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1. 发明专利

JPH09217178A PRODUCTION OF THIN FILM BY HYDROTHERMAL SYNTHESIS METHOD 失效
公开(公告)号：JPH09217178A
公开(公告)日：1997-08-19
申请号：JP7704496
申请日：1996-03-29
申请人： TOKAI RUBBER IND LTD
发明人： KANBE YUMI , ISAJI MASAHISA , TANAKA MASAYOSHI , INUBUSHI MASAAKI , OBA YOKO
IPC分类号： C01G1/00 , B01J19/08 , C01G25/00 , C23C18/12 , C30B7/10 , C30B29/22 , H01L41/187 , H01L41/39 , H01L41/24
摘要： PROBLEM TO BE SOLVED: To provide a process for industrially producing homogeneous films with good reproducibility inexpensively in a method for forming the thin films of a multi component oxide by a hydrothermal synthesis method on a substrate. SOLUTION: This hydrothermal synthesis method forms the thin film of the multi component oxide on the substrate by holding the substrate in an aq. soln. dissolved with plural metal salts under pressurization conditions and heating the substrate while applying vibration of >=1Hz perpendicularly on the substrate. The thin film is hydrothermally synthesized in one stage by using the multi component oxide forming raw material consisting of the remaining combination exclusive the compd. reacting with the metal elements on the surface of the substrate. The thin film is hydrothermally synthesized in two stages by using all of the raw material compds. after the crystal nuclei of the multi component oxide are precipitated in the first stage. As a result, the multi component oxide thin film exhibiting a piezoelectric characteristic is produced to a large area at a uniform thickness even if the substrate is not subjected to a polarization treatment. Since a high-temp. treatment, such as baking, is not required, the use of an org. material for the substrate is possible as well. This process is, therefore, applicable to the production of piezoelectric elements, such as piezoelectric monomorph and piezoelectric bimorph and various composite materials, such as laminated actuators and laminate capacitors.

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