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1. 发明专利

JP2001358352A INTEGRATED THIN FILM SOLAR CELL 失效
公开(公告)号：JP2001358352A
公开(公告)日：2001-12-26
申请号：JP2000178879
申请日：2000-06-14
申请人： SHARP KK
发明人： HAYAKAWA HISASHI , KIDOGUCHI SUSUMU , TANIGUCHI HIROSHI
IPC分类号： H01L31/04 , H01L31/042
摘要： PROBLEM TO BE SOLVED: To obtain a multilayer thin film solar cell in which adjacent power generating regions are isolated electrically from each other and a photoelectric conversion layer and/or a second electrode layer can be prevented from stripping. SOLUTION: A silicon based electric insulation film containing a second element with respect to silicon is formed beneath an isolation trench between adjacent power generating regions formed by shaping a second electrode layer and the content of the second element in the silicon based electric insulation film is made uneven in the film thickness direction thus obtaining a multilayer thin film solar cell.

2. 发明专利

JP2000124487A INTEGRATED THIN FILM SOLAR BATTERY AND ITS MANUFACTURE 失效
公开(公告)号：JP2000124487A
公开(公告)日：2000-04-28
申请号：JP29190598
申请日：1998-10-14
申请人： SHARP KK
发明人： HAYAKAWA HISASHI , NAKANISHI TAKESHI , SANNOMIYA HITOSHI , KIDOGUCHI SUSUMU , TANIGUCHI HIROSHI , NOMOTO KATSUHIKO
IPC分类号： H01L31/04
摘要： PROBLEM TO BE SOLVED: To efficiently and inexpensively provide a thin film solar battery which is precisely integrated with high yield. SOLUTION: An integrated thin film solar battery contains a lower electrode layer 2, a photoelectric conversion layer 3 and an upper electrode layer 4, which are sequentially stacked. Plural power generation areas separated by a prescribed separation groove are electrically connected in series. A conduction land 5 is installed in the width of the groove 2g separating the lower electrode layer between one arbitrary first power generation area and the adjacent second power generation area. The upper electrode 4a of the first power generation area is connected to the conduction land 5, and the conduction land 5 is connected to the lower electrode 2b of the second power generation area in an area except for the power generation area.

3. 发明专利

JPH11126916A INTEGRATED-TYPE THIN FILM SOLAR CELL AND ITS MANUFACTURE 失效
公开(公告)号：JPH11126916A
公开(公告)日：1999-05-11
申请号：JP29289797
申请日：1997-10-24
申请人： SHARP KK
发明人： UMEMOTO TETSUMASA , KIDOGUCHI SUSUMU
IPC分类号： H01L31/04 , H01L27/142 , H01L31/052
摘要： PROBLEM TO BE SOLVED: To form a side crystallized contact in an amorphous semiconductor optoelectric transducing layer, by specifying the wavelength of laser beams, in addition to the contact effects of a contact line part which is removed by making a groove. SOLUTION: Laser beams to be used for scribe process are applied from the side of a light transmitting insulating board 1, on which no transparent electrode layer 3 nor amorphous semiconductor optoelectric transducing layer 5 is not stacked, by using the second harmonics (0.660 μm) of a Q-switch oscillation Nd-YLF laser (1.3197 μm), and a scribe groove having a width of 50 μm is formed. When the scribe process is performed with laser beams having a wavelength over 0.60 μm, local thermal processing operation increases and thermal influences are given to the periphery of the processing plane whereupon laser beams are applied. Therefore, a side crystallized contact line 4b is formed in the amorphous semiconductor optoelectric transducing layer by the thermal effects of the patterning line edge side on the amorphous semiconductor optoelectric transducing layer 5.

4. 发明专利

JPH10303444A MANUFACTURE OF SOLAR BATTERY 失效
公开(公告)号：JPH10303444A
公开(公告)日：1998-11-13
申请号：JP10919297
申请日：1997-04-25
申请人： SHARP KK
发明人： UMEMOTO TETSUMASA , KIDOGUCHI SUSUMU
IPC分类号： B23K26/00 , H01L31/046 , H01L31/0463 , H01L31/04
摘要： PROBLEM TO BE SOLVED: To perform the processing with accuracy by keeping the focus of a laser beam constant, when performing the screen processing by the laser beam for an integrated solar battery. SOLUTION: A three-layer interface A1 where an insulating substrate 1, a transparent conductive layer 3, and a photoelectric transfer layer 2 on a first scribe line S1 cross, or a two-layer interface A2 vertical to the insulating substrate 1 between the transparent conductive layer 3 and the photoelectric transfer layer 2 on the first scribe line S2 is made the sight of the focus of a laser beam L, when performing the scribe processing to divide and pattern the photoelectric transfer layer 2, by applying a laser beam L toward the photoelectric transfer layer 2 from the side of the insulating substrate 1 from a laser device which has an automatic focus mechanism. The scribe processing is performed while keeping the face to be processed within the processing tolerable depth of the laser beam L, and the first scribe line S1 and the second scribe line S2 are superposed on each other.

5. 发明专利

JP2006341547A PRINTING MASK, SCREEN PRINTING METHOD, MANUFACTURING METHOD FOR PHOTOELECTRIC TRANSDUCER, AND PHOTOELECTRIC TRANSDUCER 审中-公开
公开(公告)号：JP2006341547A
公开(公告)日：2006-12-21
申请号：JP2005170818
申请日：2005-06-10
申请人： SHARP KK
发明人： KIDOGUCHI SUSUMU
IPC分类号： B41N1/24 , B41C1/02 , B41M1/12 , H01L31/04 , H05K3/12
摘要： PROBLEM TO BE SOLVED: To provide a printing mask which can offer the degree of freedom to the shape and arrangement of a pattern of an opening, a screen printing method using the printing mask, a manufacturing method for a photoelectric transducer using the printing mask, and the photoelectric transducer. SOLUTION: In a metal mask 1, support parts 1a are formed at predetermined intervals in an opening 1b corresponding to a sub-electrode of a solar battery, and also formed at predetermined intervals in an opening 1c corresponding to a main electrode. A part, on the side of one main surface, of the support part 1a is positioned in such a manner as to be flush with one main surface of the metal mask 1, and a part, on the side of the other main surface, of the support part 1a is positioned in such a manner as to recede to the side of one main surface of the metal mask from the other main surface thereof, so that the support part 1a can be set thinner. A photosensitive emulsion is applied to the surface, except the support part, of the metal mask 1. COPYRIGHT: (C)2007,JPO&INPIT

6. 发明专利

JP2003251784A METHOD AND APPARATUS FOR MANUFACTURING PRINTED BOARD, PRINTING PASTE AND SOLAR CELL MANUFACTURED BY THEM 审中-公开
公开(公告)号：JP2003251784A
公开(公告)日：2003-09-09
申请号：JP2002056052
申请日：2002-03-01
申请人： SHARP KK
发明人： KIDOGUCHI SUSUMU , NUNOI TORU
IPC分类号： B41F15/40 , B41F15/08 , B41F15/26 , B41M1/30 , H05K3/12
摘要： PROBLEM TO BE SOLVED: To provide a method and apparatus for manufacturing a printed board having no fear breaking a part of a printing pattern, easily forming printing paste into a thick film and capable of obtaining printed wiring of high accuracy. SOLUTION: A large number of electromagnets 8 as a magnetic force generation mechanism are parallelly built in a mount base 7 of a thick film circuit printing apparatus under the board 6 to be printed. Herein, a printing squeegee 4 scans a screen mask 3 comprising a screen 1 and a photosensitive emulsion 2 to push out silver paste 5 on the upper surface of the board 6 to be printed. Thereafter, all of the electromagnets 8 are turned ON to make the magnetic fields of them effective. Subsequently, the screen mask 3 is separated by 2 mm from the board 6 to be printed to perform plate separation. COPYRIGHT: (C)2003,JPO

7. 发明专利

JPH10242489A FABRICATION OF THIN FILM SOLAR CELL 失效
公开(公告)号：JPH10242489A
公开(公告)日：1998-09-11
申请号：JP4352597
申请日：1997-02-27
申请人： SHARP KK
发明人： UMEMOTO TETSUMASA , KIDOGUCHI SUSUMU
IPC分类号： H01L31/04 , H01L31/0224 , H01L31/18
摘要： PROBLEM TO BE SOLVED: To perform pattering of a backside reflective electrode layer well using laser light by irradiating the backside reflective electrode layer with the fourth harmonic of Nd-YAG laser light thereby patterning the backside reflective electrode layer. SOLUTION: The fourth harmonic 11 of Nd-YAG laser light is irradiated from the backside reflective metal film layer 8 side. The layer 8 is irradiated normally with the fourth harmonic of a Q switch oscillation Nd-YAG laser. The number of scanning time is only one. Consequently, Ag of the layer 8 and ZnO of a backside transparent conductive layer 7 are removed and a groove 10 for scribing a backside reflective electrode layer 9 is formed. Since the evaporation energy of Ag-Ag is 2.64eV/atom and the energy of the fourth harmonic is 4.66eV, the laser light can unbond and evaporate Ag directly. According to the method, thermal damage on an amorphous semiconductor photoelectric conversion layer 5 can be reduced significantly and patterning can be effected well using laser light.

8. 发明专利

JP2001210851A INTEGRATED THIN-FILM SOLAR CELL 失效
公开(公告)号：JP2001210851A
公开(公告)日：2001-08-03
申请号：JP2000015737
申请日：2000-01-25
申请人： SHARP KK
发明人： KIDOGUCHI SUSUMU , HAYAKAWA HISASHI , TANIGUCHI HIROSHI
IPC分类号： H01L31/042 , H01L31/04
摘要： PROBLEM TO BE SOLVED: To isolate an upper electrode layer at a high speed and in high yield. SOLUTION: When a splitting groove 14 is formed in a lower electrode layer 12 by the laser scribe method and a substrate is insulated and split, a square groove 15 is formed just beneath a position where an upper electrode layer 19 is insulated and split and a square insulating and isolating area insulated electrically from its periphery is formed. Then, the upper electrode layer 19, a photoelectric conversion layer 16, and the lower electrode layer 12 are simulteneously removed in the intermediate part in the widthwise direction of the insulating and isolating area, by using a laser light, thus forming a splitting groove 21 for insulating and isolating the upper electrode layer 19. Thus, the splitting groove 21 is formed in the insulating and isolating area, thereby giving no damage to such a part that functions as a power generating area in the photoelectric conversion layer 16. Therefore, it is unnecessary to carefully control a laser light not to damage the photoelectric conversion layer 16 or lower electrode layer 12 as in the conventional manner, and the substrate can be treated at a high speed and in high yield.

9. 发明专利

JP2000261020A INTEGRATED THIN-FILM SOLAR BATTERY 失效
公开(公告)号：JP2000261020A
公开(公告)日：2000-09-22
申请号：JP6617099
申请日：1999-03-12
申请人： SHARP KK
发明人： KIDOGUCHI SUSUMU , HAYAKAWA HISASHI , TANIGUCHI HIROSHI
IPC分类号： H01L31/042
摘要： PROBLEM TO BE SOLVED: To provide an integrated thin-film solar battery for preventing the loss of a power generating area, due to the failure of isolation and connection due to patterning, and for reducing a connection resistance loss. SOLUTION: An integrated thin-film solar battery 10 is provided with plural power generating regions constituted of a lower electrode layer 2, a photoelectric converting layer 3, and an upper electrode layer 4 on the same substrate 1 having an insulating surface. The upper electrode layer 4 is divided by mutually crossing first patterning grooves 5 and second patterning grooves 6, and the lower electrode layer 2 is divided by third patterning grooves 7 along the first patterning grooves 5.

10. 发明专利

JPH10277772A LASER BEAM MACHINING DEVICE FOR SUBSTRATE 失效
公开(公告)号：JPH10277772A
公开(公告)日：1998-10-20
申请号：JP8398797
申请日：1997-04-02
申请人： SHARP KK
发明人： UMEMOTO TETSUMASA , KIDOGUCHI SUSUMU
IPC分类号： B23K26/00 , B23K26/10
摘要： PROBLEM TO BE SOLVED: To improve reliability and the yield in beam machining by vacuum- sucking an entire substrate to a glazing bar having the same height as a supporting base, after vacuum-sucking and temporarily fixing the periphery of the substrate to the supporting base, and thereby surely correcting the camber/gravitational flexion for maintaining flatness. SOLUTION: The inside of a tube for a peripheral inlet/outlet port 6 is decompressed by a suction/exhaust pump 10 through the port 6 provided in a supporting part 4, so that the four sides in the periphery of a substrate 1 set on a stage 3 are vacuumsucked to the supporting part 4. In addition, the peripheral inlet/outlet port 6 is connected to a peripheral suction/exhaust valve 8 through its tube 61; and, with the valve 8 controlled by the controller, the sucking strength is designed to be arbitrarily adjustable. Further, the entire substrate 1 is fixed on the stage 3 by vacuum-sucking the center of the substrate 1 to a glazing bar 5 by a center inlet/outlet port 7 provided in the center of the stage 3.

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