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    • 4. 发明专利
    • Ceramics green sheet and method of producing the same
    • 陶瓷绿板及其生产方法
    • JP2008169050A
    • 2008-07-24
    • JP2007001004
    • 2007-01-09
    • National Institute Of Advanced Industrial & Technology独立行政法人産業技術総合研究所
    • YASUOKA MASAKIHOTTA YUJIWATARI KOJIISOBE TOSHIHIROSHIRAI TAKASHI
    • C04B35/622
    • PROBLEM TO BE SOLVED: To provide a ceramics green sheet and a method of producing the same. SOLUTION: In the production method of the ceramics green sheet using a ceramics slurry containing at least an organic binding agent, a solvent, a surfactant/dispersant and raw material ceramics, an aqueous solvent is used as the solvent, and a uniform dispersion slurry obtained by using a raw ceramics containing particles with an average particle diameter of at most 100 nm as the above ceramics material is tape-molded and dried to form a tape molding. The ceramics green sheet and the part material of the ceramics sheet are produced by the above method, and then the high quality ceramics green sheet and the part material can be provided by using a ceramics powder of nano sizes as a raw material. COPYRIGHT: (C)2008,JPO&INPIT
    • 待解决的问题:提供一种陶瓷生片及其制造方法。 解决方案:在使用至少含有有机粘合剂,溶剂,表面活性剂/分散剂和原料陶瓷的陶瓷浆料的陶瓷生片的制造方法中,使用水性溶剂作为溶剂,均匀 使用含有平均粒径为100nm以下的颗粒的原料陶瓷作为上述陶瓷材料得到的分散浆料进行带状成型并干燥,形成带状成型体。 通过上述方法制造陶瓷生片和陶瓷片的部件材料,然后可以通过使用纳米尺寸的陶瓷粉末作为原料来提供高质量的陶瓷生片和部件材料。 版权所有(C)2008,JPO&INPIT
    • 8. 发明专利
    • Plasma corrosion-resistant material, manufacturing method therefor, and component using the same
    • 等离子体耐腐蚀材料及其制造方法及其组成
    • JP2006008493A
    • 2006-01-12
    • JP2004269151
    • 2004-09-16
    • National Institute Of Advanced Industrial & Technology独立行政法人産業技術総合研究所
    • KUME MASAICHIWATARI KOJIYASUOKA MASAKI
    • C04B35/581H01B3/12
    • PROBLEM TO BE SOLVED: To provide a plasma corrosion-resistant component and a manufacturing method therefor. SOLUTION: The subject plasma corrosion-resistant material is composed of aluminum nitride as a major component and has a dielectric loss (tan δ) of ≤5×10 -3 at ≥1 G(10 9 )Hz. The plasma corrosion-resistant component with excellent dielectric loss characteristics having a dielectric loss (tan δ) of ≤5×10 -3 when exposed to a high-frequency plasma of ≥1 GHz containing a fluoride-based reactant gas is manufactured by using aluminum nitride as the major component and sintering with an addition of a minute amount of yttrium oxide and magnesium oxide or magnesium nitride without using a special sintering apparatus such as a microwave sintering apparatus and a high pressure gas sintering apparatus, and without reheating after sintering, and without annealing at an extremely slow cooling speed such as 0.7°C/minute for a long time in a wide range of temperature. COPYRIGHT: (C)2006,JPO&NCIPI
    • 要解决的问题:提供等离子体耐腐蚀部件及其制造方法。 解决方案:目标等离子体耐腐蚀材料由氮化铝作为主要成分组成,并且在≥1G(10)时具有≤5×10 -3 的介电损耗(tanδ) 9 )赫兹。 具有优异的介电损耗特性的等离子体耐腐蚀成分,当暴露于含有氟化物基的≥1GHz的高频等离子体时,具有≤5×10 -3 的介电损耗(tanδ) 通过使用氮化铝作为主要成分制造反应气体,并且在不使用微波烧结装置和高压气体烧结装置等特殊烧结装置的情况下,通过添加微量氧化钇和氧化镁或氮化镁进行烧结, 烧结后不进行再加热,并且在宽温度范围内长时间以非常缓慢的冷却速度如0.7℃/分钟进行退火。 版权所有(C)2006,JPO&NCIPI