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    • 131. 发明专利
    • Substrate for mounting semiconductor chip, and method for producing the same
    • 用于安装半导体芯片的基板及其制造方法
    • JP2011060824A
    • 2011-03-24
    • JP2009205856
    • 2009-09-07
    • Hitachi Chem Co Ltd日立化成工業株式会社
    • EJIRI YOSHINORIHASEGAWA KIYOSHISAKURAI TAKEHISATSUBOMATSU YOSHIAKI
    • H01L23/12H05K3/46
    • H05K3/244H01L21/4857H01L2924/00013H01L2924/0002H05K3/062H05K3/108H05K3/4644H05K3/4652Y10T29/49155Y10T29/49156Y10T29/49165H01L2224/13099H01L2224/13599H01L2224/05599H01L2224/05099H01L2224/29099H01L2224/29599H01L2924/00
    • PROBLEM TO BE SOLVED: To provide a method for producing a substrate for mounting a semiconductor chip, in which the formation of bridges can be reduced and excellent wire bonding performance and solder joint reliability can be achieved even in forming fine wiring. SOLUTION: The method for producing a substrate for mounting a semiconductor chip includes: a resist forming step for forming resist 4 on a first copper layer 32 of a laminate in regions other than a region to be a conductor circuit 50, wherein the laminate has an inner layer plate 1 having an inner layer circuit 102 on the surface thereof and the first copper layer 32 formed on the inner layer plate 1 with an insulating layer 21 therebetween; a conductor circuit forming step for obtaining the conductor circuit 50 by forming a second copper layer 5 on the first copper layer 32 by electrolytic copper plating; a nickel layer forming step for forming a nickel layer on at least a part of the conductor circuit 50 by electrolytic nickel plating; a resist removing step for removing the resist 4; an etching step for removing the first copper layer 32 by etching; and a gold layer forming step for forming a gold layer on at least a part of the conductor circuit 50 by electroless gold plating. COPYRIGHT: (C)2011,JPO&INPIT
    • 解决的问题:提供一种用于制造用于安装半导体芯片的基板的方法,其中即使在形成精细布线时也可以实现桥接的形成,并且即使在形成精细布线时也可以实现优良的引线接合性能和焊点可靠性。 解决方案:用于制造用于安装半导体芯片的基板的方法包括:抗蚀剂形成步骤,用于在除了作为导体电路50的区域之外的区域中的层叠体的第一铜层32上形成抗蚀剂4,其中 层叠体具有在其表面上具有内层电路102的内层板1和形成在内层板1上的第一铜层32,其间具有绝缘层21; 导体电路形成步骤,用于通过电解镀铜在第一铜层32上形成第二铜层5来获得导体电路50; 镍层形成步骤,用于通过电解镀镍在导体电路50的至少一部分上形成镍层; 用于去除抗蚀剂4的抗蚀剂去除步骤; 用于通过蚀刻去除第一铜层32的蚀刻步骤; 以及通过无电镀金在导体电路50的至少一部分上形成金层的金层形成工序。 版权所有(C)2011,JPO&INPIT