surface; and a second homogenisation unit 11 equipped with a second substrate 2 having an incident surface and an emitting surface and a second lens array 5 through which the laser irradiation 17 emitted from the first lens array 4 can pass and which is formed on the incident surface and/or the emitting surface. The laser irradiation 17, after exiting from the second homogenisation unit 11, has a comparably homogeneous angular distribution. The second homogenisation unit 11 has a third substrate 3 having an incident surface and an emitting surface further and a third lens array 6 formed on the incident surface and/or the emitting surface while leaving space from the second lens array 5. The distances d 1 and d 2 between the second and the third substrates 2 and 3 influence the angular distribution. COPYRIGHT: (C)2008,JPO&INPIT
    • 要解决的问题:通过实现可变角度分布来改变工作表面的尺寸。 解决方案:用于产生角度分布的装置配备有:第一均质化单元10,其配备有具有入射表面和发射表面的第一基板1和激光照射17可以穿过的第一透镜阵列4;以及 其形成在入射表面和/或发射表面上; 以及配备有具有入射面和发光面的第二基板2和第二透镜阵列5的第二均匀化单元11,从第一透镜阵列4射出的激光照射17可以通过该第二透镜阵列5而形成在入射面上, /或发射表面。 激光照射17在从第二均质化单元11排出之后具有相当均匀的角分布。 第二均化单元11具有进一步的入射表面和发射表面的第三衬底3和形成在入射表面和/或发射表面上的第三透镜阵列6,同时离开第二透镜阵列5的空间。距离d < 第二和第三基板2和3之间的SB> 1 和d 2 影响角分布。 版权所有(C)2008,JPO&INPIT