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91. 发明专利

JPS6120409A Manufacture of surface acoustic wave element 失效
标题翻译：表面声波元件的制造
公开(公告)号：JPS6120409A
公开(公告)日：1986-01-29
申请号：JP14064984
申请日：1984-07-09
申请人： Oki Electric Ind Co Ltd
发明人： SAKAMOTO NOBUYOSHI
IPC分类号： H03H3/08 , H03H9/145
CPC分类号： H03H3/08
摘要： PURPOSE:To prevent the deterioration in characteristic caused by disconnection, and to raise the manufacturing yield by connecting the first and the second bamboo blind-shaped electrode fingers, through a connecting electrode, when forming a bonding pad electrode part. CONSTITUTION:Bamboo blind-shaped electrode fingers A11, A21 arranged interdigitally and a connecting electrode D are formed on a piezoelectric substrate 1 by a photolithographic technique. The inside of a surface acoustic wave transducer A has the same potential since both the electrode fingers are connected electrically by the connecting electrode D. Subsequently, a bonding pad electrode B is prepared, and heat treatment is executed. In these processes, even if a charge is accumulated on the electrode surface of the electrode fingers concerned A11, A21, no current flows since the inside of the transducer A has the same potential. Therefore, disconnection of the electrode finger caused by a current is not generated. When cutting or removing the electrode D, a laser or a photolithographic technique is applied.
摘要翻译：目的：为了防止由断线引起的特性的劣化，并且通过连接第一和第二竹形盲形电极指，通过连接电极，在形成焊盘电极部时提高制造成品率。构成：通过光刻技术在压电基板1上形成叉形排列的竹盲形电极指A11，A21和连接电极D. 表面声波传感器A的内部具有相同的电位，因为两个电极指均由连接电极D电连接。接着，制备焊盘电极B，并进行热处理。在这些处理中，即使在电极指A11，A21的电极表面积累电荷，由于换能器A的内部具有相同的电位，因此不会流动电流。因此，不会产生由电流引起的电极指的断开。当切割或去除电极D时，应用激光或光刻技术。

92. 发明专利

JPS59210715A Elastic surface wave device 失效
标题翻译：弹性表面波装置
公开(公告)号：JPS59210715A
公开(公告)日：1984-11-29
申请号：JP7486684
申请日：1984-04-16
申请人： Toshiba Corp
发明人： YAMADA AKIRA , SUZUKI HITOSHI
IPC分类号： H03H3/08 , H03H9/02 , H03H9/25
CPC分类号： H03H3/08
摘要： PURPOSE:To improve spurious characteristics by forming surface wave absorbers on an elastic surface wave propagation path by a screen printing method. CONSTITUTION:Input electrodes 2 and output inter-digital electrodes are formed on an LiNbO3 plate 1 as a piezoelectric body. The elastic surface wave absorbers 5 and 6 are formed of elastic surface acoustic wave absorber materials on the substrate by screen printing technique. Each absorber is formed having at least part of the incidence terminal slanted to an incidence direction of an elastic surface wave. The absorber materials are ''Hykit'' and ''Markem'' ink for the screen printing. The spurious characteristics are improved because the absorbers are formed to uniform thickness and width and unnecessary reflected waves are suppressed uniformly to the opening width of the inter-digital electrodes. Further, the absorbers are formed having the incidence terminal parts slanted to the incidence direction, so the elastic surface wave is scattered effectively at an incidence terminal part.
摘要翻译：目的：通过丝网印刷法在弹性表面波传播路径上形成表面波吸收体来改善杂散特征。构成：在作为压电体的LiNbO3板1上形成有输入电极2和输出的数字间电极。弹性表面波吸收体5,6由丝网印刷技术在基板上由弹性弹性表面波吸收体形成。每个吸收体形成为至少部分入射端倾斜于弹性表面波的入射方向。吸收材料是丝网印刷的“Hykit”和“Markem”油墨。改善了寄生特性，因为吸收体形成为均匀的厚度和宽度，并且不必要的反射波被均匀地抑制到数字间电极的开口宽度。此外，吸收体形成为入射端子部件沿着入射方向倾斜，因此弹性表面波在入射端子部分处有效散射。

93. 发明专利

JPS5947888B2 JPS5947888B2 - 失效
公开(公告)号：JPS5947888B2
公开(公告)日：1984-11-22
申请号：JP8294877
申请日：1977-07-13
申请人： Hitachi Ltd
发明人： YUHARA AKITSUNA
IPC分类号： H03H3/08 , H03H9/25
CPC分类号： H03H3/08

94. 发明专利

JPS59200515A Manufacture of surface acoustic wave element 失效
标题翻译：表面声波元件的制造
公开(公告)号：JPS59200515A
公开(公告)日：1984-11-13
申请号：JP7479883
申请日：1983-04-26
申请人： Clarion Co Ltd
发明人： KOUNO MOTOHIRO
IPC分类号： H03H3/08
CPC分类号： H03H3/08
摘要： PURPOSE:To form transducer electrodes at minute intervals without using any high-precision mask by applying a holographic exposing method for a photosensitizer. CONSTITUTION:Metallic films 22B and 23 are formed partially on the reverse surface of piezoelectric material 21, and a metallic film 22 is formed over the entire top surface. The photosensitizer 25 is applied over the surface of the metallic film 22 and then the holographic exposing method is applied for development to form parallel patterns 26 on the photosensitizer 25. Then, the patterns are used as a mask to etch the metallic film 22, forming parallel patterns 27, i.e. a grating pattern on the metallic film 27. Then, a prescribed treatment is carried out to form transducer electrodes. Thus, the transducer electrodes are formed at minute intervals without using any high-precision mask.
摘要翻译：目的：通过应用光敏剂的全息曝光方法，以分钟间隔形成传感器电极，而不使用任何高精度的掩模。构成：金属膜22B，23分别形成在压电材料21的背面，金属膜22形成在整个顶面上。将光敏剂25施加在金属膜22的表面上，然后将全息曝光方法应用于显影以在光敏剂25上形成平行图案26.然后，将图案用作掩模以蚀刻金属膜22，形成平行图案27，即金属膜27上的光栅图案。然后，执行规定的处理以形成换能器电极。因此，在不使用任何高精度掩模的情况下，以微小间隔形成换能器电极。

95. 发明专利

JPS5930315A Surface acoustic wave device 失效
标题翻译：表面声波设备
公开(公告)号：JPS5930315A
公开(公告)日：1984-02-17
申请号：JP14078182
申请日：1982-08-12
申请人： Fujitsu Ltd
发明人： KASAI YOSHIHIKO , TANI ATSUSHI , KISHI SHIYOUICHI
IPC分类号： H03H9/25 , H03H3/08
CPC分类号： H03H3/08
摘要： PURPOSE:To attain stable support, by providing a metallic film possible to be soldered to the back side of a piezoelectric substrate. CONSTITUTION:An interdigital electrode 5 is formed on the surface of the piezoelectric substrate 2. The solderable metallic thin film 3 made of gold or silver is provided at one end at the back side of the piezoelectric substrate 2. A metallic film 8 made of aluminum not solderable is provided at a part of the back side of the piezoelectric substrate 2 not provided with the metallic thin film 3. The part of the metallic thin film 3 and a holder 1 are connected by using a solder member 4. Since the fixing is performed at one end, no filter characteristic is changed even if the holder 1 is deformed with temperature.
摘要翻译：目的：为了获得稳定的支撑，通过提供可能被焊接到压电基板的背面的金属膜。构成：在压电基板2的表面上形成叉指电极5.由金或银制成的可焊接金属薄膜3设置在压电基板2的背面的一端。由铝制成的金属膜8 在没有设置金属薄膜3的压电基板2的背面的一部分设置不可焊接的部分。金属薄膜3的一部分和保持器1通过使用焊料部件4连接。由于固定是即使保持器1随温度变形，也不会发生过滤特性的变化。

96. 发明专利

JPS58205319A Surface acoustic wave device 失效
标题翻译：表面声波设备
公开(公告)号：JPS58205319A
公开(公告)日：1983-11-30
申请号：JP8855182
申请日：1982-05-25
申请人： Citizen Watch Co Ltd
发明人： MIYAJIMA AKIRA
IPC分类号： H03H3/08 , H03H9/25
CPC分类号： H03H3/08
摘要： PURPOSE:To decrease the number of manufacturing stages and to minizaturize a titled surface acoustic wave device, by providing electrodes connected electrically to a reed-screen electrode to a notched part at the side surface of a substrate and connecting the electrodes to external terminals. CONSTITUTION:The reed-screen electrode 5 on the substrate 1 and the connection electrodes 6 installed at the notched part 10 of the substrate side surface are formed at the same time by depositing a metal with a method such as vapor-deposition. The connection electrodes 6 and the external terminals 7 are connected directly. Since the external terminals 7 are positioned at the notched part of the substrate side surface, the surface acoustic wave device is miniaturized.
摘要翻译：目的：为了减少制造阶段的数量并使标称的声表面波装置最小化，通过将电极与苇屏电极连接到衬底的侧表面处的切口部分并将电极连接到外部端子来实现。构成：通过以蒸镀等方法沉积金属，同时形成基板1上的簧片屏幕电极5和安装在基板侧表面的切口部分10上的连接电极6。连接电极6和外部端子7直接连接。由于外部端子7位于基板侧表面的切口部分，所以表面声波装置小型化。

97. 发明专利

JPS57119507A Surface acoustic wave device 失效
标题翻译：表面声波设备
公开(公告)号：JPS57119507A
公开(公告)日：1982-07-26
申请号：JP516481
申请日：1981-01-19
申请人： Toshiba Corp
发明人： SUZUKI HITOSHI
IPC分类号： H03H9/25 , H03H3/08
CPC分类号： H03H3/08
摘要： PURPOSE:To eliminate a spurious phenomenon by specifying the thickness of a rotary Y-cut LiNbO3 plate with a 125-135 deg. angle of rotation around an X axis in accordance with an inequality. CONSTITUTION:A 128 deg. rotary Y-cut LiNbO3 plate which is a piezoelectric substrate provides longitudinal spurious oscillation. To prevent said oscillation from in fluencing surface wave filter characteristics, the thickness of the substrate is so specified that resonance is not within the passing band of a filter. This applies to a VSB filter for domestic TV broadcasting equipment. The passing band width of this filter is 17-22MHz (FU), so, for example, a broken-line slanting-line area P is applied except an intersection range W determined by straight lines fL and fU and the straight line of resonance frequency characteristics (frn), thereby removing a spurious phenomenon. In other words, the thickness of the LiNbO3 plate is specified as shown by the inequality in the figure. In the inequality, (n) is an odd number, fL and fU are the minimum and maximum frequencies (MHz) of the filter passing band, and (d) is the thickness of the LiNbO3 plate.
摘要翻译：目的：通过指定125-135度的旋转Y切LiNbO3板的厚度来消除杂散现象。根据不等式绕X轴的旋转角度。构成：128度作为压电基板的旋转Y切割LiNbO3板提供纵向杂散振荡。为了防止表面波滤波器特性的振荡，衬底的厚度被规定为使谐振不在滤波器的通带内。这适用于家用电视广播设备的VSB滤波器。该滤波器的通带宽度为17-22MHz（FU），因此例如，除了由直线fL，fU确定的交点X与共振频率的直线之外，还应用虚线倾斜线区域P 特征（frn），从而消除杂散现象。换句话说，LiNbO3板的厚度如图中不等式所示。在不等式中，（n）是奇数，fL和fU是滤波器通过带的最小和最大频率（MHz），（d）是LiNbO3板的厚度。

98. 发明专利

JPS5762614A Surface acoustic wave element 失效
标题翻译：表面声波元件
公开(公告)号：JPS5762614A
公开(公告)日：1982-04-15
申请号：JP13580080
申请日：1980-10-01
申请人： Toshiba Corp
发明人： YABUKAWA KAZUHISA
IPC分类号： H03H9/145 , H01L21/68 , H03H3/08
CPC分类号： H03H3/08
摘要： PURPOSE:To reduce the wafer area and prevent the occurrence of a bonding miss, by providing position detecting pads for an automatic bonding device in the inside of bus bars connecting electrodes. CONSTITUTION:Reed screen type output electrodes 22 connected by bus bars 21a and 21b are provided on the surface of a piezoelectric substrate 20, and input electrodes 24 which are connected by bus bars 23a and 23b and a shield electrode 25 are provided oppositely to output electrodes 22. For wire bonding, a bonding pad 26 is provided for each electrode. Position detecting pads 27 and 28 for an automatic bonding device are so formed that their edge 27a in the longer side is more inside than the edge of bus bars in the longer side. As the result, even if the longer side of the substrate 20 is shaved somewhat too much when a wafer is died, the form of position detecting pads is prevented from being deformed.
摘要翻译：目的：通过在连接电极的汇流条的内部设置用于自动接合装置的位置检测焊盘，减少晶片面积并防止发生接合错位。构成：在压电基板20的表面上设置由汇流条21a和21b连接的簧片式输出电极22，并且由汇流条23a和23b连接的输入电极24和屏蔽电极25相对于输出电极对于引线接合，为每个电极提供接合焊盘26。用于自动接合装置的位置检测焊盘27和28被形成为使得它们在长边的边缘27a比在长边的汇流条的边缘更内侧。结果，即使当晶片死亡时，即使基板20的较长边被刮得太多，也可以防止位置检测焊盘的形状变形。

99. 发明专利

KR102229746B1 KR102229746B1 - Bonded body of piezoelectric material substrate and support substrate 有权
公开(公告)号：KR102229746B1
公开(公告)日：2021-03-18
申请号：KR1020207027055A
申请日：2018-12-06
申请人： 엔지케이 인슐레이터 엘티디
发明人： 유지 호리 , 다카히로 야마데라
IPC分类号： H01L41/313 , B32B7/04 , B32B9/02 , H01L21/02 , H03H3/08 , H03H9/02
CPC分类号： B32B3/30 , B32B7/04 , B32B9/00 , B32B9/025 , B32B9/04 , H01L21/02 , H01L41/313 , H03H9/02559 , H03H9/25 , H03H3/08 , H03H9/02574
摘要： 본 발명은 탄탈산리튬 등으로 이루어진 압전성 재료 기판과 지지 기판을 산화규소층을 통해 접합함에 있어서, 접합층을 구성하는 산화규소와 지지 기판의 계면에서의 박리를 억제하는 것을 과제로 한다.
접합체는, 지지 기판(3), 지지 기판(3)의 표면(3b) 상에 형성된 접합층(4)으로서, 산화규소를 포함하는 접합층(4), 및 니오븀산리튬, 탄탈산리튬 및 니오븀산리튬-탄탈산리튬으로 이루어진 군에서 선택된 재질을 포함하는 압전성 재료 기판을 구비한다. 지지 기판(3)의 표면(3b)에 오목부(12)가 형성되어 있고, 접합층(4)이, 오목부(12) 상에 연장되는 구조 결함부(13)를 구비하고 있다.

100. 发明专利

KR20210028672A KR20210028672A - Substrate for surface acoustic wave device and method for manufacturing the same 审中-公开
公开(公告)号：KR20210028672A
公开(公告)日：2021-03-12
申请号：KR1020217003282A
申请日：2019-08-21
申请人： 교세라 가부시키가이샤
发明人： 켄이치 니시 , 요스케 시미즈
IPC分类号： H01L21/02 , C30B33/00 , H03H3/08
CPC分类号： H01L21/02021 , C30B33/00 , H01L21/02019 , H01L21/304 , H03H3/08
摘要： 압전 재료로 이루어지며, 외주면에 모따기부를 갖는 표면 탄성파 소자용 기판이며, 상기 외주면의 두께 방향의 거칠기 곡선의 산술 평균 거칠기 Ra1과, 둘레 방향의 거칠기 곡선의 산술 평균 거칠기 Ra2가 모두 1㎛ 이하이며, 또한 Ra1/Ra2가 1.2 이상이다.

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