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    • 91. 发明专利
    • Probe card and inspection device
    • 探针卡和检查装置
    • JP2013110367A
    • 2013-06-06
    • JP2011256564
    • 2011-11-24
    • Micronics Japan Co Ltd株式会社日本マイクロニクス
    • SUZUKI TAIKIFUKITA RYUJIKIMURA AKIRATAKAHASHI NOBUYASU
    • H01L21/66G01R1/073G01R31/26
    • PROBLEM TO BE SOLVED: To provide a probe card which, when connected to an inspection object, can adjust the relative positions of a light source and the inspection object.SOLUTION: The present invention relates to an inspection device which is electrically connected to an inspection object W1 having a light-receiving part W11 and an electrode W12 via a probe card to execute inspection processing on the inspection object W1. The probe card is the one which is used to attach, to a board, a board 20 having a contact maker 11 to electrically connect with the inspection object W1 disposed on a surface on one side thereof and a light source 41 capable of applying light toward the inspection object W1. The probe card includes a fitting member having a plurality of light source support parts 52 to support the light source 41. On a board surface 30 different from the surface of the board 20 on which the contact maker 11 is disposed are erected struts 61 to respectively support the light source support parts 52, each of the light source support parts 52 being operably supported along the struts 61.
    • 要解决的问题:提供一种当连接到检查对象时可以调节光源和检查对象的相对位置的探针卡。 检测装置技术领域本发明涉及一种检查装置,其通过探针卡电连接到具有受光部W11的检查对象W1和电极W12,以对检查对象W1进行检查处理。 探针卡是用于连接到板的板,具有接触器11的电路板20,其与设置在其一侧的表面上的检查对象W1电连接,以及能够朝向 检查对象W1。 探针卡包括具有多个用于支撑光源41的光源支撑部52的配合构件。在与设置有接触器11的基板20的表面不同的基板面30上分别竖立着支柱61 支撑光源支撑部分52,每个光源支撑部分52沿着支柱61可操作地支撑。版权所有:(C)2013,JPO&INPIT
    • 99. 发明专利
    • Maintenance mechanism of repair device
    • 维修设备维护机制
    • JP2012218823A
    • 2012-11-12
    • JP2011082941
    • 2011-04-04
    • Micronics Japan Co Ltd株式会社日本マイクロニクス
    • SAITO TAKESHIKIKUTA MAKOTO
    • B65G49/06B23K26/00G02F1/13G09F9/00H01L21/68
    • PROBLEM TO BE SOLVED: To improve workability during the maintenance of an enlarged device.SOLUTION: A maintenance mechanism of a repair device includes a worktable with a plate to be repaired is placed, guide rails arranged on both sides of the worktable, a portal stage which is movably supported by each guide rail and stretched over the worktable, and a repair unit which is slidably supported by the portal stage in the direction perpendicular to the guide rails, and repairs the plate to be repaired on the worktable. The maintenance mechanism is constituted of foot rests to be fitted to each guide rail, and a top plate which is placed on each foot rest and stretched over the worktable.
    • 要解决的问题:为了提高在扩大装置的维护期间的可操作性。 解决方案:修理装置的维护机构包括具有待修复的板的工作台,布置在工作台两侧的导轨,由每个导轨可移动地支撑并在工作台上延伸的入口台 ,以及维修单元,其在垂直于导轨的方向上由入口台可滑动地支撑,并且在工作台上修理待修理的板。 维护机构由要搁置在每个导轨上的搁脚板构成,顶板设置在每个脚踏板上并在工作台上延伸。 版权所有(C)2013,JPO&INPIT