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1. 发明专利

JPH07154200A RESONATOR SURFACE ACOUSTIC WAVE FILTER 失效
公开(公告)号：JPH07154200A
公开(公告)日：1995-06-16
申请号：JP29636693
申请日：1993-11-26
申请人： OKI ELECTRIC IND CO LTD
发明人： SAKAMOTO NOBUYOSHI , MORIMOTO SHIGEYUKI , KASAGI MASAKATSU , UU HOKU HOA
IPC分类号： H03H9/64
摘要： PURPOSE:To secure a sufficient attenuation value for an attenuation band without incurring increase in a loss of a pass band, increase in chip size and deterioration in the yield. CONSTITUTION:The resonator surface acoustic wave filter is formed by a 1st stage ladder circuit comprising surface acoustic wave resonators 24, 25 and a surface acoustic wave resonator 26 in cascade connection to the ladder circuit as a series element. The resonance frequency of the resonator 24 and the antiresonance frequency of the resonator 25 are set the same. Furthermore, the resonance frequency and the antiresonance frequency of the resonator 26 are set higher than the resonance frequency and the antiresonance frequency of the resonator 24. Thus, the attenuation characteristics are obtained, in which the attenuation value in the attenuation band on the high frequency side of the band pass characteristics obtained by the ladder circuit is emphasized.

2. 发明专利

JPH03242012A MANUFACTURE OF SURFACE ACOUSTIC WAVE DEVICE 失效
公开(公告)号：JPH03242012A
公开(公告)日：1991-10-29
申请号：JP3950090
申请日：1990-02-20
申请人： OKI ELECTRIC IND CO LTD
发明人： KASAGI MASAKATSU , UU HOKU HOA , SAKAMOTO NOBUYOSHI
IPC分类号： H03H3/08
摘要： PURPOSE:To execute the film thickness control of an electrode and to attain fine adjustment of the center frequency of a surface acoustic wave device by providing a film thickness measurement process, a film thickness discrimination process and an etching process after an electrode forming process. CONSTITUTION:A film thickness measuring process 28 measures the film thickness of an electrode formed on a piezoelectric substrate, and a film thickness discrimination process 29 decides whether or not the film thickness of the electrode on the piezoelectric substrate is equal to the setting film thickness depending whether difference between the film thickness of the electrode and the setting film thickness is equal to zero. An etching process 30 applies the etching in response to the difference from the film thickness to the electrode when the difference from the film thickness is not zero, and the film thickness is measured at the film thickness measuring process 28. The film thickness measuring process 28, the film thickness decision process 29 and the etching process 30 are repeated till the difference from the film thickness is decided to be zero by the film thickness decision process 29. Thus, the film thickness control of the electrode being a decisive factor of the center frequency is facilitated.

3. 发明专利

JPH01135113A SURFACE ACOUSTIC WAVE DEVICE 失效
公开(公告)号：JPH01135113A
公开(公告)日：1989-05-26
申请号：JP29197287
申请日：1987-11-20
申请人： OKI ELECTRIC IND CO LTD
发明人： SAKAMOTO NOBUYOSHI , UU HOKU HOA
IPC分类号： H03H9/145 , H03H3/08 , H03H9/25 , H03H9/64
摘要： PURPOSE:To prevent the attenuation at high frequencies by giving a prescribed capacitance to a dumping capacitor produced between common terminals of 1st and 2nd surface acoustic wave converters. CONSTITUTION:A capacitance 1 of a capacitor or the like as an external component is added to a dumping capacitance caused between a common input terminal 21 of the 1st surface acoustic wave converter 22 and a common output terminal 31 of the 2nd surface acoustic wave converter 32 to vary an anti- resonance frequency thereby increasing the attenuation at an attenuation area, especially the attenuation at high frequencies. A problem in a conventional device such that the insertion loss is decreased but the attenuation at the attenuation area is deteriorated by increasing the number of input(output) surface acoustic wave converters and output(input) surface acoustic wave converters is solved and the excellent surface acoustic wave device having an excellent frequency characteristic that the attenuation at the attenuation area, especially the attenuation at high frequencies is improved is obtained.

4. 发明专利

JPS6120409A Manufacture of surface acoustic wave element 失效
标题翻译：表面声波元件的制造
公开(公告)号：JPS6120409A
公开(公告)日：1986-01-29
申请号：JP14064984
申请日：1984-07-09
申请人： Oki Electric Ind Co Ltd
发明人： SAKAMOTO NOBUYOSHI
IPC分类号： H03H3/08 , H03H9/145
CPC分类号： H03H3/08
摘要： PURPOSE:To prevent the deterioration in characteristic caused by disconnection, and to raise the manufacturing yield by connecting the first and the second bamboo blind-shaped electrode fingers, through a connecting electrode, when forming a bonding pad electrode part. CONSTITUTION:Bamboo blind-shaped electrode fingers A11, A21 arranged interdigitally and a connecting electrode D are formed on a piezoelectric substrate 1 by a photolithographic technique. The inside of a surface acoustic wave transducer A has the same potential since both the electrode fingers are connected electrically by the connecting electrode D. Subsequently, a bonding pad electrode B is prepared, and heat treatment is executed. In these processes, even if a charge is accumulated on the electrode surface of the electrode fingers concerned A11, A21, no current flows since the inside of the transducer A has the same potential. Therefore, disconnection of the electrode finger caused by a current is not generated. When cutting or removing the electrode D, a laser or a photolithographic technique is applied.
摘要翻译：目的：为了防止由断线引起的特性的劣化，并且通过连接第一和第二竹形盲形电极指，通过连接电极，在形成焊盘电极部时提高制造成品率。构成：通过光刻技术在压电基板1上形成叉形排列的竹盲形电极指A11，A21和连接电极D. 表面声波传感器A的内部具有相同的电位，因为两个电极指均由连接电极D电连接。接着，制备焊盘电极B，并进行热处理。在这些处理中，即使在电极指A11，A21的电极表面积累电荷，由于换能器A的内部具有相同的电位，因此不会流动电流。因此，不会产生由电流引起的电极指的断开。当切割或去除电极D时，应用激光或光刻技术。

5. 发明专利

JPS59125113A Converter of surface acoustic wave 失效
标题翻译：表面声波变换器
公开(公告)号：JPS59125113A
公开(公告)日：1984-07-19
申请号：JP20183
申请日：1983-01-06
申请人： Nippon Hoso Kyokai , Oki Electric Ind Co Ltd
发明人： SAKAMOTO NOBUYOSHI , SHIYOUJI YASUO , CHIBA TAKAO
IPC分类号： H03H3/08 , H03H9/02 , H03H9/145
CPC分类号： H03H9/14547 , H03H9/02818 , H03H9/1452 , H03H9/14573
摘要： PURPOSE:To suppress the undesired waves generated from the terminal part of an electrode by providing a triangular electrode at the terminal part of the electrode and setting the height of the triangular electrode at the level which is integer-fold as much as the wavelength in the transmitting direction. CONSTITUTION:A triangular electrode 11 is provided at the terminal part of a comb-shaped electrode finger with the length L1 which is integer-fold as much as the wavelength. The undesired waves X and Y are radiated with linear wave sources xy ans yz respectively. The waves X and Y are decomposed into surface acoustic wave oscillating electrode fingers 12 ans 22 and vertical and horizontal components X1, X2, Y1 and Y2 respectively. It can be supposed that the vertical components X1 and Y1 are radiated with linear wave sources xy2 and yy1 and that the horizontal components X2 and Y2 are radiated with linear wave sources x1y1 and y1z respectively. The sources yy1 and xy2 of the waves Y1 and X1 have an equal length to each other and are cancelled owing to a difference of transmitting distance equal to the half wavelength. While undesired waves X2 and Y2 have parallel components to each other and therefore give no effect to the filter characteristics.
摘要翻译：目的：通过在电极的端子部分设置三角形电极，将三角形电极的高度设定为整数倍的波长，来抑制从电极的端子部分产生的不需要的波长传输方向。构成：三角形电极11设置在梳状电极指的端部，长度L1为波长整数倍。不需要的波X和Y分别用线性波源xy ans yz辐射。波X和Y分别分解为声表面波振荡电极指12和22以及垂直和水平分量X1，X2，Y1和Y2。可以假设垂直分量X1和Y1用线性波源xy2和yy1辐射，并且水平分量X2和Y2分别用线性波源x1y1和y1z辐射。波形Y1和X1的源yy1和xy2彼此具有相等的长度，并且由于传输距离的差异等于半波长而被抵消。虽然不希望的波X2和Y2具有彼此的平行分量，因此不会对滤波器特性产生影响。

6. 发明专利

JPH0832400A SURFACE ACOUSTIC WAVE RESONATOR, ITS MANUFACTURE, AND SURFACE ACOUSTIC WAVE FILTER 失效
公开(公告)号：JPH0832400A
公开(公告)日：1996-02-02
申请号：JP16852394
申请日：1994-07-21
申请人： OKI ELECTRIC IND CO LTD
发明人： UU HOKU HOA , MORIMOTO SHIGEYUKI , KASAGI MASAKATSU , SAKAMOTO NOBUYOSHI
IPC分类号： H03H3/08 , H03H9/145
摘要： PURPOSE:To resonate the surface acoustic wave at the high frequency without any spurious component. CONSTITUTION:When a high frequency signal higher than several MHz is inputted to an input terminal 2, the high frequency voltage is applied to the electrode fingers of a transducer 21 to be connected with the input terminal 2. The high frequency voltage occurs inductively on the electrode fingers of the transducer 21 to be electrically connected with an adjacent output terminal 3. Due to the phase delay, the electric potential difference occurs between terminals 2 and 3. Thus, the surface of a piezoelectric substrate 1 under the transducer 21 is distorted and the surface acoustic wave of the same frequency as that of the input signal is excited. A thick film 23 is formed through an insulating film 22 on the transducer 21 and the generation of Rayleigh wave which causes the spurious of the elastic surface wave is suppressed. Then the only Love wave becomes dominant. The film width of a transducer 4 is as thick as 0.1mum which is thick enough to excite the high frequency. In short, the high frequency without any spurious component is excited.

7. 发明专利

JPH0832397A SURFACE ACOUSTIC WAVE DEVICE 失效
公开(公告)号：JPH0832397A
公开(公告)日：1996-02-02
申请号：JP16852494
申请日：1994-07-21
申请人： OKI ELECTRIC IND CO LTD
发明人： UU HOKU HOA , MORIMOTO SHIGEYUKI , KASAGI MASAKATSU , SAKAMOTO NOBUYOSHI
IPC分类号： H03H9/145
摘要： PURPOSE:To provide the surface acoustic wave (SAW) capable of adjusting the energy distribution of the surface acoustic wave. CONSTITUTION:When a high frequency signal is inputted to the input terminal 2, a high frequency voltage is applied to the electrode bingers on the side of the input terminal 2. And a high frequency voltage is generated in the electrode fingers on the side of the output terminal 3. The electric potential difference occurs between terminals due to the phase delay. Thus, the surface of a piezoelectric substrate 1 under the electrode fingers is distorted and the SAW at the same frequency as that of the input signal is excited. The SAW is propagated in the direction of reflectors 5R and 5L and the reflected waves are generated. Standing waves are generated due to the resonance between the reflected waves and a newly generated SAW. As an insulating film 10 is formed on a transducer 4, the waves are divided into the area where the electrode finger can be freely vibrated and the area where it cannot. Thus, the energy of the SAW is concentrated around the transducer 4 as a center and the leakage of SAW due to the divergence and the diffraction hardly occurs outside the area of the transducer 4, in the area on the side of the input terminal 2 and on the side of the output terminal 3.

8. 发明专利

JPH07154199A RESONATOR TYPE SURFACE ACOUSTIC WAVE FILTER 失效
公开(公告)号：JPH07154199A
公开(公告)日：1995-06-16
申请号：JP29636493
申请日：1993-11-26
申请人： OKI ELECTRIC IND CO LTD
发明人： SAKAMOTO NOBUYOSHI , MORIMOTO SHIGEYUKI , KASAGI MASAKATSU , UU HOKU HOA
IPC分类号： H03H9/64
摘要： PURPOSE:To secure a sufficient attenuation value in the attenuation band without incurring increase in a loss of a pass band, increase in chip size and deterioration in the yield. CONSTITUTION:Two stages of ladder circuits are formed by four resonator 24, 25, 26, 27. An electromechanical coupling coefficient of the 1st stage resonators 24, 25 differs from an electromechanical coupling coefficient of the 2nd stage resonators 26, 27. Thus, the attenuation characteristics of the 1st stage and the 2nd stage have the same center frequency but a different position of attenuation pole. As a result, the attenuation characteristic of the ladder circuit have four poles and the attenuation value in the attenuation band is increased.

9. 发明专利

JPH06164298A SURFACE ACOUSTIC WAVE FILTER OF MULTIPLE ELECTRODE STRUCTURE 失效
公开(公告)号：JPH06164298A
公开(公告)日：1994-06-10
申请号：JP31869492
申请日：1992-11-27
申请人： OKI ELECTRIC IND CO LTD
发明人： UU HOKU HOA , MORIMOTO SHIGEYUKI , KASAGI MASAKATSU , SAKAMOTO NOBUYOSHI
IPC分类号： H03H9/145 , H03H9/64
摘要： PURPOSE:To make input impedance equal to output impedance by connecting each transducer for transmission use to an input terminal and each transducer for reception use to an output terminal. CONSTITUTION:The transducer 2 for transmission use and the transducer 3 for reception use are formed in the same constitution (shape, characteristic, etc.) by confronting interdigital electrodes in a similar manner, and they are provided in parallel alternately on a piezoelectric substrate 1 at a constant interval. The transducer 2 for transmission use comprises a transducer system for transmission use by connecting one end terminal to the input terminal 4 with a thin film transmission line pattern 4a formed on the piezoelectric substrate, and connecting to the other end terminal (ground side) to a ground pattern 6 by a bonding wire. The transducer 3 for reception use comprises a transducer system for reception use similarly by connecting one end terminal to the output terminal 5 by a thin film transmission line pattern 5a formed on the piezoelectric substrate 1 and the other end terminal (ground side) to the ground pattern 6 by the bonding wire 6a.

10. 发明专利

JPS60105310A SURFACE ACOUSTIC WAVE FILTER 失效
公开(公告)号：JPS60105310A
公开(公告)日：1985-06-10
申请号：JP21256883
申请日：1983-11-14
申请人： OKI ELECTRIC IND CO LTD
发明人： SAKAMOTO NOBUYOSHI , SHIYOUJI YASUO
IPC分类号： H03H3/08 , H03H9/02 , H03H9/05 , H03H9/64
摘要： PURPOSE:To reduce a pass band ripple by connecting the 1st stage filter part and the 2nd stage filter part of a surface acoustic wave filter of two-stage constitution in series via an inductance. CONSTITUTION:Surface acoustic wave converters 9-14 and an inductance L are provided on a piezoelectric substrate 8. The 1st stage filter part I consists of the converters 9-11, the 2nd stage filter part II consists of converters 12-14 and the both are arranged symmetrically. The inductance L is provided between an output side of the 1st stage filter part I and the input side of the 2nd stage filter part II. The pass band ripple is less by the insertion of the inductance and the attenuation at the attenuation band is increased.

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