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    • 99. 发明专利
    • METHOD FOR PRODUCING HYDROGEN BORIDE GAS AND APPARATUS THEREFOR
    • JPH07267609A
    • 1995-10-17
    • JP8116094
    • 1994-03-29
    • NACHI FUJIKOSHI CORP
    • KANDA KAZUTAKA
    • C01B6/11C01B35/02
    • PURPOSE:To provide a saved space at a low cost and enable the regulation of the produced gas concentration without requiring expensive evacuation treatment, buildings or apparatuses by introducing boron and hydrogen or a mixed gas of the hydrogen with a rare gas into a discharge plasma in a vacuum reactional vessel. CONSTITUTION:This method for producing hydrogen boride gas is to evacuate the interior of a reactional vessel 3 with a vacuum pump 8 on the outlet side for a gas of an apparatus for producing the hydrogen boride gas, continuously flow hydrogen gas from a hydrogen gas cylinder 14 into the reactional vessel 3, introduce microwaves from a microwave generator 1 after a prescribed pressure attains, produce a plasma in the reactional vessel 3, react the plasma with prearranged boron 4, change the amount of the hydrogen boride produced in the reactional vessel 3 with the plasma intensity and increase the volume ratio of diborane to the hydrogen from (0.01:1) at 300 W output to (0.05:1) at 500 W output. When the feed rate of the hydrogen gas is reduced to 1/2, the ratio of the diborane to the hydrogen at the same microwave output is doubled. Since the volume of the diborane present in the reactional vessel 3 is several cc, the degree of risk is lower than that in the case of feeding the diborane from a gas cylinder thereto and the hydrogen boride is effectively produced.