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91. 发明专利

JPH03104010A FORMATION OF PATTERN 失效
公开(公告)号：JPH03104010A
公开(公告)日：1991-05-01
申请号：JP23993889
申请日：1989-09-18
申请人： HITACHI LTD
发明人： TAKEMOTO KAZUNARI , AMATATSU ATSUSHI , KITO MAKOTO
IPC分类号： G11B5/31 , H01L21/302 , H01L21/3065
摘要： PURPOSE:To form patterns with higher accuracy by using the patterns trans ferred to a layer mainly consisting of C as a mask. CONSTITUTION:A 1st layer 3 contg. Cu is formed by a vapor deposition method, etc., on a thin film 2 to be worked on a substrate 1. The 2nd layer 4 mainly consisting of the C is similarly formed on the layer 3. The 3rd layer 5 which is sensitive to radiations and contains Si is formed on the layer 4 by the vapor deposition method, such as wet coating method, plasma polymn. method and vacuum vapor deposition method. The layer 5 is formed to the prescribed patterns by an ordinary lithography stage and with these patterns as a mask, the layer 4 is patterned by a dry etching method using O2. The etching rate of the layer 5 is required to be lower than at least the etching rate of the layer 4. The layer 5 is removed by a photoresist peeling agent. The layer 3 and the thin film 2 are patterned by ion etching and ion milling of excellent anisotropy with the patterns formed on the layer 4 as a mask. The layers 4, 3 are removed at need. The formation of the patterns with the higher accuracy is thus possible.

92. 发明专利

JPH03103447A SURFACE-MODIFICATION OF ORGANIC POLYMER 失效
公开(公告)号：JPH03103447A
公开(公告)日：1991-04-30
申请号：JP23993989
申请日：1989-09-18
申请人： HITACHI LTD
发明人： KITO MAKOTO , TAKEMOTO KAZUNARI , AMATATSU ATSUSHI
IPC分类号： C08J7/00
摘要： PURPOSE:To improve the paintability, adhesivity, printability, etc., of an organic polymer at a low cost by irradiating a surface of an organic polymer with plasma while keeping the surface at a high temperature. CONSTITUTION:The objective organic polymer is produced by heating a synthetic or natural polymer such as polyethylene, polyvinyl chloride or wool with an infrared lamp, etc., at 50-400 deg.C in vacuum and subjecting the hot surface to low-temperature plasma treatment by irradiating with low-frequency, high-frequency or microwave radiation.

93. 发明专利

JPH0257562B2 失效
公开(公告)号：JPH0257562B2
公开(公告)日：1990-12-05
申请号：JP8955881
申请日：1981-06-12
申请人： HITACHI LTD
发明人： KITO MAKOTO , KOKADO JUICHI , PPONDA YOSHINORI
IPC分类号： C08F2/00 , C08F2/18 , C08F2/52

94. 发明专利

JPH01286113A MAGNETIC DISK AND ITS PRODUCTION 失效
公开(公告)号：JPH01286113A
公开(公告)日：1989-11-17
申请号：JP11472888
申请日：1988-05-13
申请人： HITACHI LTD
发明人： KITO MAKOTO , KOKADO YUICHI , ITO MAKIKO
IPC分类号： G11B5/66 , G11B5/64 , G11B5/65 , G11B5/72 , G11B5/73
摘要： PURPOSE:To obtain excellent wear resistance, exfoliation resistance and crack resistance by providing a thin magnetic metallic film layer on a nonmagnetic body and forming a protective film consisting of a hard carbon film contg. metal elements selected from a specific group thereon. CONSTITUTION:The protective film 4 consisting of the hard carbon film contg. >=1 kinds of the metal elements selected from the group consisting of Si, Ge, Se, Sn, and Pb is formed on the layer 2 of a substrate 3 formed by providing the thin magnetic metallic film layer 2 on the nonmagnetic base body 1. The above-mentioned hard carbon film contg. at least one kind of the metal elements among the Si, Ge, Sn, and Pb has high hardness and is highly resistant to exfoliation and crack. The internal stress is decreased and bonds are formed between the additive metal elements and the magnetic layer as well as carbon by adding the above-mentioned metal elements to the magnetic layer, by which the resistance to exfoliation and crack is improved.

95. 发明专利

JPH01267837A METHOD AND APPARATUS FOR PRODUCING MAGNETIC RECORDING MEDIUM 失效
公开(公告)号：JPH01267837A
公开(公告)日：1989-10-25
申请号：JP9340488
申请日：1988-04-18
申请人： HITACHI LTD
发明人： KOKADO YUICHI , KITO MAKOTO , ITO MAKIKO
IPC分类号： G11B5/84
摘要： PURPOSE:To stably assure and adequate amt. of a lubricating agent by introducing the vapor of a chain polymer having a functional group having a photosensitive characteristic at the terminal into a carbonaceous protective film, then subjecting the film to irradiation by UV light or far-UV light to bring the functional group having the photosensitive characteristic into reaction, thereby generating a chemical bond among the carbon atoms constituting the carbonaceous protective film. CONSTITUTION:A 1st layer having ferromagnetic is provided on the surface of a nonmagnetic substrate and the 2nd layer essentially consisting of amorphous carbon is provided on the 1st layer. The sample obt. in such a manner is held in the vapor of the compd. which is the chain polymer contg. the functional group having the photosensitive characteristic and is of 5-20C in the chain part. The sample is then irradiated by the UV light or far UV light to fix the compd. of 5-20C to the surface of the 2nd layer. The carbonaceous protective film and lubricating film are thereby formed, by which the lubricating agent is securely fixed to the surface of the carbonaceous protective film and, therefore, the lubricating performance is maintained stably over a long period of time.

96. 发明专利

JPH01263917A MAGNETIC RECORDING MEDIUM 失效
公开(公告)号：JPH01263917A
公开(公告)日：1989-10-20
申请号：JP9130188
申请日：1988-04-15
申请人： HITACHI LTD
发明人： ITO MAKIKO , KITO MAKOTO , KOKADO YUICHI
IPC分类号： G11B5/66 , G11B5/65 , G11B5/72
摘要： PURPOSE:To improve the corrosion resistance, lubricity and wear resistance of the magnetic recording medium formed with a thin metallic film as a recording layer by providing two layers of amorphous carbon films having specific densities on the recording layer. CONSTITUTION:Protective films consisting of the two layers provided with the thin amorphous carbon film (1st layer) 5 having 0.13-0.18 gram atom density and the thin amorphous carbon film (2nd layer) 6 having 0.20-0.29 gram atom density is provided on the recording layer 4 consisting of the thin metallic film to constitute the magnetic recording medium. The protective films which have all of the advantages in case of the respective independent films and have the excellent corrosion resistance, lubricity, wear resistance and adhesiveness to the magnetic layer to compensate the disadvantages with each other are, therefore, obtd. The corrosion resistance, lubricity and wear resistance of the recording medium are thereby improved.

97. 发明专利

JPH01141923A APPARATUS FOR PLASMA TREATMENT 失效
公开(公告)号：JPH01141923A
公开(公告)日：1989-06-02
申请号：JP30021687
申请日：1987-11-30
申请人： HITACHI LTD
发明人： TAKEMOTO KAZUNARI , TENSHIN ATSUSHI , KITO MAKOTO
IPC分类号： C08J7/00
摘要： PURPOSE:To carry out plasma treatment while preventing the surface of a plastic from being deteriorated due to ion damage to the plasma, by providing many small holes on a cylindrical electrode and an electrically conductive cylinder having many small holes at specified positions. CONSTITUTION:Many small holes 6 for gas passage are provided on a cylindrical electrode 4 in a treating chamber 1 which is a cylindrical closed vessel provided with a gas inlet 2 and a gas outlet 3 and on an electrically conductive metal cylinder 5 which is placed inside the electrode 4 and outside a position where a material to be treated is placed so as to be electrically isolated. The electrode 4 is connected with a high-frequency electric source 7 contg. a matching circuit and the potential of the treating chamber 1 is grounded. Electrical discharge is generated between the electrode 4 and the inside of the treating chamber 1 and plasma gas is passed through small holes 6 of the electrode 4 and the metal cylinder 5 to be used for plasma treatment of the material to be treated placed inside the metal cylinder 5. This apparatus is especially useful for plasma treatment of the surface of polyolefin resin molded item.

98. 发明专利

JPS6446221A MAGNETIC DISK 失效
公开(公告)号：JPS6446221A
公开(公告)日：1989-02-20
申请号：JP20176587
申请日：1987-08-14
申请人： HITACHI LTD
发明人： HONDA YOSHINORI , KOKADO YUICHI , KITO MAKOTO
IPC分类号： G11B5/82 , C23C14/06 , C23C14/14 , C23C14/34 , G11B5/84
摘要： PURPOSE:To realize the low floating and stable floatability of a head by using single crystal graphite as a target material to be used for formation of a sputtered carbon film. CONSTITUTION:After an underlying film 10 is formed on an aluminum substrate 9, a magnetic layer 11 is formed thereon and a protective layer 12 consisting of the carbon film formed by sputtering of the single crystal graphite used as a target is provided thereon. Namely, the single crystal graphite having high electrical stability and thermal stability is used as the target. The problems such as the defect of the single crystal graphite, generation and adhesion of dust and generation of pinholes therein are thereby solved and the low floating and stable floatability of the head are assured.

99. 发明专利

JPS6414713A MAGNETIC RECORDING MEDIUM 失效
公开(公告)号：JPS6414713A
公开(公告)日：1989-01-18
申请号：JP16869187
申请日：1987-07-08
申请人： HITACHI LTD
发明人： HONDA YOSHINORI , KITO MAKOTO , AMATATSU ATSUSHI
IPC分类号： G11B5/66 , G11B5/64 , G11B5/72 , G11B5/73
摘要： PURPOSE:To improve corrosion resistance, wear resistance and hygroscopicity by treating the surface of a carbon film by an ionized active gas. CONSTITUTION:The active gas is ionized by using an ion source and the ions thereof are acceleratively bombarded to the surface of a protective lubricating film consisting of carbon, by which the radical species of the carbon are crushed and pinholes are filled. The usable active gases are particularly exemplified by boranes such as B2H6, B4H10, B5H9, and B6H10, silanes such as SiH4, Si2H6, Si3H8, and Si4H10, and perfluorocarbons such as CF4, C2F4, C3F8 and C4F8. The energy meeting the bond energy is applied and bombarded to such relatively active molecular groups having the couplers as much as to meet the unsatd. couplers of the active carbon film. The corrosion resistance and wear resistance are thereby improved and the coefft. of static friction is maintained and decreased.

100. 发明专利

JPS63205813A MAGNETIC RECORDING MEDIUM 失效
公开(公告)号：JPS63205813A
公开(公告)日：1988-08-25
申请号：JP3791087
申请日：1987-02-23
申请人： HITACHI LTD
发明人： KOKADO YUICHI , KITO MAKOTO , HONDA YOSHINORI
IPC分类号： G11B5/66 , C09D171/02 , C10M105/02 , C10M105/24 , C10M105/34 , C10M107/38 , C10N40/18 , G11B5/64 , G11B5/72 , G11B5/725 , G11B5/73
摘要： PURPOSE:To enhance and sustain wear resistance and lubricity and to improve reliability by providing an amorphous carbon film as a protective film of a thin type magnetic layer and forming a lubricating protective film molecular- bound with a straight chain org. compd. layer further thereon. CONSTITUTION:The amorphous carbon (a-C) film essentially consisting of carbon is formed on a magnetic layer consisting of a thin ferromagnetic material film and the lubricating protective film consisting of the straight chain compd. molecular-bound to the a-C film is further disposed thereon. The a a-C film is formed by a thermal cracking method of gaseous hydrogen, plasma cracking method, ion beam deposition method, etc., and the film thickness thereof is preferably about 30-2000Angstrom . The straight chain org. compd. layer molecular- bound to the surface of the a-C film is a straight chain hydrocarbon and the deriv. Thereof, satd. fatty acid and the thereof, etc., and has a vinyl group, allyl group, epoxy group, etc., at the terminal thereof. The film thickness thereof is preferably in a 10-200Angstrom range. The magnetic recording medium which has the good wear resistance and lubricity, excellent durability for a long period of time and high reliability and permits. high-density recording is obtd. by such constitution.

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